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Ulvac G-TRAN SW100-A, Инструкция по эксплуатации

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SK00-9663-EI-003-00 

I 

Vacuum Gauge 

 

Instruction Manual

 

 

G-TRAN series 
Pirani Vacuum Gauge Sensor Unit 

Analog Output Type        SW100-A 
Serial Communication Type SW100-R 

 

 

 

This instruction manual describes the serial numbers after 

the following numbers. 

SW100-A

：

S/N 00001

～

 

SW100-R

：

S/N 00001

～

 

 

Please be sure to read this before using this product. 
Also, please keep it in a safe place so that you can use it 
at any time.

 

 

 ULVAC, Inc. Components Division  

https://www.ulvac.co.jp/en/

 

 

 

Содержание G-TRAN SW100-A

Страница 1: ...erial Communication Type SW100 R This instruction manual describes the serial numbers after the following numbers SW100 A S N 00001 SW100 R S N 00001 Please be sure to read this before using this product Also please keep it in a safe place so that you can use it at any time ULVAC Inc Components Division https www ulvac co jp en ...

Страница 2: ...f the instruction manual are subject to change or revision without notice due to changes in product specifications or product improvements Saftety symbol marks The warning display in this instruction manual contains a symbol mark for safety so that you can understand the matters to be observed The words used for the symbol mark are used properly as follows WARNING Failure to follow this warning in...

Страница 3: ...safety ultra low voltage standard EN61010 SELV E Also attach a fuse to the connection WARNING Power supply lightning surge compatible For the power supply use a power supply that supports lightning surges If it is not compatible with lightning surges it may damage this unit and the devices connected to this unit or cause a fire WARNING Protective ground Be sure to electrically connect this unit to...

Страница 4: ... environment Use this instrument within the environment specified in the specifications WARNING Usage environment condensation humidity temperature Do not use it in a place where this unit is exposed to water or where the humidity is high and condensation occurs If water gets inside this unit it may cause a malfunction electric leakage or fire Also using it outside the specified temperature range ...

Страница 5: ...le of pirani vacuum gauge the ambient temperature of the sensor affects the measured value If the ambient temperature deviates significantly from the temperature at the time of calibration about 25 adjust the atmospheric pressure and zero point CAUTION Contact capacity The capacity of the externally installed contacts should be equal to or higher than the input power supply voltage or DC30V or hig...

Страница 6: ...pacitor is used for the electric circuit inside this unit Generally aluminum electrolytic capacitors have a limited life and the higher the ambient temperature the shorter the life To prevent damage to the equipment we recommend that you perform maintenance about once every three years CAUTION Impact Do not give a shock to this unit The impact may cause the filament to disconnection the sensor to ...

Страница 7: ...SK00 9663 EI 003 00 VII Revision history Date Number Reason 2022 10 3 00 First edition ...

Страница 8: ...0 R 21 4 POWER SUPPLY INTERNAL CIRCUIT 22 5 SIGNALS 23 5 1 PRESSURE SIGNAL OUTPUT 23 Pressure conversion formula 23 Measured value output in each state 23 5 2 I O OUTPUT SIGNAL 24 Sensor error signal 24 Setpoint operation signal 24 5 3 I O INPUT SIGNAL ANALOG OUTPUT TYPE SW100 A ONLY 25 6 SETPOINT SETTINGS 26 6 1 SETPOINT ON OFF PRESSURE 26 7 HOW TO USE SERIAL COMMUNICATION SERIAL COMMUNICATION TY...

Страница 9: ...2 REMOVAL OF SENSOR 42 10 3 MOUNTING THE SENSOR 42 10 4 LEAK TEST 42 10 5 ADJUSTMENT AFTER REPLACEMENT OF SENSOR42 11 HOW TO USE UL MOBI 43 11 1 FUNCTION 43 11 2 WINDOWS VERSION UL MOBI 44 Usage environment 44 Download install 45 How to use 45 11 3 ANDROID VERSION UL MOBI 50 Usage environment 50 Download install 50 How to use 50 11 4 STATUS COMMENT 56 12 TROUBLESHOOTING 57 12 1 TROUBLESHOOTING 57 ...

Страница 10: ...a USB cable and UL MOBI can be used for monitoring and settings For the UL MOBI download method and operation method refer to Chapter 11 of this manual Settings that require UL MOBI are setpoint OUTPUT ADDRESS BAUD RATE and CHECKSUM For details refer to Chapter 7 of this manual and Chapter 11 of this manual Windows Android devices and USB cables are not included UL MOBI for Windows requires a devi...

Страница 11: ... sensor Selected one is included Refer to Section 18 2 Sensor for SW100 1本 SWP 16 NW16 SWP 25 NW25 SWP R1 8 R1 8 SWP P18 φ18Tube SWP P15 φ15Tube SWP CF16 ICF034 SWP 1S ASME BPE sanitary1 Measurement pressure range N2 5 0 10 2 Pa to 1 0 10 5 Pa Measurement accuracy 1 N2 1 10 1 Pa to 1 10 4 Pa 10 5 10 2 Pa to 1 10 1 Pa 1 10 4 Pa to 1 10 5 Pa 20 Repeatability 1 10 1 Pa to 1 10 4 Pa 2 Measuring gas ty...

Страница 12: ...15 to 80 no condensation Storage temperature 20 to 65 no energization no condensation Sensor heating temperature Sensor only 150 without SW100 When heating deviations from specifications such as accuracy is observed The operating temperature range of SW100 is 5 to 40 Mounting position Free IP protection class IP30 Power supply voltage Rated voltage DC 24V Voltage fluctuations DC 14V to 30VMAX 42 2...

Страница 13: ...m3 7 6cm3 13 9cm3 10 0cm3 11 3cm3 8 2cm3 Weight 45g 48g 44g 43g 30g 60g 95g accuracy 1 The accuracy after atmospheric pressure and zero point adjustment Please carry out atmospheric pressure and zero point adjustment before use especially Moreover since calibration gas is N2 when other gas is measured be careful of an error of measurement ...

Страница 14: ...as disconnection of filaments and changes in pressure characteristics occur When using in such an environment install an isolation valve between this unit and the vacuum chamber to protect it from exposure to these gases as much as possible Use in a CVD gas atmosphere etc When exposed to CVD Chemical Vapor Deposition raw material gas or gas that accumulates such as oil mist of rotary pumps problem...

Страница 15: ...es connected to this unit or cause a fire Power supply voltage Before turning on the power check that the working voltage of this unit and the power supply are correct Connecting the wrong power supply may damage this unit and the devices connected to this unit or cause a fire In particular do not apply a voltage exceeding DC 30V Power on Turn on the power after connecting all the sensor display e...

Страница 16: ...pirani sensor is as thin as φ25μm avoid using it in a place with a lot of vibration as much as possible Also the biggest cause of disconnection is due to mechanical shock so please be careful about the installation location and handling Mounting position Pressure measurement measures the static pressure at the position where the sensor is connected When installing in an environment where there is ...

Страница 17: ...n be dangerous to the human body should be processed through a professional processor The customer is responsible for the cost of disposal 2 5 Check items immediately aftr the start of use Gas species dependence The pressure value and accuracy of this unit differ depending on the type of gas to be measured The accuracy of this unit is when measuring nitrogen gas so be careful not to exceed the pre...

Страница 18: ... Name Function I O connector I O connector D sub15pin connector pin M2 6mm screw Mating screw Mating screw M2 6mm screw for I O connector fixing Sensor fixing screw Screw dor fixing sensor M3mm screw Lid fixing screw Screw for fixing the case lid M3mm screw USB TYPE C USB connector to connect a Windows Android device when using UL MOBI ...

Страница 19: ...ights red when the filament of the sensor is disconnection Flashes blue when zero point adjustment or atmospheric pressure adjustment is performed Refer to Section 8 2 SET 1 LED Lights when set point1 is in operation SET 2 LED Lights when set point2 is in operation ADJ switch It is a switch for atmospheric pressure adjustment zero point adjustment and adjustment clear ...

Страница 20: ...t 4 5 Input adjustment Input sugnal when adjusting atmospheric pressure and zero point Lo input 6 7 8 Output pressure signal Output pressure signal DC 0V to 10V 9 Power supply GND The ground of power supply for driving this unit 10 11 Setpoint2 Outputs signal when setpoint2 is operating Lo output 12 13 14 15 Signal GND Ground for output signal Case Frame ground Grounbd of frame CAUTION Wiring Do n...

Страница 21: ...D RxD of RS 232C 5 Terminal resistor for RS485 Terminal resistor for RS 485 Connect with pin13 6 RS232C TxD TxD of RS 232C 7 8 Output pressure signal Output pressure signal DC 0V to 10V 9 Power supply GND The ground of power supply for driving this unit 10 RS485 Minus of RS 485 11 Setpoint2 Outputs signal when setpoint2 is operating Lo output 12 RS485 Plus of RS 485 13 RS485 For terminating resist...

Страница 22: ... 9pin and the signal GND 15pin are common after passing through the filter internally When connecting the power supply line use the power supply 1pin and the power supply GND 9pin When the power supply GND 9pin is used as the signal GND it may be easily affected by noise Equivalent circuit inside the power supply filter I O D sub 15 pin 8 15 7 14 6 13 5 12 4 11 3 10 2 9 1 VARISTOR Measuring contro...

Страница 23: ...nstead of the pressure conversion formulas in this section For details refer to Chapter 9 of this manual Measured value output in each state The table below shows the measured value output in some conditions that can occur during measurement Operating state Measured value output Normal measurement 1 7V to 8 0V Above atmospheric pressure 8 0V to 9 0V Below measurable lower limit 1 0V to 1 7V Sensor...

Страница 24: ...ns when detecting disconnection If the main component of the measuring gas is a gas with high thermal conductivity such as hydrogen H2 or helium He gas and the measurement is about 10 000 Pa or more it may be judged that the filament is disconnected even if the filament is not disconnected Setpoint operation signal Setpoint is a function to output a signal to the outside or turn on the LED when th...

Страница 25: ...en the pin of the signal to be operated and the GND terminal For details on the adjustment method refer to Chapter 8 of this manual CAUTION Contact capacity The capacity of the externally installed contacts should be equal to or higher than the input power supply voltage or DC 30V or higher CAUTION Contact leak current Pay attention to the leak current of the contacts If a current of 0 1mA or more...

Страница 26: ...less setting change may lead to failure of the vacuum device so change when 24V is energized requires password input The setpoint of SW100 R can be set only when SW100 R is not energized at 24V For the UL MOBI download method and setpoint setting method refer to this chapter and Chapter11 of this manual In addition it is possible to two setpoints setpoint1 and setpoint2 The setpoint setting is inv...

Страница 27: ... RS 485 Two wire type Full duplex Half duplex Asynchronous ASC11 code Data bit length 8bits Stop bit 1bit No parity Maximum cable length 15m Maximum cable length 1200m Maximum connection 1 Maximum connections 32 including host 9600 19200 38400 bps 9600 19200 38400 bps Communication up to 1200m is possible according to the RS 485 standard If it exceeds 30m check the specifications on the remote hos...

Страница 28: ... address 00 is always functioning as an address number that can be used at all times and it is necessary to avoid duplication The setting range is 00 to 99 The maximum number of connections per line of RS 485 is 32 including the host The settings are valid at any time RS 232C also uses this address number Baud rate settings The baud rate is set by connecting a Windows Android device with UL MOBI i...

Страница 29: ... code Command list Command Description Command Description D Reading measured values and status T Reading the model and software version ZER Zero point adjustment 1R Reading setpoint1 ATM Atmospheric pressure adjustment 1W Writing setpoint1 CLR Zero point atmospheric pressure adjustment clear 2R Reading setpoint2 SR Reading status 2W Writing setpoint2 SW Writing status When receiving is normal If ...

Страница 30: ...ured value and check it CPU processing time is required Please send the following command after 1 5seconds or more have passed Atmospheric pressure adjustment command Command AD0 AD1 ATM CHKH CHKL CR Adjustable pressure range is about 1 10 4 Pa to 2 10 5 Pa If the pressure cannot be adjusted n will be returned After adjustment read the measured value and check it CPU processing time is required Pl...

Страница 31: ... set it will be set to 5 00 10 2 Pa and if a value higher than 1 00 10 5 Pa is set it will be set to 1 00 10 5 Pa The internal mantissa comparison process is performed with two digits after the decimal point 10 If the command is received normally the normal receiving o will be returned CPU processing time is required Please send the following command after 1 5seconds or more have passed Writing se...

Страница 32: ...1 are as follows Command ASII 1 1 D CHKH CHKL CR HEX 31 31 44 CHKH CHKL CR 31 Xor 31 Xor 44 44 The calculation result in XOR from the address to the character before the checksum is 44 Do not calculate the first character in the command Therefore this exact command is Command ASII 1 1 D 4 4 CR If the measured value at this time is the following character string Command ASII 1 1 D 1 0 0 E 0 5 F 3 4...

Страница 33: ...t Status C 43 4 34 6 36 5 35 7 37 B3 ERROR 1 0 0 0 0 B2 N C 1 1 1 1 1 B1 SETPOINT2 0 0 1 0 1 B0 SETPOINT1 0 0 0 1 1 ERROR 1 Error 0 Normal SETPOINT2 1 ON 0 OFF SETPOINT1 1 ON 0 OFF Example 1 The N C value of the current B2 is 1 N C 1 ERROR OF 0 N C 1 N C 1 N C 1 SETPOINT2 ON 1 N C 1 SETPOINT1 OFF 0 When above signal is read SH F 46H SL 6 36H Example 2 The default values when power is turned on is ...

Страница 34: ...h 68 tab 09 29 I 49 i 69 lf 0A 2A J 4A j 6A vt 0B 2B K 4B k 6B ff 0C 2C L 4C l 6C cr 0D 2D M 4D m 6D so 0E 2E N 4E n 6E si 0F 2F O 4F o 6F dle 10 0 30 P 50 p 70 dc1 11 1 31 Q 51 q 71 dc2 12 2 32 R 52 r 72 dc3 13 3 33 S 53 s 73 dc4 14 4 34 T 54 t 74 nak 15 5 35 U 55 u 75 syn 16 6 36 V 56 v 76 etb 17 7 37 W 57 w 77 can 18 8 38 X 58 x 78 em 19 9 39 Y 59 y 79 sub 1A 3A Z 5A z 7A esc 1B 3B 5B 7B fs 1C ...

Страница 35: ...s refer to Chapter 11 of this manual SW100 R Communication Input each command by serial communication UL MOBI Cannot be adjusted with UL MOBI Zero point adjustment If the adjustment is performed immediately after the pressure drops below 1 10 2 Pa the temperature inside the sensor is not in equilibrium and the error may increase Also do not turn off the power of this unit until the adjustment is c...

Страница 36: ...ure adjustment and zero point adjustment to the factory adjustment values Model Adjustment method Operating procedure SW100 A Manual Press the ADJ switch of this unit for 5seconds or longer External I O Turn on short ADJ adjustment input for 5seconds or longer from the I O UL MOBI It can be adjusted by clicking ADJUST CLEAR on the CONTROL tab When 24V is not energized it cannot be cleared from UL ...

Страница 37: ...ection 9 1 when replacing our pirani vacuum gauge sensor unit SW1 series with SW100 series and Section 9 2 when replacing our pirani vacuum gauge sensor unit SP1 with SW100 A Also there is compatibility with conversion formulas different from SW1 and SP1 so refer to Section 9 3 After purchasing please check this manual for both new installation and replacement and then set and connect Note that th...

Страница 38: ...to Section 1 2 of this manual and the SP1 instruction manual When using as SP1 compatible note that the measured pressure range is significantly different from SW100 A 1 SP1 Sensor compatibility The sensor WP series used in SP1 cannot be used in SW100 so please use the sensor SWP series for SW100 The following list is a list of flange sizes Sensor for SP1 Senso for SW100 Model Flange size Model Fl...

Страница 39: ...shown below However the basic specifications other than those described in this section are the basic specifications of SW100 shown in Section 1 2 and the sensor can also use the SWP series dedicated to SW100 PSG compatibility 1 PSG Compatible specifications By setting the OUTPUT of SW100 A to PSG with UL MOBI the measured value output voltage corresponding to the conversion formula shown below is...

Страница 40: ...e V Measurement pressure range 1 10 1 Pa to 1 10 5 Pa As the sensor only the SWP series dedicated to SW100 A can be used 2 APG I O specifications SW100 A By setting OUTPUT to PSG with UL MOBI it can be used with the measured output voltage corresponding to the above conversion formula For pin layout refer to Section 9 4 of this manual SW100 R Not compatible Depending on the internal circuit struct...

Страница 41: ...Sensor error Sensor error Sensor error 3 Setpoint1 Setpoint1 Setpoint1 4 5 Adjustment input Adjustment input 6 7 8 Pressure signal output Pressure signal output Pressure signal output 9 Power supply GND Power supply GND Power supply GND 10 11 Setpoint2 Setpoint2 Setpoint2 12 13 14 15 Signal GND Signal GND Signal GND Case Ground of frame Ground of frame Ground of frame CAUTION Wiring Do not wire th...

Страница 42: ...ng due to the impact on the pin part 10 1 Tools The required tool is a hexagon wrench with an opposite side size of 1 5mm 10 2 Removal of sensor The sensor can be removed by loosening the sensor fixing screw Slowly remove the sensor from SW100 Removal of sensor 10 3 Mounting the sensor Insert the sensor into SW100 slowly If you insert it all at once a strong force will be applied which may cause t...

Страница 43: ... will be displayed as an unknown device in the device manager Please check this manual Section 11 2 2 3 and install it if necessary UL MOBI for Andoroid Supported OS Android6 0 or later Google Play Search by UL MOBI or read the QR code on the right to install HP address https www ulvac co jp download en application category 1009 11 1 Function The following functions can be used by connecting SW100...

Страница 44: ...details refer to Section 11 2 3 4 Windows version and Section 11 3 3 4 Android version in this manual 24V is energized from the D sub connector on the top of the SW100 main unit Please refer to Sections 3 3 and 3 4 of this manual When the OUTPUT setting is SP1 PSG APG the function of SW100 A is followed The software inside this unit operates with the pressure unit set to Pa Even if the pressure un...

Страница 45: ...nager If you need to install manually please download the device driver from the following FTDI home page FTDI Home page https ftdichip com drivers VCP drivers Please install the driver in the Windows Desktop line of the Operating System column from the above home page You can easily install it by selecting setup executable in the Comments column How to use Start UL MOBI and connect SW100 and Wind...

Страница 46: ...W100 firmware is displayed It is automatically identified at the time of connect STATUS The current status is displayed Graph horizontal axis range selection Change the range of the horizontal axis time axis of the graph Graph display area When 24V is energized the change over time of the pressure during measurement is displayed in a graph Graph vertical axis range selection Change the range of th...

Страница 47: ...SW100 setting If it is different from the baud rate set on the SW100 you cannot connect If you cannot connect change the baud rate CONNECT DISCONNECT buttun If you press this button when CONNECT is displayed SW100 and UL MOBI will be connected and DISCONNECT will be displayed If you press it when DISCONNECT is displayed SW100 and UL MOBI will be disconnected and CONNECT will be displayed COTROL ta...

Страница 48: ...nt values Only one cannot be the factory adjustment value It is possible by password input only when 24V is energized However it does not work when SW100 R is connect and OUTPUT is SP1 SAMPLING time selection Select the sampling time of the logging data It cannot be changed while logging is in progress Log FILE storage location Displays the storage location of the logging data Initialize log FILE ...

Страница 49: ...point2 is displayed in the graph area SETPOINT2 setting Set the value of setpoint2 It can be set at all times but a password is required when 24V is energized The set value is saved in the SW100 OUTPUT selection Select output Refer to Chapter 9 for details The settings are saved in the SW100 It can be selected by password input only when SW100 A is connected and 24V is not energized SW100 R is not...

Страница 50: ...ailable Please select UL MOBI for Android_v apk from our home page below and download it The apk file UL MOBI for Windows_v _ will be downloaded is Ver No XXX is the uploaded date UL MOBI for Android Download Site https www ulvac co jp download en application category 1009 After downloading follow the instructions on the screen to install 3 Can not connect Android device to the web Please connect ...

Страница 51: ...ion 11 3 3 3 SETTING tab Display the SETTING screen Refer to Section 11 3 3 4 RECORD tab Display the RECORD screen Refer to Section 11 3 3 5 STATUS The current status is displayed MODEL The model name of the connected SW100 is displayed It is not displayed unless the SW100 is connected FIRM VER The version of the connected SW100 firmware is displayed It is not displayed unless the SW100 is connect...

Страница 52: ...on You can enlarge reduce the vertical axis by pinch in out in the vertical axis pressure axis direction of the graph in the graph display area SAMPLING time selection Select the sampling time of the logging data It cannot be changed while logging is in progress Logging start stop button Start stop logging At the start of logging the graph displayed in will be cleared The logging data CSV file wil...

Страница 53: ...s energized However it does not work when SW100 R is connect and OUTPUT is SP1 ADJUST CLEAR button Set the zero point adjustment and atmospheric pressure adjustment to the factory adjustment values Only one cannot be the factory adjustment value It is possible by password input only when 24V is energized However it does not work when SW100 R is connect and OUTPUT is SP1 SETPOINT1 ON OFF button The...

Страница 54: ... is connected and 24V is not energized BAUD RATE selection SW100 Select the baud rate to set for SW100 The selection result is saved in the SW100 It can be selected only when 24V is not energized CHECKSUM setting Set checksum The selection result is saved in the SW100 It is possible by password input only when SW100 R is connected and 24V is not energized PASSWORD setting Set a 4 digit password on...

Страница 55: ...x will be displayed in front of the folder name or CSV file name and you can select any folder or CSV file FOLDER CSV FILE selection You can select and deselect by tapping the square check box Folders or CSV files whose checkboxes are blue with checkmarks are being selected ex one folder is selected REMOVE button Delete the folder or CSV file selected with and EXPORT button Save the folder selecte...

Страница 56: ...roid Adjustment clear failed CHANGE SETPOINT1 SUCCESS Windows Android Succeeded change of setpoint1 CHANGE SETPOINT1 FAILURE Windows Android Failed to change setpoint1 CHANGE SETPOINT2 SUCCESS Windows Android Succeeded change of setpoint2 CHANGE SETPOINT2 FAILURE Windows Android Failed to change setpoint2 CHANGE OUTPUT SUCCESS Windows Android Successful change of OUTPUT CHANGE OUTPUT FAILURE Windo...

Страница 57: ...g and check the continuity with a tester Power supply voltage is not within the specified range Check the power supply voltage with a tester or the like Internal circuit failure Check and or repair at ULVAC is necessary The POWER LED is lit but 0V is still output Cause Action Miswiring or disconnection of the cable Correct the wiring and check the continuity with a tester Power supply voltage is n...

Страница 58: ...pin and the case Replace the sensor when the insulation deteriorates The voltage does not drop below 1 7V even when exhausted to a vacuum Cause Action Actual pressure is not less than 5 10 2 Pa Check the pressure with an ionization vacuum gauge Room temperature and gas temperature at the time of adjustment and measurement are different It is normal It is temperature dependent Adjust the zero point...

Страница 59: ...Please stop the leak Poor cable contact increased wire resistance Check the cable connection and resistance The cable is electromagnetically induced By outpatient noise Change the installation location of the cable or use the device that is the source of noise in the OFF state Reexamination of cable installation method Please consider noise countermeasures separately The filament or temperature se...

Страница 60: ...The heat of vaporization has an effect due to the gradual evaporation The pressure is actually different Check with another pressure gauge Atmospheric pressure zero point adjustment is off Perform atmospheric pressure and zero point adjustment The filament or temperature sensor is short circuited with the case Measure the insulation between each pin and the case Replace the sensor when the insulat...

Страница 61: ...mat of this unit is open collector output TTL level input It cannot be read with a type that is not pulled up connected to the power supply through a resistor at the input section such as UNIT Serial communication is not possible sometimes there is no reply Cause Action Miswiring or disconnection of the cable Correct the wiring and check the continuity with a tester or the like Baud rate address e...

Страница 62: ...y during connection Check if there is a problem with the connection between UL MOBI and the SW100 such as the USB cable falling off or disconnecting If there is no problem with the connection there is a possibility of a communication error due to a malfunction of the SW100 so we need to repair or inspect it CSV file is not created even if logging is executed When using an Android device UL MOBI ma...

Страница 63: ...ention to the current value of the measuring instrument In addition the filament etc are heated in a vacuum and it is not possible to measure the accurate resistance value so be sure to measure at atmospheric pressure Inside the sensor filament temperature sensor connection diagram 12 3 Insulation between the sensor pin and case The insulation between each pin except between the filament of the se...

Страница 64: ...Gas species dependence adjusted by N2 Fig 13 2 Gas species dependenceAadjusted by dry air 1 0E 01 1 0E 00 1 0E 01 1 0E 02 1 0E 03 1 0E 04 1 0E 05 1 0E 01 1 0E 00 1 0E 01 1 0E 02 1 0E 03 1 0E 04 1 0E 05 REFEENCE PRESSURE Pa PRESSURE Pa He DRY Air Ar 1 0E 02 1 0E 01 1 0E 00 1 0E 01 1 0E 02 1 0E 03 1 0E 04 1 0E 05 1 0E 02 1 0E 01 1 0E 00 1 0E 01 1 0E 02 1 0E 03 1 0E 04 1 0E 05 REFERENCE PRESSURE Pa P...

Страница 65: ...stall an isolation valve to prevent contamination It is recommended to replace the sensor regularly in an environment where dirt contaminants Deposited with moisture It is recommended to install an isolation valve to prevent moisture Consider measures to reduce water bedewing in humid environment If moisture is deposited the response speed decreases especially on the zero point side 13 3 Scheduled...

Страница 66: ...SK00 9663 EI 003 00 66 venting to atmospheric pressure and evacuation at a cycle of 20seconds and making adjustment indoors at room temperature ...

Страница 67: ... If field service is required Buyer shall ask ULVAC Inc or the local ULVAC representatives 2 Direct export transaction ULVAC send a replacement or Buyer return the defective items to ULVAC Inc or to the local ULVAC representatives for repair Return charge shall be paid by Buyer Disclaimer 1 Failure occurred after expiration of warranty period 2 Failure caused by force majeure such as fire storm an...

Страница 68: ...s according to Foreign Exchange and Foreign Trade Law 3 As for the question and consultation Buyer shall check the model and serial number and ask the local representative or ULVAC Inc 4 The content of this document is subject to change without notice in future ...

Страница 69: ...SK00 9663 EI 003 00 69 15 EC DECLARATION OF CONFORMITY ...

Страница 70: ...SK00 9663 EI 003 00 70 16 UK DECLARATION OF CONFORMITY ...

Страница 71: ...SK00 9663 EI 003 00 71 17 Certificate of decontamination ...

Страница 72: ...SK00 9663 EI 003 00 72 18 Drawings 18 1 SW100 A R dimensions ...

Страница 73: ...3 00 73 18 2 Sensor dimensions 46 40 Φ30 SWP 16 NW16 66 60 47 41 Φ40 77 83 Φ18 SWP 25 NW25 SWP R1 8 R1 8 SWP P18 Φ18tube 45 51 50 4 65 Φ15 59 65 59 Φ33 8 SWP P15 Φ15tube SWP CF16 CF16 ICF034 SWP 1S ASME BPE sanitary1 ...

Страница 74: ...SK00 9663 EI 003 00 74 18 3 Display unit cable L ...

Страница 75: ...ac co jp en support_info sales_office ULVAC Inc Components Division 2500 Hagisono Chigasaki Kanagawa 253 8543 Japan TEL 81 467 89 2261 ULVAC Equipment Sales Inc Head Office Tokyo 2 3 13 Konan Minato ku Tokyo 108 0075 Japan TEL 81 3 5769 5511 ULVAC Equipment Sales Inc Osaka Branch 3 3 31 Miyahara Yodogawa ku Osaka 552 0003 Japan TEL 81 6 6397 2286 ...

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