Ulvac G-TRAN SW100-A, Инструкция по эксплуатации

Страница: 35 / 75

SK00-9663-EI-003-00
35
8. Zero point adjustment and atmospheric pressure adjustment
This unit can measure more accurately by adjusting the zero point and atmospheric
pressure.
If there is a discrepancy between the indicated value on the atmospheric pressure side
or the zero point side, adjust according to the following procedure.
8.1.
Adjusting method
Zero point adjustment and atmospheric pressure adjustment can be performed by the
following method.
Based on the signal from the sensor, it automatically determines whether to perform
zero point adjustment or atmospheric pressure adjustment.
Model
Adjusting
method
Operating procedure
SW100-A
Manual
Press the "ADJ" switch of this unit for 1 second or longer.
Please note that it will be cleared if you press it for
5seconds or longer.
External I/O
Turn on (short) "ADJ adjustment input" for 1 second or
longer from the I/O.
Please note that it will be cleared if it is turned on for
5seconds or longer.
UL-MOBI
It can be adjusted by clicking "ZERO ADJUST" and
"ATM.ADJUST" on the CONTROL tab. When 24V is not energized,
it cannot be adjusted from UL-MOBI. When 24V is energized,
it can be adjusted by inputting the password after
clicking.
※ For details, refer to Chapter 11 of this manual.
SW100-R
Communication Input each command by serial communication.
UL-MOBI Cannot be adjusted with UL-MOBI.
Zero point adjustment
If the adjustment is performed immediately after the pressure drops below 1×10
-2
Pa,
the temperature inside the sensor is not in equilibrium and the error may increase.
Also, do not turn off the power of this unit until the adjustment is completed.
The adjustment range is about ±1Pa in the unadjusted state. If the adjustment is not
possible, the life of the sensor may be due to dirt on the filament.
① Exhaust the vacuum chamber.
② Use a vacuum gauge such as an ionization vacuum gauge and check that the pressure
in the vacuum chamber is 1×10
-2
Pa or less.
③ Keep it at 1×10 -2 Pa or less for 5minutes or more.
④ Make adjustments.
Atmospheric pressure adjustment
If the adjustment is performed immediately after the vacuum state changes to 1×10
+5
Pa,
the temperature inside the sensor is not in equilibrium and the error may increase.
Also, do not turn off the power of this unit until the adjustment is completed.
The adjustment range is about 1×10 +4 Pa to 2×10 +5 Pa in the unadjusted state. If the
adjustment is not possible, the life of the sensor may be due to dirt on the filament.
① Flow nitrogen gas into the vacuum chamber.
② Using a vacuum gauge such as a diaphragm vacuum gauge, check that the pressure in
the vacuum vessel is 1×10
+5
Pa.