Ulvac G-TRAN SW100-A, Инструкция по эксплуатации

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SK00-9663-EI-003-00
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1) SW1: Sensor compatibility
The sensor used for SW100 is the same SWP series as the sensor used for SW1.
2)
SW1: I/O compatibility
Since the SW100 and SW1 series have the same pin layout, you can use it by replacing
the D-Sub connector used in the SW1 series as it is. For pin layout, refer to Section
3.3 (SW1-1
⇒ SW100-A) and Section 3.4 (SW1-2 ⇒ SW100-R) of this manual.
3)
Signals
Refer to Chapter 5 of this manual.
9.2. SP1 compatibility
If the OUTPUT of SW100-A is set to SP1 with UL-MOBI, the measured output voltage will
be the same as that of our pirani vacuum gauge sensor unit SP1.
SP1 SW100-A
Model Measurement pressure range OUTPUT Measurement pressure range
SP1 4.0×10
-1
Pa to 3.0×10
+3
Pa ⇒ SP1 4.0×10
-1
Pa to 3.0×10
+3
Pa
※ For other basic specifications such as measurement accuracy, refer to Section 1.2
of this manual and the SP1 instruction manual.
※ When using as SP1 compatible, note that the measured pressure range is significantly
different from SW100-A.
1)
SP1: Sensor compatibility
The sensor WP series used in SP1 cannot be used in SW100, so please use the sensor SWP
series for SW100. The following list is a list of flange sizes.
Sensor for SP1 Senso for SW100
Model Flange size Model Flange size Other models
WP-01 φ 18mmTube ⇒ SWP-P18 φ 18mmTube
SWP-25
SWP-R1/8
SWP-CF16
SWP-1S
NW25
R1/8
ICF034
sanitary1”
WP-02 φ 15mm （φ 18mm ） Tube ⇒ SWP-P15 φ 15mmTube
WP-03 R3/8 （ PT3/8 ） ⇒ N/A
WP-16 NW16 ⇒ SWP-16 NW16
2)
SP1: I/O compatibility
SW100-A: By setting OUTPUT to SP1 with UL-MOBI, it can be used with the same measured
value output voltage as SP1, but if 10pin was used as the signal GND when
using SP1, it is necessary to change to 15pin.
For pin layout, refer to Section 9.4 of this manual.
SW100-R: Not compatible.
※ If the D-SUB10pin was used for signal GND when using SP1, it is necessary to change
the wiring to 15pin.