SK00-9663-EI-003-00
V
*
CAUTION
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Usage environment
When exposed to accumulated gas such as rotary pump oil mist and CVD
(Chemical Vapor Deposition) raw material gas, problems such as
disconnection of filaments and changes in pressure characteristics
occur. When using in such an environment, install an isolation valve
between this unit and the vacuum chamber, and seal the isolation valve
so that it is not exposed to these gases as much as possible.
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CAUTION
*
Moisture and deposits
If there are many deposits that gradually evaporate, such as water
and organic matter, in the sensor, it will affect the pressure
accuracy and response speed on the zero point side. Please consider
the installation location and method so that deposits do not adhere.
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CAUTION
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Influence of magnetic field
Due to the influence of a magnetic field of 0.01T (100G), the
pressure indication on the atmospheric pressure side is affected by
about 10%. If this unit is affected by a magnetic field, install a
magnetic shield.
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CAUTION
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Temperature fluctuation
According to the measurement principle of pirani vacuum gauge, the
ambient temperature of the sensor affects the measured value. If the
ambient temperature deviates significantly from the temperature at the
time of calibration (about 25
℃
), adjust the atmospheric pressure and
zero point.
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CAUTION
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Contact capacity
The capacity of the externally installed contacts should be equal to
or higher than the input power supply voltage or DC30V or higher.
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CAUTION
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Contact leak current
Pay attention to the leak current of the contacts. If a current of
0.1mA or more flows between the input signal pin and the GND terminal,
it may be treated as if the signal was input.
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CAUTION
*
Noise resistance of remote host
For remote hosts such as personal computers and PLCs, use an
isolation type with high noise resistance. It may cause malfunction or
failure.
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CAUTION
*
Foreign matter intrusion
Protect the inside of this unit and sensor from the openings of
foreign matters such as metals and flammable materials. It may damage
the equipment or cause a fire.
*
CAUTION
*
Gas species dependence
The pressure value and accuracy of this unit differ depending on the
type of gas to be measured. The accuracy of this unit is when
measuring nitrogen gas, so be careful not to exceed the pressure when
using gas other than nitrogen.
Содержание G-TRAN SW100-A
Страница 7: ...SK00 9663 EI 003 00 VII Revision history Date Number Reason 2022 10 3 00 First edition ...
Страница 69: ...SK00 9663 EI 003 00 69 15 EC DECLARATION OF CONFORMITY ...
Страница 70: ...SK00 9663 EI 003 00 70 16 UK DECLARATION OF CONFORMITY ...
Страница 71: ...SK00 9663 EI 003 00 71 17 Certificate of decontamination ...
Страница 72: ...SK00 9663 EI 003 00 72 18 Drawings 18 1 SW100 A R dimensions ...
Страница 74: ...SK00 9663 EI 003 00 74 18 3 Display unit cable L ...
