Keithley S535, Административное руководство

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S535 Wafer Acceptance Test System Administrative Guide Section 4: Maintenance
S535-924-01 Rev. B / January 2019
4-3
Electrical hazard tasks
Definitions of electrical hazard tasks (as defined in the SEMI S2-0715a standard) are listed in this
section. For S535 systems, Type 2 electrical hazard tasks are typically performed.
For additional information about diagnostics, troubleshooting, or maintenance of specific Keithley
instruments, refer to the documentation for that instrument for details before attempting to repair it.
You can download manuals for related instruments at tek.com/keithley .
Types of electrical hazard tasks
Live circuit
type Description
1 Equipment is fully de-energized.
2 Equipment is energized. Energized circuits are covered or insulated.
SEMI S2-0715a standard, NOTE 41: Type 2 work includes tasks where
the energized circuits are or can be measured by placing probes through
suitable openings in the covers or insulators.
3 Equipment is energized. Energized circuits are exposed and inadvertent
contact with uninsulated energized parts is possible. Potential exposures
are no greater than 30 V
RMS
, 42.4 V
peak
, 60 VDC, or 240 VA in dry
locations.
4 Equipment is energized. Energized circuits are exposed and inadvertent
contact with uninsulated energized parts is possible. Potential exposures
are greater than 30 V
RMS
, 42.4 V
peak
, 60 VDC, or 240 VA in dry locations.
Potential exposures to radio-frequency currents, whether induced or via
contact, exceed the limits in SEMI S2, Appendix 3, Table A3-1.
Repair and replacement
Keithley Instruments offers a fee-based service agreement with all S535 systems. Under this
agreement, a field service engineer will either repair or replace equipment. For more information
about this service agreement, contact Keithley Instruments at 1-800-935-5595.
For additional information about specific parts, operations, and maintenance of Keithley instruments,
refer to the documentation for the instrument for details before attempting to replace or repair any
equipment. You can download manuals for related instruments at tek.com/keithley .