Section 2: S535 site preparation and installation
S535 Wafer Acceptance Test System Administrative Guide
2-14
S535-924-01 Rev. B / January 2019
Figure 20: Cable support arm accessory
Chuck cables for optional probe card adapters
A set of chuck cables is included with the optional 9139A-PCA and 9139B-PCA probe card adapters.
Model numbers of cables vary based on the prober you are using. For example, the Keithley Field
Service Engineer (FSE) will install the cables shown in the following table for Tel P8 probers.
Model
Quantity
Description
CA-63-12
2
12 ft three-lug triaxial cables
237-TRX-T
1
Three-slot male to dual three-lug female triaxial tee adapter
237-BNC-TRX
1
High-voltage two-slot BNC to three-lug female triaxial adapter
If a different cable termination scheme is required, a customer-supplied solution can be used.
Optional probe card adapter vacuum requirement
9139A-PCA and 9139B-PCA probe card adapter requirement: A 50.80 cm (20 in.) Hg (which is the
same as 40.73 PSI) vacuum supply, with a hose connection of 0.64 cm (1/4 in.) outside diameter and
0.32 cm (1/8 in.) inside diameter.
For detailed information about the 9139A-PCA and 9139B-PCA probe card adapters, see the
9139A-PCA
and
9139B-PCA Probe Card Adapter Instruction Manuals
(part number
s
9139A-901-01
and 9139B-901-01). These manuals are available for download at
