S535 Wafer Acceptance Test System Administrative Guide
Section 4: Maintenance
S535-924-01 Rev. B / January 2019
4-9
Power distribution unit connections and power distribution
basics
Each 42000-PDU consists of:
24 VDC output to emergency off (EMO) circuits and cabinet fans with power
24 VDC output through banana jacks
Two specially switched power outlets (factory configuration: Always on)
Three groups of four switched outlets (off with EMO condition)
Remote connection to other 42000-PDUs through a 25-pin D-sub connector
Properly lockout and tagout the system before beginning installation or connection. Also,
never turn on the system until all connections and safety grounds are installed. Make sure
the main circuit breakers on the PDUs are placed in the OFF position before making or
breaking any connections.
The following figure shows how the two PDUs are connected to the system EMO circuit.
Figure 47: PDU connections to the EMO circuit
