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S535 Wafer Acceptance Test System Administrative Guide

Section 5: Instrument specifications and documentation

S535-924-01 Rev. B / January 2019

5-3

Sourcing and measuring

The following instruments provide S535 source-measure capabilities.

Model 2636B System SourceMeter Instrument

The 2636B Dual-Channel System SourceMeter

Instrument is a 6-1/2 digit, two-channel

source-measure unit (SMU) that simultaneously sources and measures voltage and current. You can

have up to eight 2636B SMUs (for a total of 16 SMU channels) in the S535 system.

Figure 51: 2636B System SourceMeter Instrument

Features include:

Maximum voltage source-measure range: 200 V

Measurement resolution: 0.1 fA current, 100 nV voltage

Power: 20 W

Model 2461-SYS System SourceMeter Instrument

The Keithley Instruments Model 2461-SYS is an interactive SourceMeter

instrument specifically for

use in Keithley S535 parametric test systems. The 2461-SYS is a modified version of the Model 2461

System SourceMeter instrument, with fewer high-current ranges.

The 2461-SYS has the same current ranges as the 2461 up to 1 A, but does not have the 4 A, 5 A,

7 A, and 10 A ranges. The voltage ranges for the 2461-SYS are identical to the voltage ranges on the

2461.

Figure 52: 2461-SYS System SourceMeter

Instrument

Содержание S535

Страница 1: ...Administrative Guide S535 924 01 Rev B January 2019 PS535 924 01B S535 924 01B tek com keithley S535 Wafer Acceptance Test System...

Страница 2: ...Wafer Acceptance Test System Administrative Guide S535...

Страница 3: ...out the prior written approval of Keithley Instruments LLC is strictly prohibited These are the original instructions in English All Keithley Instruments product names are trademarks or registered tra...

Страница 4: ...d to mains These instruments will be marked as category II or higher Unless explicitly allowed in the specifications operating manual and instrument labels do not connect any instrument to mains Exerc...

Страница 5: ...ay invalidate the warranty The CAUTION heading with the symbol in the user documentation explains hazards that could result in moderate or minor injury or damage the instrument Always read the associa...

Страница 6: ...21 Triaxial connector handling and avoiding contamination 2 21 Lockout and tagout 2 22 Installation and connections 2 24 Position the system cabinet 2 24 Cable harness routing 2 25 Floor plan 2 25 Sys...

Страница 7: ...4 6 Restore system power 4 7 Fuses 4 7 Power distribution and emergency off 4 8 Power distribution unit connections and power distribution basics 4 9 System emergency off circuit 4 11 Data hub license...

Страница 8: ...he Keithley Instruments website tek com keithley Systems documentation Documentation for your system is available at tek com keithley Following is a list of documentation for your system including the...

Страница 9: ...itching matrix One Model 707B Switch Matrix Mainframe with Model 7530 switch cards quantity 2 to 6 Optional capacitance voltage C V One channel of C V using one Model 4200A SCS with one Model 4210 CVU...

Страница 10: ...while moving from receiving to the final destination see Floor plan on page 2 25 for specifications Are all of the corridors and hallways large enough to allow clearance for the system Are stairways...

Страница 11: ...ifications Is anything connected to the same power source that generates noise Is anything that requires substantial amounts of current connected to the same power source Did you prepare power outlets...

Страница 12: ...he system Series 500 systems are shipped in a wooden crate see the following figure Figure 1 S535 system cabinet in shipping crate Unpacking system components Inspect the shock sensor on the outside o...

Страница 13: ...not been tipped over see the following figure Figure 3 S535 crate tipping indicator Carefully remove all system components from the crate While unpacking make sure there is no component damage Report...

Страница 14: ...nents 1 Remove the crate clamps from the crate using a standard screwdriver Figure 4 Removing the crate clamps 2 Open the front of the crate The front is identified by the wooden ramp support attached...

Страница 15: ...afer Acceptance Test System Administrative Guide 2 6 S535 924 01 Rev B January 2019 Figure 5 Opening the front of the crate 4 Attach the ramp using the two bolts that are attached to the bottom front...

Страница 16: ...e preparation and installation S535 924 01 Rev B January 2019 2 7 5 Remove the padding from the front of the S535 system cabinet Figure 7 Removing the padding 6 Remove the crate clamps and slide the o...

Страница 17: ...ct the leveling feet on the bottom of the system next to the casters to put weight on the casters and prepare the system to be rolled down the ramp Figure 9 Leveling feet 8 Remove the four bolts from...

Страница 18: ...n S535 924 01 Rev B January 2019 2 9 Figure 11 Removing the bolts from the crate 9 Save the hardware the four bolts and washers that you remove from the bottom of the crate Figure 12 System crate hard...

Страница 19: ...stallation S535 Wafer Acceptance Test System Administrative Guide 2 10 S535 924 01 Rev B January 2019 Figure 13 System caster brakes 11 With two people slide the S535 system cabinet down the ramp Figu...

Страница 20: ...packing material using scissors taking care not to scratch the S535 system cabinet Figure 15 Cutting the wrap off the system 13 Move the S535 system cabinet to its final destination The system cabine...

Страница 21: ...tallation hardware USB extension cables cable support arm connectors for the keyboard and mouse and any other accessories that may have been ordered with the system for example probe card adapter cabl...

Страница 22: ...t System Administrative Guide Section 2 S535 site preparation and installation S535 924 01 Rev B January 2019 2 13 Figure 17 Typical system accessories Figure 18 Monitor arm accessory Figure 19 Keyboa...

Страница 23: ...al cables 237 TRX T 1 Three slot male to dual three lug female triaxial tee adapter 237 BNC TRX 1 High voltage two slot BNC to three lug female triaxial adapter If a different cable termination scheme...

Страница 24: ...pport arm to the system Install the probe card assembly PCA if ordered on the back of the system cabinet and the 60190 PCA probe card assembly to the correct prober plate customer supplied from the pr...

Страница 25: ...eparation and installation S535 Wafer Acceptance Test System Administrative Guide 2 16 S535 924 01 Rev B January 2019 Example Series 500 System Installation Form Figure 21 Example Series 500 System In...

Страница 26: ...S535 Wafer Acceptance Test System Administrative Guide Section 2 S535 site preparation and installation S535 924 01 Rev B January 2019 2 17 Figure 22 Example Series 500 System Installation Form page 2...

Страница 27: ...Section 2 S535 site preparation and installation S535 Wafer Acceptance Test System Administrative Guide 2 18 S535 924 01 Rev B January 2019 Figure 23 Example Series 500 System Installation Form page 3...

Страница 28: ...bout power and operating environment conditions Supplied power cords Keithley Instruments provides power cords that match the power requirements of the system The following figure and table describe t...

Страница 29: ...rcuit amperage S535 systems that are configured to operate between 100 VAC and 120 VAC must use a 20 A circuit systems that are configured to operate between 200 VAC and 240 VAC must use a 15 A circui...

Страница 30: ...warm up time Vibration High ambient vibration levels may require isolation pads or the repositioning of equipment Air quality The S535 system is compatible for use in a Class 10 clean room Audible sy...

Страница 31: ...Remove power from the entire test system and discharge capacitors before connecting or disconnecting cables or any instrument including the device under test When you perform lockout and tagout proce...

Страница 32: ...binet with one visible from the front of the cabinet and one visible from the back of the cabinet See the figure in Power distribution unit connections and power distribution basics on page 4 9 for a...

Страница 33: ...l type and the two casters at the front are in fixed positions To position the system cabinet 1 Carefully roll the system cabinet to its location next to the prober allowing a minimum distance of 15 c...

Страница 34: ...ation is for the system cabinet only Be sure to place the cabinet a minimum distance of 15 cm 6 in up to a maximum distance of 122 cm 48 in from the prober Refer to the documentation for the prober or...

Страница 35: ...Section 2 S535 site preparation and installation S535 Wafer Acceptance Test System Administrative Guide 2 26 S535 924 01 Rev B January 2019 Figure 28 S535 floor plan top view...

Страница 36: ...ee Floor plan on page 2 25 for details about designing a floor plan for the system cabinet System cabinet size and weight Size width depth height Weight Minimum configuration Maximum configuration 601...

Страница 37: ...inet to the floor for safety purposes and to ensure the cabinet will not tip over The following figure shows the restraint brackets and bolt installation dimensions for the system cabinet Figure 30 S5...

Страница 38: ...urement The S535 system can be ordered with an advanced seismic fastening option that has been tested and certified to the standards stated in IEC 61587 2 Ed 2 0 Mechanical structures for electronic e...

Страница 39: ...ting the cabinet allows the holes in the mounting brackets to line up with the holes in the lower frame of the cabinet 4 Temporarily attach the mounting brackets to each corner with the provided screw...

Страница 40: ...Return the cabinet to marked locations on the floor and use the leveling legs to lift the cabinet to the proper height 9 Attach the mounting brackets to the corners with the mounting hardware provide...

Страница 41: ...ormation 3 11 Introduction All of the instruments in the equipment rack are connected to one of the two power distribution units PDUs in the system Follow the instructions in the following topics to s...

Страница 42: ...f the system cabinet to the ON position Figure 36 S535 power ON switch System startup To start up the system 1 Make sure that the power switch on each of the power distribution units PDUs is set to ON...

Страница 43: ...em are completely powered up and have finished self testing before starting the system software The S535 system includes the following system software option Keithley Test Environment KTE For more inf...

Страница 44: ...ter instrument Model 2450 during this process After the initial software installation run_ic pl initializes only the TSP Link master instrument and the other TSP instruments in the system execute the...

Страница 45: ...y OFF button An EMERGENCY OFF EMO button is on the system cabinet front door see the following figure If you push the EMERGENCY OFF button it removes power to all of the system instruments except the...

Страница 46: ...ath due to electric shock or electrocution may result For the safety interlock to function properly the device under test DUT interlock sensor must be installed near the DUT connections and the interl...

Страница 47: ...vated you must clear the cause of the interlock activation To clear the interlock activation 1 Follow the instructions on the computer 2 Make sure the front and rear doors are closed 3 Make sure the D...

Страница 48: ...p plate and the PCA so that if you unlatch the top plate of the prober and lift it up to change a probe card or take off the PCA the interlock is tripped Figure 41 Model 174 7047 XX Safety Interlock C...

Страница 49: ...B January 2019 3 9 9139A PCA 9139B PCA interlock connections for S535 systems The following diagrams show the interlock connections to the optional 9139A PCA and 9139B PCA Probe Card Adapters Figure...

Страница 50: ...round reference Figure 45 S500 LOPATCH 3KV The LO patch panel provides A common reference point for all the instrument low side connections In 4 wire systems a common connection for the sense low term...

Страница 51: ...e using RJ 45 Supplied cables One ethernet crossover cable connects the computer to the tester One 10Base T patch cable connects to your network IP address is specified by you When setting up the comp...

Страница 52: ...or death service personnel must wear personal protective equipment PPE suitable for voltages greater than 40 VAC Do not attempt to perform these procedures unless you are qualified to do so This secti...

Страница 53: ...environment for several minutes before use Special handling of static sensitive devices System components can be damaged by electrostatic discharge ESD Wear a ground strap and attach the clip lead to...

Страница 54: ...s 3 Equipment is energized Energized circuits are exposed and inadvertent contact with uninsulated energized parts is possible Potential exposures are no greater than 30 VRMS 42 4 Vpeak 60 VDC or 240...

Страница 55: ...instruments that are being installed moved or removed are turned off with all power source cables unplugged To remove system power before performing maintenance or replacement of components Follow pre...

Страница 56: ...ire a two person lift include 4200A SCS Parameter Analyzer with only the CVU option installed 707B Switch Matrix Mainframe with no cards installed Multiple 2636B or 2461 SYS SourceMeter Instruments ra...

Страница 57: ...nts in your system and offers this as an on site service A field service engineer FSE will adjust instrumentation and perform system verification according to the warranted system specifications For m...

Страница 58: ...of each of the PDUs 3 Place the main circuit breakers on the PDUs in the ON position 4 Close the rear cabinet door 5 Make sure the system computer and all instrument power switches are in the ON posit...

Страница 59: ...Test System Administrative Guide 4 8 S535 924 01 Rev B January 2019 Power distribution and emergency off The following figure contains a simplified example layout of various components in the S535 sys...

Страница 60: ...ation Always on Three groups of four switched outlets off with EMO condition Remote connection to other 42000 PDUs through a 25 pin D sub connector Properly lockout and tagout the system before beginn...

Страница 61: ...e connector Connector providing control of both PDU boxes Using the supplied S510 360B cable assembly connect one of the female ends of the assembly to the PDU box at the front of the cabinet then con...

Страница 62: ...Maintenance S535 924 01 Rev B January 2019 4 11 System emergency off circuit The following figure shows a simplified schematic of the 42000 PDU power distribution unit PDU emergency off EMO circuit F...

Страница 63: ...eed to reinstall the data hub license To upgrade systems with KTE version 5 8 0 and later 1 Open a new Linux terminal session 2 Type licCheck and press Enter to check if the datahub license is install...

Страница 64: ...aracters Do not use space or tab characters Lines should be terminated with newline characters only n Avoid duplicate entries and assignments Using NPLCs to adjust speed and accuracy You can adjust th...

Страница 65: ...owever this setting differs for some commands source measure unit SMU instruments and ranges See NPLC default differences on page 4 15 for details Setting a custom system speed The LEGACY speed mode h...

Страница 66: ...measures with an NPLC of 0 01 The default NPLC setting for the intgX and sintgX commands is 0 1 NPLC except when using the 10 nA and lower ranges on a 2636B default NPLC of 1 The NPLC setting for meas...

Страница 67: ...ow these directives to minimize environmental impact at any location in the world Always follow all local state and country environmental laws these take priority over other directives Take all produc...

Страница 68: ...ach specific model 4200A SCS Parameter Analyzer Series 2600B System SourceMeter Instrument 2461 SYS System SourceMeter Instrument 707B Semiconductor Switch Matrix DMM7510 7 1 2 Digit Graphical Samplin...

Страница 69: ...rame is a programmable switch for connecting signal paths in a matrix structure The six slot mainframe accepts any combination of compatible plug in matrix cards Model 7530 matrix cards are used in th...

Страница 70: ...ystem Figure 51 2636B System SourceMeter Instrument Features include Maximum voltage source measure range 200 V Measurement resolution 0 1 fA current 100 nV voltage Power 20 W Model 2461 SYS System So...

Страница 71: ...ions are not used Optional instrumentation Keithley Test Environment KTE version 5 8 1 supports the following optional instrument DMM7510 7 Digit Graphical Sampling Multimeter 4200A SCS Parameter Anal...

Страница 72: ...e Test System Administrative Guide Section 5 Instrument specifications and documentation S535 924 01 Rev B January 2019 5 5 S535 standard 4 wire low current on 7530 based system Figure 53 S535 standar...

Страница 73: ...5 6 S535 924 01 Rev B January 2019 S535 KTE communications The S535 KTE system uses both ethernet and GPIB to communicate with and control the instruments The following diagram shows how the instrumen...

Страница 74: ...names are the property of Keithley Instruments All other trademarks and trade names are the property of their respective companies Keithley Instruments Corporate Headquarters 28775 Aurora Road Clevela...

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