HP HP 4062F Скачать руководство пользователя страница 115

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Figure

6-1.

Example

Configuration

age

(HP

4062UX)

Note

our

SWM

has

p ort

expander

(Option

340),

the

following

description,

for

example,

display

the

conguration

display

page:

***************

SYSTEM

CONFIGURATION

******************|****

AVAILABLE

PINS

*****

4084B/4089B

SWITCHING

MATRIX

(Opt.

340):

Present

4142B

SOURCE/MONITOR

(Rev.

3.00):

Present

4280A

MHz

METER/C-V

PLOTTER:

Not

present

4284A

20MHz-1MHz

LCR

METER

(Opt.

001/006):

Present

ELECTROGLAS

2001/2010/3001X

WAFER

PROBER:

Present

*****************

DCS

CONFIGURATION

*******************|

SLOT1:41421B(SMU1)

SLOT5:41421B(SMU4)

SLOT2:

SLOT6:41424A(AUX11/13/21/23)|

SLOT3:41420A(SMU2)

SLOT7:41421B(AUX33)

SLOT4:41421B(SMU3)

SLOT8:41425A

************

AUXILIARY

PORT

CONFIGURATION

*************|

AUX11:VS1

12:

13:VM1

AUX31:CMH84

32:

33:SMU

AUX21:VS2

22:

23:VM2

AUX41:CML84

42:

43:

Session

ID:

pcs_2193

Execution

mode:

LINE

System

date

time:

Jan

1990

12:34:56

"START"

end.

----------

Press

[SHIFT]

[MENU]

for

keys.

User

Caps

Idle

xxxxxxxxxxxxxxxxxxx

EDIT

xxxxxxxxxxxxxxxxxxx

Continue

xxxxxxxxxxxxxxxxxxx

RUN

xxxxxxxxxxxxxxxxxxx

SCRATCH

xxxxxxxxxxxxxxxxxxx

LOAD

xxxxxxxxxxxxxxxxxxx

RE-STORE

xxxxxxxxxxxxxxxxxxx

Delete

TIS

xxxxxxxxxxxxxxxxxxx

Link

TIS

Figure

6-2.

Example

Configuration

age

for

ort

Expander

System

erification

6-3

Содержание HP 4062F

Страница 1: ...HP 4062UX Semiconductor Process Control System HP 4062F Semiconductor Parametric Test System Installation Manual ABCDE HP Part No 04062 90240 Printed in Japan October 1994 Edition 1 E1094 ...

Страница 2: ... rmware will be uninterrupted or error free Limitation of Warranty The foregoing warranty shall not apply to defects resulting from improper or inadequate maintenance by Buyer Buyer supplied software or interfacing unauthorized modi cations or misuse operation outside of the environment speci cations for the products or improper site preparation or maintenance No other warranty is expressed or imp...

Страница 3: ...less it appears as a prior update the edition does not change when an update is incorporated The software revision code printed before the date indicates the version level of the software product at the time the manual or update was issued Many product updates and xes do not require manual changes and conversely manual corrections may be done without accompanying product changes Therefore do not e...

Страница 4: ...tutes a de nite safety hazard KEEP AWAY FROM LIVE CIRCUITS Operation personnel must not remove instrument covers Component replacement and internal adjustments must be made by quali ed maintenance personnel Do not replace components with power cable connected Under certain conditions dangerous voltages may exist even with the power cable removed To avoid injuries always disconnect power and discha...

Страница 5: ...efore operating equipment Frame or chassis terminal A connection to the frame chassis of the equipment which normally includes all exposed metal structures Alternating current Direct current ON Supply OFF Supply STANDBY Supply The warning sign denotes a hazard It calls attention to a procedure practice condition or the like which if not correctly performed or adhered to could result in injury or d...

Страница 6: ...tion covers the installation sequence required reference material and equipment required to install the HP 4062UX F Chapter 2 System Controller Installation covers the procedures for system controller installation Chapter 3 Switching Matrix Installation covers the procedures for switching matrix installation Chapter 4 System Installation explains how to integrate the system controller switching ma...

Страница 7: ...ckplane Expander Option 701 702 703 or 704 2 10 Controller and Backplane Expander Installation Procedure Option 701 or 702 2 11 Controller and Bus Expander Installation Procedure Option 703 or 704 2 11 Installing Controller Option 705 or 706 2 13 Mass Storage Unit 2 14 Mass Storage Installation Procedure 2 14 3 Switching Matrix Installation Introduction 3 1 HP 4085B F 48 pin SWM Installation 3 1 U...

Страница 8: ...Installation Preparation 4 12 Installing the HP 4280A 4 13 HP 4280A CMU Settings 4 15 Installation of HP 4284A Capacitance Measurement Subsystem CMU84 4 16 Installing the Customer s HP 4284A 4 16 Installation Preparation 4 16 Installing the HP 4284A 4 18 HP 4284A CMU84 Settings 4 18 Installation of HP 8110A Pulse Source Subsystem PSS HP 4062F Only 4 19 Installing the Customer s HP 8110A 4 19 Insta...

Страница 9: ...6 2 Verifying the System Con guration with START Program 6 2 System Con guration Veri cation for HP 4062F 6 4 Verifying the System Con guration with START F Program 6 4 System Performance Veri cation for HP 4062UX 6 5 Running the PV4062 6 7 The 4062UX W O DVM 6 8 Procedure 6 9 Displaying and Printing Test Results 6 21 Displaying PV test results 6 21 Printing PV test results 6 21 System Performance...

Страница 10: ... Not authorized to use the software C 1 START ERROR 90 SYSCONFIG le not found C 1 START ERROR 300 PCS SESSION ID not de ned C 2 START ERROR 310 Group pcs not registered C 2 START ERROR 330 Device le dev pcs hpibxx not found C 2 START ERROR 450 Fatal error in pcsstart command C 3 pcsstart Error in SYSCONFIG Invalid select code 29 C 3 System Con guration Error C 4 Errors during the PV4062 PV4062 F P...

Страница 11: ...ing Rack Flanges for HP 4284A 4 17 4 8 Installing the HP 4284A 4 18 4 9 Attaching Rack Flanges to HP 8110A 4 21 4 10 Installing the HP 8110A 4 21 4 11 Trigger Cable Connections of One HP 8110A 4 22 4 12 Installing the BNC to SMA cable assembly 4 24 4 13 Pulse Adder Splitters Fixed on the Support Rail 4 25 4 14 Connections of the HP IB Cables 4 28 4 15 Connections of the HP IB Cables with Controlle...

Страница 12: ...s page for HP 4284A 6 19 6 23 CMU84 Bias Test Results Page for HP 4284A 6 20 6 24 DC Leak Test Results Page 6 20 6 25 An Example Page of View Result CRT 6 21 6 26 An Example of Printer Con guration Page 6 22 6 27 An Example Page of View Result Printer 6 23 6 28 PV4062 F Menu Page HP 4062F 6 26 6 29 4062F DC W O DVM Test Startup Page 6 28 6 30 Calibration Module Menu Page 6 29 6 31 Example of Calib...

Страница 13: ...B 2 Printer Con guration Softkey Map B 3 Contents 7 ...

Страница 14: ...ments of HP 8110A for the HP 4062F 4 19 4 9 Contents of Rack Mount Kit for the HP 8110A 4 20 4 10 HP IB Address Settings 4 26 4 11 Connections between the Controller and the System Instruments For series 300 computers 4 27 4 12 Connections between the Controller and the System Instruments For Series 700 Computers 4 27 4 13 Connections Between Output Terminals of the HP 8110A and HF Ports 4 42 5 1 ...

Страница 15: ...ation Chapter 3 covers switching matrix installation Chapter 4 explains how to integrate the system controller switching matrix and cabinet mounted instruments into a system Chapter 5 covers software installation and customization Finally chapter 6 provides instructions for verifying proper system operation Use this manual after the Pre installation Manual which contains site preparation informati...

Страница 16: ...X system les which need about 200 megabytes It takes about two or three hours to load the HP UX system les from the cartridge tape or digital audio tape DAT Meanwhile you can install system hardware such as the switching matrix system instruments and so forth If the HP UX system software is already installed on the hard disk you can save hard disk initialization time and HP UX software installatio...

Страница 17: ...UX F Abbreviations Throughout the HP 4062UX F documentation the following abbreviations are used to identify the subsystems and instruments in the HP 4062UX F system Abbreviation Term SMS Switching Matrix Subsystem consists of SWC and SWM SWC HP 4084B Switching Matrix Controller SWM HP 4085B HP 4089B or HP 4085F Switching Matrix DCS DC Measurement Subsystem HP 4142B Modular DC Source Monitor CMS C...

Страница 18: ......

Страница 19: ...e items may be included depending on the HP 4062UX F software con guration and memory requirements 2 Additional accessories cannot be installed into model 340 or 345 computers because these computer models do not contain enough mechanical or electrical provisions for additional device I O DIO or DIO II interfaces Series 700 computers For instrument control Series 745i 747i Internal HP IB Interface...

Страница 20: ...ter Line Voltage Switch and Line Fuse The computer is shipped from the factory with its line voltage selector switch set to the line voltage in your area and the correct line fuse installed Before you plug the computer in however check the switch setting and line fuse both are located at the rear of the computer to ensure that they are correct For more complete line voltage selector switch and lin...

Страница 21: ... the system controller refer to the HP 98568A 98570A Installation Note HP part number 98568 90603 and so on or to the computer Installing Peripherals HP part number B1862 90007 Volume 1 Chapter 4 for complete installation information To install an HP A2246A DIO I Bus Expander on the model 362 or 382 refer to the Installation Guide Model 362 382 Controller and HP A2246 7 Bus Expanders HP part numbe...

Страница 22: ...e HP IB controlled wafer probers on the HP 4062UX F system HP 98624A HP IB Interface Cards must be con gured as shown Table 2 2 Table 2 2 HP IB Interface Card Switch Settings Factory Settings be changed Non system Controller System Controller Interrupt Level 3 Interrupt Level 3 Select Code 8 Select Code 27 or 25 Primary Address 0 Primary Address 21 If you con gure two HP IB interface cards for the...

Страница 23: ... interface card into an empty even numbered slot in the computer ID Module The HP 46084A ID Module contains a unique machine readable serial number required by the software of the HP 4062UX F that uses the HP Codeword Delivery security scheme The ID Module must be installed in the HP HIL interface system as shown in Figure 2 2 Refer to HP 46084A HP HIL ID Module in Chapter 6 of the Installing Peri...

Страница 24: ...rrectly installed the HP IB interface card for the wafer prober If this message is not displayed repeat the interface card installation procedure and repeat step 1 If the message still does not appear contact your HP Service Representative for assistance b The last message in the list means the amount of physical memory size If the expected memory size is displayed depending on how much memory you...

Страница 25: ...or any accessories that are not described in the following paragraphs see the Installation Guide of the accessories Caution Before you install or remove any computer accessory turn the computer OFF and unplug its power cord Failure to do so may result in computer or accessory damage System Controller Installation 2 7 ...

Страница 26: ...4B HP 4142B HP 4280A HP 4284A and HP 8110As HP E2071B For controlling wafer probers via HP IB from the HP 4062UX F system or controlling other instruments The con guration switches on the interface card set the HP IB interface s I O base address If you use two or more external interface cards in your computer you must set the con guration switches of the cards not to con ict other interface cards ...

Страница 27: ...deword Delivery security scheme The ID Module must be installed in the HP HIL interface system as shown in Figure 2 4 Refer to HP 46084A HP HIL ID Module in Chapter 6 of the Installing Peripherals Volume 2 for complete ID Module installation information Figure 2 4 Connecting the ID Module in the HP HIL Interface System Controller Installation 2 9 ...

Страница 28: ...y Before executing the rack mounting remove the rack mount kits from the system cabinet Table 2 4 lists option 701 702 703 and 704 rack mount kit contents for rack mounting the system controller Check the contents of the kit against Table 2 4 before you proceed Table 2 4 Option 701 702 703 and 704 Rack Mount Kit Contents Item Description HP Part Number Quantity Option 701 Option 702 Option 703 Opt...

Страница 29: ...approximately 12 7 mm 0 5 in away from the controller d Close the buckle securing the strap 6 Place the controller and support shelf assembly on the side rails of the cabinet and push the assembly into the cabinet 7 Place a cup washer 6 then an insert washer 7 on each at head screw 8 8 Place the front panel 3 over the controller and secure the front panel to the support shelf of the controller the...

Страница 30: ...Figure 2 5 Rack Mounting the Controller and Backplane Expander 2 12 System Controller Installation ...

Страница 31: ...d in the following procedure 1 Remove the side strips from each side of the controller 2 Attach the rack ange to each side of the controller using the furnished screws 3 Slide the controller into the lower empty space of the system cabinet 4 Secure the rack anges of the controller to the system cabinet using the furnished screws Figure 2 6 Rack Mounting the Controller Option 705 and 706 System Con...

Страница 32: ...rface 2 Thread the strap 2 as follows a Position the buckle with the protective pad facing down and the free end of the strap to the right near the left hand strap hole on the support shelf Make sure the strap is not twisted b Feed the free end of the strap into the right hand strap hole of the support shelf then out the left hand strap hole c Lay each end of the strap over the sides of the suppor...

Страница 33: ...storage unit and secure the front panel to the support shelf of the mass storage unit then to the system cabinet using the furnished at head screws and washers Figure 2 7 Rack Mounting the Mass Storage Unit System Controller Installation 2 15 ...

Страница 34: ......

Страница 35: ... F weighs about 22 kg 48 4 lb and is wrapped in vinyl making it difficult to lift and carry Be very careful when handling the SWM Remove the SWM from its shipping carton and check the cables and accessories against the check list of the carton If the shipment is incomplete or if anything is damaged contact the nearest HP Sales O ce When shipped from the factory the SWM is wrapped in two separate s...

Страница 36: ...tive plate covering the measurement pins 3 Remove the bottom panel screws then the bottom panel of the SWM 4 Remove the required board struts and pin board control cables Caution When removing pin board control cables disconnect each connector from each pin board separately Do not remove a cable by disconnecting one end and peeling o the cable all at once Figure 3 1 Accessing Pin Boards 5 Remove a...

Страница 37: ...o the desired slot and connect the cable assembly of the board to the corresponding position on the measurement pin mounting ring 7 Reconnect the pin board control cables reinstall the board struts and replace the bottom panel Switching Matrix Installation 3 3 ...

Страница 38: ...tion of the personality board so the pin board numbers printed on the personality board line up with the corresponding numbers on the SWM Con rm that all the measurement pins of the SWM are making good electric contact with the pin contacts of the personality board Manual and Small Automatic Wafer Probers Because the SWM cannot be installed directly on the manual wafer probers or small automatic w...

Страница 39: ...measurement pins of the SWM or the extension cable xture Oil perspiration and dirt prevent good electric contact and degrade measurement accuracy Figure 3 3 HP 16077A F Extension Cable Fixture Switching Matrix Installation 3 5 ...

Страница 40: ...ture HP 4062F HP 16068F 48 pin DIP Low Leakage Fixture HP 16071F Universal Fixture The following procedure tells how to connect test xtures to the SWM Refer to Figure 3 4 1 Install the test xture adapter on the SWM and tighten the thumb screws of the adapter Caution Do not touch the measurement pins of the SWM or the test xture Oil perspiration and dirt prevent good electrical contact and degrade ...

Страница 41: ...For complete information on a speci c test xture refer to the Operation Manual for that test xture Switching Matrix Installation 3 7 ...

Страница 42: ...tall them Caution Do not remove the SWM or its accessories from their protective covers in any area besides the installation site Exposure to dust and other airborne contaminants degrades insulation and reduces measurement accuracy Installing Additional Pin Boards To install additional HP 16320D Pin Boards in your SWM perform the following procedure Caution Install pin boards at the installation s...

Страница 43: ...WM as shown in Figure 3 5 3 Tighten the four thumb screws of the port expander Ten BNC shorting caps are installed on the coaxial connectors of the port expander at the factory Leave the shorting caps on the connectors until the connectors are used When you use the port expander connectors remove the shorting caps and keep them in a safe place because the caps may be used later Figure 3 5 Installi...

Страница 44: ...electrical contact with the pin contacts of the personality board Manual and Small Automatic Wafer Probers Because the SWM cannot be installed directly on the manual wafer probers or small automatic wafer probers you need the HP 16378B Extension Cable Fixture to connect the SWM to the manipulator or probe card of the prober The extension cable xture installs onto the SWM and secures by pushing the...

Страница 45: ...SWM 1 Turn the test xture adapter and the test xture upside down 2 Position the test xture in the test xture adapter and push the black push to lock fasteners on the test xture to lock the test xture onto the test xture adapter 3 Turn the adapter over again topside up 4 Position the adapter on the SWM 5 Push the right and left side levers of the test xture adapter down to secure the adapter on the...

Страница 46: ......

Страница 47: ...ion Manual to unpack and move the system Warning When moving the HP 4062 system on its casters do not allow the casters to become caught on cables or debris or in cracks in the floor The high center of gravity and the momentum caused by pushing or pulling can cause the HP 4062 system to tip over resulting in serious injury to personnel and damage to equipment Caution Fully raise the leveling feet ...

Страница 48: ...as a 30 A rating with a NEMA L5 30P plug For Japan however the cable has a NEMA L6 30P plug If the line voltage in your area is 120 Vac the HP 4062 includes a 3 meter power cable The cable has a 30 A rating with a NEMA L5 30P plug For Japan however the HP 4062F does not include a main power cable The customer must provide a power cable and plug that satis es the Electrical Appliance and Material C...

Страница 49: ... Power source requirements depend on the electrical option installed in your system The PDU can accommodate one of four types of power 100 Vac 120 Vac 220 Vac and 240 Vac The maximum current for each PDU is shown in Table 4 2 Table 4 2 Maximum Current for PDU with Emergency Off Unit Line Voltage HP Part Number Total Maximum Current Maximum Current of Each Outlet 100 Vac 04062 60203 30 A 10 A 120 V...

Страница 50: ...1 Set the two circuit breaker switches to OFF 2 Remove the rear opening cover of the PDU by removing the four screws 4 4 System Installation ...

Страница 51: ... cover by turning the cable clamp screw clockwise When an Emergency Off Unit is NOT Furnished The PDU is located at the bottom of the cabinet The SYSTEM ON OFF power switch is located at the right front of the PDU You must connect the PDU to the power source at your site by using your power cable Power source requirements depend on the electrical option installed in your system The PDU can accommo...

Страница 52: ...pment Caution Do not connect the main power cable to the outlet at your site until after the inspection of all system instruments This will protect the system instruments from damage and service personnel from injury Refer to Testing Each Instrument Use the following instructions for installing the main power cable 1 Set the main power switch of the PDU to OFF 2 Open the rear door and disconnect a...

Страница 53: ...wer cables for each rack mounted instrument are installed before the HP 4062 system is shipped from the factory Before you turn the HP 4062 on however make sure that all power plugs are completely inserted into the outlets of the PDU Note Before you turn the HP 4062 on make sure that the line voltage selector switch of each instrument is set correctly Refer to the Operation Manual of each instrume...

Страница 54: ...240 Vac line voltage Table 4 4 shows the proper rating and HP part number of the fuse for each instrument Table 4 4 Fuse Rating for System Instruments Instrument Line Voltage 100 Vac or 120 Vac Line Voltage 220 Vac or 240 Vac HP 4084B SWC 1 5 A 250 V Time Delay HP part number 2110 0304 750 mA 250 V Time Delay HP part number 2110 0360 HP 4142B DCS 8 A 250 V Non Time delay HP part number 2110 0342 4...

Страница 55: ...t include the accessories furnished with your HP 4142B Table 4 5 Contents of Rack Mount Kit for the HP 4142B Item Description HP Part Number Quantity 1 Flange 04062 01281 2 2 Screw M4 0515 1013 6 3 Flathead Screw 2680 0119 4 4 Insert Washer 3050 0248 4 5 Cup Washer 3050 0007 4 6 Stopper 09480 06051 2 7 Screw M3 5 0515 1232 2 8 Interconnection Cable 04085 61684 1 Installation Preparation To prepare...

Страница 56: ...wing procedure 1 Slide the HP 4142B into the system cabinet 2 Secure the rack anges of the HP 4142B to the cabinet using the furnished washers 4 and 5 and screw 3 3 Secure the rear panel of the HP 4142B to the cabinet using the furnished stoppers 6 and screws 7 4 Connect the HP 4142B to the PDU with the power cable Figure 4 2 Installing the HP 4142B 4 10 System Installation ...

Страница 57: ...ating measurements Warning A potential shock hazard exists when CIRCUIT COMMON 5 is not connected to CHASSIS GROUND on the HP 4142B shorting bar disconnected Regardless of the output voltage do not touch the COMMON terminal of the SMU GNDU VS or VM connectors during a floating measurement shorting bar disconnected 2 LINE ON OFF switch The LINE ON OFF switch located at the lower left side of the HP...

Страница 58: ...ntents of Rack Mount Kit for the HP 4280A Item Description Model HP Part Number Quantity 1 Flange 04062 01283 2 2 Screw M4 0515 1013 8 3 Flathead Screw 2680 0119 4 4 Insert Washer 3050 0248 4 5 Cup Washer 3050 0007 4 6 Tie Mount 1400 1531 2 7 Cable Tie 1400 1448 2 8 1 m HP IB Cable HP 10833A 1 9 Test Lead Assembly 04062 611601 1 10 4 m Cable Assembly CMH 04085 61661 1 11 4 m Cable Assembly CML 040...

Страница 59: ...e the HP 4280A into the system cabinet 2 Secure the left rack ange of the HP 4280A to the system cabinet using the furnished washers 4 and 5 and screw 3 3 Secure the right rack ange of the HP 4280A to the system cabinet using the furnished tie mounts 6 and screw 3 and install the cable ties through the tie mounts 4 Connect the HP 4280A to the PDU with the power cable System Installation 4 13 ...

Страница 60: ...Figure 4 5 Installing the HP 4280A 4 14 System Installation ...

Страница 61: ...the shorting cap from the REMOTE ON OFF connector Refer to section 3 of the HP 4280A Operation Manual 2 CIRCUIT COMMON 5 CHASSIS GROUND Terminals These two terminals must be connected using the furnished shorting bar Warning The ground reference potential on the exposed outer shields of the UNKNOWN TERMINALS and on the CIRCUIT COMMON 5 terminal can become dangerously high when the CHASSIS GROUND a...

Страница 62: ...your HP 4284A Table 4 7 Contents of Rack Mount Kit for the HP 4284A Item Description Model HP Part Number Quantity 1 Flange 04062 01283 2 2 Screw M4 0515 1013 8 3 Flathead Screw 2680 0119 4 4 Insert Washer 3050 0248 4 5 Cup Washer 3050 0007 4 6 Tie Mount 1400 1531 2 7 Cable Tie 1400 1448 2 8 4 m HP IB Cable HP 10833C 1 9 Test Leads HP 16048E 1 10 BNC T Adapter 1250 0781 2 11 BNC f to f Adapter 125...

Страница 63: ...Figure 4 7 Attaching Rack Flanges for HP 4284A System Installation 4 17 ...

Страница 64: ...t using the furnished tie mounts 6 and screw 3 and install the cable ties through the tie mounts 4 Connect the HP 4284A to the PDU with the power cable Figure 4 8 Installing the HP 4284A HP 4284A CMU84 Settings When the HP 4284A CMU84 is installed in the HP 4062 at the factory the HP 4284A comes with Option 001 power ampli er and Option 006 2 m and 4 m cable length operation and the label OPTION 0...

Страница 65: ... 1 HP 8110A Option UN2 Rear Panel Connectors must be used This moves the input and output connectors from front panel to rear panel See the rear panel of the HP 8110A The HP 8110A has the BNC female connectors on the rear panel One or two HP 81103A 10 V 2 ns Output Channel must be installed in the HP 8110A Turn your HP 8110A on press 4Help5 then select NNNNNNNNNNNNNNNNNNNNNNNN SERIAL Installed HP ...

Страница 66: ...05 0 or 14 15 BNC f to BNC m cable assembly 200 mm blue 04062 61607 0 or 14 16 BNC f to BNC m cable assembly 1150 mm blue 04062 61608 0 2 3 or 44 17 BNC f to BNC m cable assembly 1450 mm yellow 04062 61609 0 or 14 1 Quantity depends on total number of option 555 speci ed 2 A ange kit contains two anges and four athead screws 3 The 8120 1378 is for 100 120 Vac line voltage and the 8120 1763 is for ...

Страница 67: ... HP 8110A into the system cabinet and t to the inside panel 2 Secure the rack anges of the HP 8110A to the system cabinet using the furnished washers 3 and 4 and screws 2 Figure 4 10 Installing the HP 8110A 3 Connect the HP 8110A to the PDU with the power cable 5 4 Connect the trigger cables between the installed HP 8110As Figure 4 11 shows the trigger cable connections System Installation 4 21 ...

Страница 68: ...Figure 4 11 Trigger Cable Connections of One HP 8110A Trigger Cable Connections of Two HP 8110As Continued Trigger Cable Connections of Three HP 8110As Continued 4 22 System Installation ...

Страница 69: ...Trigger Cable Connections of Four HP 8110As Continued Trigger Cable Connections of Five HP 8110As Continued System Installation 4 23 ...

Страница 70: ...bly 9 to the resistive probe e Connect a 50 SMA terminator 10 to the BNC to SMA cable assembly f Fix the resistive probe to the support rail with a cable tie see Figure 4 12 g Fix the BNC to SMA cable assembly to the cabinet frame with three cable ties see Figure 4 12 h Pass the BNC to SMA cable assembly through the right opening of the front panel of cabinet i Wind the cable assembly around the t...

Страница 71: ... the pulse adder splitters 11 are not xed to the support rail of the HP 8110A x with cable ties as shown in Figure 4 13 Figure 4 13 Pulse Adder Splitters Fixed on the Support Rail System Installation 4 25 ...

Страница 72: ...ini rotary switches on the rear panel HP 4284A CMU842 17 Press 4CATALOG SYSTEM5 key and select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN SYSTEM CONFIG softkey The HP IB address setting is shown in the screen HP 8110A PG 25 to 293 Press 4MORE5 key then select NNNNNNNNNNNNNNNNNN CONFIG softkey HP IB address setting is shown on the screen You can use the rotary knob to change the address setting 1 For 96...

Страница 73: ... between the Controller and the System Instruments For Series 700 Computers Interface Description HP 25560A For communicating with computer peripherals 745i 747i internal HP IB For controlling the system instruments HP 4084B HP 4142B HP 4280A HP 4284A and HP 8110As HP E2071B For controlling the HP IB controlled wafer probers on the HP 4062UX F system or controlling other instruments The rack mount...

Страница 74: ... IB of the system instruments using the 1 m HP IB cable furnished with the controller rack mount kit See Figure 4 15 Figure 4 15 Connections of the HP IB Cables with Controller If the HP 9000 series 300 model 340 or 345 controller is used as a system controller in the diskless cluster connect the HP IB of the system instruments to the built in HP IB interface 4 28 System Installation ...

Страница 75: ... select code 7 of the controller using the furnished 4 m HP IB cable Note that no printer or plotter can be connected to the built in HP IB interface of the diskless cluster System Installation 4 29 ...

Страница 76: ...afer prober is not supported After setting the HP IB address of the wafer prober connect the wafer prober to the HP IB interface card of the controller using the HP IB cable If the controller however is model 340 or 345 used as a system controller in a diskless cluster connect the wafer prober to the built in HP IB interface select code 7 of the controller Use 25 for select code series 300 compute...

Страница 77: ...TCHING MATRIX terminal on the rear panel of SWC SWC1 for 96 pin SWM systems For 96 pin SWM systems connect another control cable to the TO SWITCHING MATRIX terminal on the rear panel of SWC2 Note that the HP IB address of SWC or SWC1 is set to 22 and the HP IB address of SWC2 is set to 19 2 Connect the other control cable terminal to the TO SWITCHING MATRIX CONTROLLER terminal of the HP 4085B SWM ...

Страница 78: ... 4 cables to the SMUs HP 41420As and HP 41421Bs of DCS 3 Connect the INTLK cable to the INTLK terminal of DCS 4 Connect the GNDU cable to the GNDU terminal of DCS 5 Connect the AUX1 through AUX4 cables to the VS and VM terminals of DCS 6 Connect the interconnection cable terminal box to the TO MODULAR DC SOURCE MONITOR terminal of SWM 7 Connect any two AUX cables from the VS or VM terminals of DCS...

Страница 79: ...hread the CMH cable HP part number 04085 61661 and CML cable HP part number 04085 61662 through the left hand cable entry opening below the CMU on the front panel of the cabinet 4 Connect the CMH cable to the triaxial triaxial adapter connected to the cable assembly CMH connector 5 Connect the CML cable to the triaxial triaxial adapter connected to the cable assembly CML connector 6 Connect the CM...

Страница 80: ...ge leads from the test leads using a BNC T adapter HP part number 1250 0781 Connect the BNC T adapter to the AUX3 CMH terminal of the SWM using a BNC f to f adapter HP part number 1250 0080 and 23 cm BNC cable HP part number 8120 1838 5 Interconnect the gray and black leads from the test leads using a BNC T adapter Connect the BNC T adapter to the AUX4 CML terminal of the SWM using a BNC f to f ad...

Страница 81: ...ep the unused BNC shorting caps in a safe place The BNC shorting caps are used to check relay operations in the port expander Figure 4 20 Connecting Signal Cables to the Port Expander When you connect additional SMU cables Option 341 to the AUX33 or AUX43 ports an unnecessary tag must be removed from the SMU cable For example if an SMU cable is connected to the AUX33 port you must remove the tag l...

Страница 82: ... in Figure 4 21 Figure 4 21 Fastening the Interconnection Cables with Cable Ties When Your System is HP 4062F This section provides procedures to install the cables and cable assemblies to the system instruments the HP 4085F SWM HP 4084B SWC HP 4142B DCS HP 4280A CMU or HP 4284A CMU84 and HP 8110A PG s Note that all the signal cables must be connected from the SWM to the instruments through the ca...

Страница 83: ...2 Connect the other control cable terminal to the TO SWITCHING MATRIX CONTROLLER terminal of the HP 4085F SWM Figure 4 22 Connecting the HP 4084B SWC to the HP 4085F SWM System Installation 4 37 ...

Страница 84: ... to the SMUs HP 41420As and HP 41421Bs of HP 4142B 3 Connect the INTLK cable to the INTLK terminal of HP 4142B 4 Connect the GNDU cable to the GNDU terminal of HP 4142B 5 Connect the AUX1 through AUX4 cables to the VS and VM terminals of HP 4142B 6 Connect the interconnection cable terminal box to the TO MODULAR DC SOURCE MONITOR terminal of HP 4085F SWM 7 Connect any one AUX cable from the VS or ...

Страница 85: ...ead the CMH cable HP part number 04085 61661 and CML cable HP part number 04085 61662 through the left hand cable entry opening below the HP 4280A on the front panel of the cabinet 4 Connect the CMH cable to the triaxial triaxial adapter connected to the cable assembly CMH connector 5 Connect the CML cable to the triaxial triaxial adapter connected to the cable assembly CML connector 6 Connect the...

Страница 86: ...ds from the test leads using a BNC T adapter HP part number 1250 0781 Connect the BNC T adapter to the AUX3 CMH terminal of the HP 4085F SWM using a BNC f to f adapter HP part number 1250 0080 and 23 cm BNC cable HP part number 8120 1838 5 Interconnect the gray and black leads from the test leads using a BNC T adapter Connect the BNC T adapter to the AUX4 CML terminal of the HP 4085F SWM using a B...

Страница 87: ...e easily raised and lowered Caution Do not use cables or cable assemblies other than those supplied with the system Use of other cables may damage the instruments or may make it impossible to obtain speci ed measurement accuracy After installing all the signal cables fasten the interconnection cables connected to HP 4142B together using cable ties shown in Figure 4 26 Figure 4 26 Fastening the Int...

Страница 88: ...nnect it to OUTPUT 1 terminal of the HP 8110A PG3 3 Pass the PG cables through the opening of the rear panel 4 On the cable adapter that is attached to HP 4085F SWM connect BNC connector of each PG cable to corresponding HF port Hewlett Packard recommends that when you install the HP 4062F system you connect the PG cables to the HF ports as shown in Table 4 13 Table 4 13 Connections Between Output...

Страница 89: ...moved from the cabinet System instruments should be removed from the system cabinet by trained service personnel only HP 4142B s plug in modules can also be easily removed To do so loosen the screws in the lower left and right corners of the front panel gently remove the front panel and disconnect the at cable from the mainframe module connector Turn the upper and lower quick disconnect screws of ...

Страница 90: ...anual of each instrument for the location of each line switch 2 Connect the main power cable to the power source at your site 3 Turn on the main circuit breaker or GFCI in the system cabinet 4 If your PDU is furnished with a GFCI press the red push switch labeled Breaker Test Switch to force earth leakage current The GFCI indicator should extend out to show the earth leakage condition To reset the...

Страница 91: ... terminals The instrument should turn o 20 Turn o the instrument and the circuit breaker for the emergency o unit 21 Reinstall the shorting lead to the Ext In terminals 22 Turn on the circuit breaker for the emergency o unit 23 Press the LINE 4 1 5 switch Testing Power Distribution Unit PDU HP 4062UX Only If your system is furnished with an emergency o unit skip this test This test checks the foll...

Страница 92: ...nerator s HP 4062F only Use the following procedure to check the test items above 1 Set the LINE ON OFF or POWER ON OFF switch of each instrument located on the front panel of each instrument to ON and inspect each instrument for any errors or failures Note After the inspection leave the LINE ON OFF or POWER ON OFF switch of each instrument to ON to warm up the system instruments Cleaning To preve...

Страница 93: ...ing system software which is the user s responsibility Following system software installation and customization information to customize the wafer prober is provided If your system has the HP Interactive Measurement and Analysis IMA software use this chapter to install your HP IMA software Caution If you are installing the new software on a hard disk that has been used Hewlett Packard recommends t...

Страница 94: ... If you have any questions about the HP 4062UX F environment contact the nearest HP Sales O ce in your area Note If con guring the HP 4062UX F in a diskless cluster perform the installation procedures on the server The software installation for HP 4062UX F involves the following tasks Figure 5 1 is an installation procedure owchart Installing HP UX and other application software Installing HP BASI...

Страница 95: ...Figure 5 1 Installation Flowchart for HP 4062UX F System Software Software Installation 5 3 ...

Страница 96: ...ent Minimum Disk Size Swap Size1 1 block 512 bytes Memory2 Standalone Environment 200 MB 20 MB 40960 Blocks 8 megabytes Diskless Cnode Environment 20 MB 40960 Blocks cnode 8 megabytes 1 Hewlett Packard recommends to keep more than 30 MB 61440 blocks of swap space for X11 Windows or HP Visual User Environment VUE 2 Hewlett Packard recommends to install at least 16 megabytes of memory for the X11 Wi...

Страница 97: ... your console display type modify the etc ttytype le as follows 98550a console for example 2397 tty00 2397 tty01 2397 tty02 The default setting of your console is 300h If your display type is not 300h you must correct it The display board inserted in the backplane of your computer shows the display type For HP Visual User Environment VUE con guration you can start the HP VUE screen after booting t...

Страница 98: ...rompt appears enter the root password of your system The password that you type is not displayed on your console 2 To start the UPDATE 1M utility enter update After starting the UPDATE utility follow the displayed instructions 2 Install HP SICL 3 01 HP 4062UX C Library for Series 700 Only If you use HP 4062UX C library option 034 in series 700 computers Hewlett Packard recommends to install all le...

Страница 99: ...s Login root After the Password prompt appears enter the root password of your system The password that you type is not displayed on your console 2 To start the UPDATE 1M utility enter update Update starts and displays the main menu The default source for the update is dev update src This procedure assumes that the dev update src is set correctly If the dev update src setting is not correct see th...

Страница 100: ...n the NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN Configuration Parameters submenu The kernel parameters are listed in alphabetical order 4 Select and highlight msgtql parameter column 5 Select NNNNNNNNNNNNNNNNNNNNNNNNNNNNN Actions then select NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN Modify Configu...

Страница 101: ...m with the configuration except for the example below set I F parameters appropriate for your configuration Example model 745i internal I F and E2071B installed in slot 1 25 hpib25 e2071 1 21 0b0000 1 3 for prober control 27 hpib27 s745 0xf0835000 21 1 for HP 4062 control If your controller is model 745i 747i internal card is recommended to use for HP 4062UX F control and E2071B is recommended to ...

Страница 102: ... and each diskless cnode This command automatically customizes the following les etc pro le etc csh login usr vue con g Xsession usr lib rmb rmbrc usr lib X11 app defaults Rmb For series 300 computers this command also rebuilds the HP UX kernel for HP BASIC UX 7 If your controller is a series 300 computer reboot your HP UX system If your controller is a series 700 computer skip this step Enter as ...

Страница 103: ...the HP 4062UX then change the permission as follows cp usr pcs newconfig d x11start x11start chmod u rwx x11start 10 Execute the following commands for X11 colormap database setup For color display cat etc newconfig rmb rgb rmb usr lib X11 rgb txt usr bin X11 rgb usr lib X11 rgb txt For gray scale display cat etc newconfig rmb gray rmb usr lib X11 rgb txt usr bin X11 rgb usr lib X11 rgb txt 11 Sta...

Страница 104: ...r 15 HP 4062F only Customize usr pcs etc FLCONFIG le The FLCONFIG le includes the information on the device selectors select code 2 100 HP IB address of the HP 8110As and on the connections between pulse generator units and HF ports You must specify the correct connections between pulse generator PG units and HF ports in this le The default setting in this le assumes that ve HP 8110As containing t...

Страница 105: ...1140 HF7 PG41 1150 HF8 PG42 1160 HF9 PG51 1170 HF10 PG52 Software Installation 5 13 ...

Страница 106: ...ected state 6 Insert the distribution tape into the tape drive and wait until the BUSY indicator turns o 7 To load all les of the tape select the Select All Filesets on the Source Media function in the main menu All the les are loaded from the distribution tape 8 After nishing the update utility review the update log for any error or warning messages with the following command view tmp update log ...

Страница 107: ...HP IMA UX into the usr pcs etc CODEWORD le 1000 Please add your CODEWORDs to this file 1010 RE SAVE usr pcs etc CODEWORD HFS 1020 1234567890123456 Example of CODEWORD 1030 DD6C6BB9A757DCE7 ID 2944AXXXXX FOR 4062UX 1040 86A1542B408AA511 ID 2944AXXXXX FOR IMA UX usr pcs etc PERCONFIG Note If your system is in a diskless cluster perform the modi cations at cluster server and each diskless cnode If yo...

Страница 108: ...ord press 4Return5 only In this stage the new account does not need a password Later the user will set his password For setting your password see A Beginner s Guide to HP UX 8 Exit SAM 1M then log o the HP UX system 9 Log in as the new account For example if the new account name is mike enter mike 4Return5 after the Login prompt When you are prompted TERM hp enter your terminal type For example en...

Страница 109: ...he permission of x11start 700x le as follows chmod u rwx bin x11start 700x 4 Modify the x11start 700x le for your environment You can use VI 1 editor to modify this le a Add one of the following command lines for your X Terminal For color CRT For Color CRT usr bin X11 xinitcolormap c 16 etc newconfig rmb xrmbcolormap For gray scale CRT For Gray Scale CRT usr bin X11 xinitcolormap c 16 etc newconfi...

Страница 110: ...bin X11 xinitcolormap c 16 etc newconfig rmb xrmbcolormap For gray scale CRT For Gray Scale CRT usr bin X11 xinitcolormap c 16 etc newconfig rmb xrmbgraymap For color CRT with BASIC Plus greater than 4 planes For Color CRT with BASIC Plus greater than 4 planes usr bin X11 xinitcolormap f usr lib rmb PLUS bplus_colormap For color CRT with BASIC Plus 4 planes For Color CRT with BASIC Plus 4 planes u...

Страница 111: ...ame as the HP IB primary address of the wafer prober Con rm the HP IB primary address of your wafer prober The default select code for series 300 computers or logical unit number for series 700 computers set in the usr pcs etc SYSCONFIG le is 25 To show and modify the SYSCONFIG le use the following procedure 1 Boot the HP UX system 2 Log in as a superuser 3 Start HP BASIC UX by entering rmb 4 Load...

Страница 112: ......

Страница 113: ...tem Verification This chapter provides instructions and procedures to verify correct HP 4062UX F operation System veri cation should be performed immediately after system installation System Verification 6 1 ...

Страница 114: ...m 3 Log in as a superuser 4 Start BASIC UX as follows rmb 5 Load the START program as follows LOAD usr pcs bin START 6 Run the START program by selecting the NNNNNNNNNNNNNNNNN RUN softkey or by typing RUN 4Return5 7 The copyright message page is displayed Select the NNNNNNNNNNNNNNNNNNNNNNNNNN Continue softkey 8 The execution mode selection page is displayed Choose the ON LINE mode by selecting the...

Страница 115: ...LOT1 41421B SMU1 SLOT5 41421B SMU4 SLOT2 SLOT6 41424A AUX11 13 21 23 49 50 51 52 53 54 55 56 SLOT3 41420A SMU2 SLOT7 41421B AUX33 57 58 59 60 61 62 63 64 SLOT4 41421B SMU3 SLOT8 41425A 65 66 67 68 69 70 71 72 AUXILIARY PORT CONFIGURATION 73 74 75 76 77 78 79 80 AUX11 VS1 12 13 VM1 AUX31 CMH84 32 33 SMU 81 82 83 84 85 86 87 88 AUX21 VS2 22 23 VM2 AUX41 CML84 42 43 89 90 91 92 93 94 95 96 Session ID...

Страница 116: ...wn in the Figure 6 3 Con rm that your system con guration is correct d a c b SYSTEM CONFIGURATION AVAILABLE PINS 4084B 4085F SWITCHING MATRIX Present 01 02 03 04 4142B DC SOURCE MONITOR Rev 4 10 Present 05 06 07 08 4280A 1MHz C METER C V PLOTTER Not present 09 10 11 12 4284A 20Hz 1MHz LCR METER Opt 001 006 Present 13 14 15 16 8110A 150MHz PULSE GENERATOR 1 2 3 Present 17 18 19 20 ELECTROGLAS 2001 ...

Страница 117: ...ny performance veri cation data Table 6 1 shows the equipment required to run performance veri cation Table 6 1 Required Equipment for Performance Verification Required Equipment For 48 pin SWM For 96 pin SWM Test Fixture Adapter HP 16066A HP 16370A Relay Test Adapter HP 16075A HP 16355A System Calibration Module HP 16346B C1 HP 16366A B2 1 If the HP 4062UX is equipped with an HP 4284A 20 Hz 1 MHz...

Страница 118: ... port expander box remove the connectors from the AUX ports that are connected to unsupported instruments In place of the unsupported instruments attach BNC shorting caps to the AUX ports Note that the AUX33 and AUX43 ports which are triaxial connectors can be connected only to SMUs 6 6 System Verification ...

Страница 119: ...he current directory to the usr pcs diag directory as follows cd usr pcs diag 4 Enter the HP BASIC UX environment as follows rmb 5 Load and run the PV program as follows LOAD PV4062 4Return5 RUN 4Return5 or select the NNNNNNNNNNN RUN softkey PV4062 main menu page is displayed as shown in Figure 6 4 Figure 6 4 PV4062 Menu Page HP 4062UX System Verification 6 7 ...

Страница 120: ...Us HP 16346B HP 16366A B VS Test Checks the DCS VS1 and VS2 accuracy HP 16346B HP 16366A B VM Test Checks the DCS VM1 and VM2 accuracy HP 16346B HP 16366A B AFU Test Performs an analog feedback measurement using the DCS AFU and checks measurement results against test limits HP 16346B HP 16366A B CMS C G Test2 Performs the CMU ROM RAM Test checks C G measurement accuracy and measures measurement pi...

Страница 121: ...ntact pads of the relay test adapter with bare hands Oil perspiration and dirt prevent good electrical contact and degrade measurement accuracy d a c b Figure 6 5 4062UX W O DVM Test Startup Page 2 To verify or change the calibrated values of the system calibration module select the NNNNNNNNNNNNNNNNNNNNNNNNNN Reconfig softkey The program displays the RECONFIG page which shows the presently set sys...

Страница 122: ... data d a c b Figure 6 6 Calibration Module Menu Page for 48 pin SWM System 4 Figure 6 7 shows an example of an HP 16346C calibration data entry page The eld pointer shows the entry of data and if it is re entered the current data is displayed in the display area If you want to change the current data move the eld pointer using the arrow keys or the 4 Tab 5 key and type in new data and 4Return5 Af...

Страница 123: ...e OPEN and SHORT corrections of the CMU84 To do so select the NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN HP4284A Corr softkey and follow the displayed prompts It takes about three minutes for the corrections For OPEN correction disconnect the BNC BNC cables from the SWM and remove the BNC BNC cables and BNC f to f adapters as shown in Figure 6 8 Figure 6 8 Test Lead Connections for OPEN Corre...

Страница 124: ...Press 4 Shift 5 4 Menu 5 to display additional softkeys Be sure the empty test xture adapter is installed on the SWM and select the NNNNNNNNNNNNNNNNN SEQ softkey to perform all 4062UX W O DVM subtests sequentially 9 The following message is displayed Do you want to keep results in a file Type CAT to get file catalog To continue testing without keeping test results select the NNNNNNNN No softkey an...

Страница 125: ...ata PVWO0190 4Return5 or PVWO0190 700 1 4Return5 The le name PVWO0190 stands for Performance Veri cation W O DVM January 1990 The DATA or data directory is used to store the PV data or DIAG data 11 The PV test results data entry page is displayed similar to that shown in Figure 6 11 for entering test information Follow the instructions displayed d a c b Figure 6 11 PV Test Results Data Entry Page ...

Страница 126: ...re displayed as shown in Figure 6 13 When testing the HP 4089B 96 pin SWM the Relay Test performs a Pin Board Test and an Input Relay Test which checks all input relays on the port boards on o make break operation Note that you must remove the relay test adapter from the SWM when performing the Input Relay Test If the SWM has a port expander the Relay Test also tests the port expander relays Disco...

Страница 127: ...b Figure 6 14 Relay Test Results Page for 96 pin SWM 13 Install the system calibration module on the SWM and select the NNNNNNNNNNNNNN NEXT softkey to start the SMU Test When the test nishes test results are displayed as shown in Figure 6 15 System Verification 6 15 ...

Страница 128: ...n the display When the VS Test nishes test results are displayed as shown in Figure 6 16 d a c b Figure 6 16 VS Test Results Page 15 Select the NNNNNNNNNNNNNN NEXT softkey to start the VM Test Follow the VM to AUX port connection instructions on the display When the VM Test nishes test results are displayed as shown in Figure 6 17 6 16 System Verification ...

Страница 129: ... Figure 6 18 d a c b Figure 6 18 AFU Test Results Page 17 If the system is equipped with an HP 4280A CMU it proceeds to the CMS C G Test when you select the NNNNNNNNNNNNNN NEXT softkey Go to next step If the system is equipped with an HP 4284A CMU84 it proceeds to the CMU84 C G Test when you select the NNNNNNNNNNNNNN NEXT softkey Go to step 19 System Verification 6 17 ...

Страница 130: ...n in Figure 6 20 for 96 pin SWM d a c b Figure 6 19 CMS C G Test Results Page for 48 pin SWM d a c b Figure 6 20 CMS C G Test Results Page for 96 pin SWM 19 Select the NNNNNNNNNNNNNN NEXT softkey to start the CMS Bias Test When the test nishes test results are displayed as shown in Figure 6 21 Go to step 21 6 18 System Verification ...

Страница 131: ...r the 96 pin SWM make sure that the HP 16366B Calibration Module is installed on the SWM When the test nishes test results are displayed as shown in Figure 6 22 d a c b Figure 6 22 CMU84 C G Test Results page for HP 4284A 21 Select the NNNNNNNNNNNNNN NEXT softkey to start the CMU84 Bias Test When the test nishes test results are displayed as shown in Figure 6 23 System Verification 6 19 ...

Страница 132: ...he NNNNNNNNNNNNNN NEXT softkey to start the DC Leakage Test When the DC Leakage Test nishes test results are displayed as shown in Figure 6 24 d a c b Figure 6 24 DC Leak Test Results Page 23 When all 4062UX W O DVM tests are nished press 4 Shift 5 4 Menu 5 and select the NNNNNNNNNNNNNN EXIT softkey to return the PV4062 main menu page 6 20 System Verification ...

Страница 133: ... of test results d a c b Test Facility Hewlett Packard Report No ______________________ _________________________________ Date _________________30 May 1991 _________________________________ Customer ________________________ _________________________________ Tested by _________Cheryl Jenkins HP 4062UX Serial Number ____________2830J00165 Temperature ___23 degrees Celsius Firmware Revision _________...

Страница 134: ...er Configuration Page 5 To change the printer con guration select the NNNNNNNNNNNNNNNNNNNNNNNNNN RECONFIG softkey Refer to Appendix B for information to con gure the system printer If the printer con guration is correct and if the printer is ready select the NNNNNNNNNNNNNNNNN PRINT softkey A print out similar to Figure 6 27 is printed 6 22 System Verification ...

Страница 135: ...Figure 6 27 An Example Page of View Result Printer System Verification 6 23 ...

Страница 136: ... and calibration of 4062F AC tests To display or print veri cation results use the VIEW RESULT function The 4142B and START tests are used for troubleshooting purposes Before running PV4062 F make sure that no system instrument has failed self test at power on For failures refer to manual of the instrument that failed for instructions on handling self test failures Note The HP 4062F needs at least...

Страница 137: ...or p 1250 1200 SMA m to BNC f Adapter p 1 Furnished with the HP 4062F system 2 If HP 41420A 200 V 1 A SMU is installed in the HP 4142B the HP 16346B must be used for the W O DVM tests 3 If the HP 4062F is equipped with an HP 4284A Precision LCR Meter both the HP 16346B and the HP 16346C are required for the 4062F DC W O DVM tests Otherwise only the HP 16346B is required Note Make sure HP 16346A B ...

Страница 138: ...C xxxxxxxxxxxxxxxxxxx START xxxxxxxxxxxxxxxxx VIEW RESULT xxxxxxxxxxxxxxxxxxx xxxxxxxxxxxxxxxxxxx END Figure 6 28 PV4062 F Menu Page HP 4062F 6 Install the HP 16066A test xture adapter on the SWM Note The test xture adapter with no test xture installed is used to hold the WAFER PROBER SENSE switch closed during this test to enable the SWM If the test xture adapter is not available press and hold t...

Страница 139: ...est mode tests can be performed individually in any desired sequence For both test modes the program displays a running record of test results To verify HP 4062F after installation you must execute all these subtests sequentially and save the test results in a le for future reference So this section provides instructions for performing all subtests of 4062F DC W O DVM in the sequential test mode o...

Страница 140: ... SHORT correction However you do not need to execute this correction to verify HP 4062F system installation Refer to the HP 4284A Operation Manual for details Caution Do not touch the measurement pins of the SWM or the contact pads of the relay test adapter with bare hands Oil perspiration and dirt prevent good electrical contact and degrade measurement accuracy d a c b HP 4062F Performance Verifi...

Страница 141: ...th an HP 4284A CMU84 an HP 16346C is also required Select the desired softkey of the product number according to your system instrument For example if your system is equipped with an HP 4284A CMU84 select the NNNNNNNNNNNNNNNNNNNNNNNNNN 16346B softkey and modify the calibration data then select NNNNNNNNNNNNNNNNNNNNNNNNNN 16346C softkey and modify the calibration data d a c b HP 4062F PERFORMANCE VE...

Страница 142: ...0 ohm C 0 0000 pF 1 Kohm R 1 0000 Kohm C 0 0000 pF 100 pF C 100 00 nF 100 00 nF 100 00 nF 1000 pF C 1000 0 pF 1000 0 pF 1000 0 pF 1000 0 pF 10 nF C 10 000 nF 10 000 nF 10 000 nF 100 nF C 100 00 nF 100 00 nF Enter a value 100 ohm 100 00 User 1 Caps Running aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa CANCEL aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa SAVE EXIT...

Страница 143: ...Relay Test 16075F 04085 60006 SMU VS VM AFU CMU C G CMU BIAS Tests 16346A B CMU84 C G CMU84 BIAS Tests 16346C DC LEAK Test 16066A Select the desired softkey Press SHIFT MENU for more keys User 1 Caps Running aaaaaaaaaaaaaaa RELAY aaaaaaaaaaaaaaa SMU aaaaaaaaaaaaaaa VS aaaaaaaaaaaaaaa VM aaaaaaaaaaaaaaa AFU aaaaaaaaaaaaaaa CMU84 C G aaaaaaaaaaaaaaa CMU84 BIAS aaaaaaaaaaaaaaa DC LEAK Figure 6 32 406...

Страница 144: ... a page is displayed similar to that shown in Figure 6 33 for entering test information Follow displayed instructions d a c b HP 4062F Semiconductor Parametric Test System Tested by Serial Number Date 1 Feb 1994 Temperature Humidity 4085F SWITCHING MATRIX PRESENT Serial Number 4084B SWITCHING MATRIX CONTROLLER PRESENT Serial Number 4142B DC SOURCE MONITOR PRESENT Serial Number 4280A C METER C V PL...

Страница 145: ...e Relay Test performs a Pin Board Test which checks on o make break operation of all relays on the pin boards If the Relay Test nishes without errors the test results are displayed as shown in Figure 6 13 d a c b RELAY TEST RELAY TEST OK TEST RESULTS RELAY OK SMU VS VM AFU CMS C G CMS BIAS DC LEAK RELAY TEST FINISHED SMU Test is next Mount the 16346B atop the SWM and then select NEXT User 1 Caps R...

Страница 146: ...6 15 d a c b DCS PASSED SELF TEST SMU TEST TEST RESULTS RESULT REPEAT OK SPOT OK RELAY OK SMU OK VS SMU TEST FINISHED VM AFU CMS C G CMS BIAS DC LEAK VS Test is next Select NEXT to go on Select SKIP to skip this test User 1 Caps Running aaaaaaaaaaaaaaa NEXT aaaaaaaaaaaaaaa SKIP aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa EXIT Figure 6 35 SMU Test...

Страница 147: ...aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa EXIT Figure 6 36 VS Test Results Page 10 VM Test Select NNNNNNNNNNNNNN NEXT softkey to start VM Test Follow VM to AUX port connection instructions d a c b VM TEST TEST RESULTS VM OK RELAY OK SMU OK VS OK VM OK AFU CMS C G CMS BIAS DC LEAK VM TEST FINISHED AFU Test is next Select NEXT to go on Select SKIP to skip this test User 1 Caps Running aaaaaaaa...

Страница 148: ...INISHED CMS C G Measurement Test is next Select NEXT User 1 Caps Running aaaaaaaaaaaaaaa NEXT aaaaaaaaaaaaaaa SKIP aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa EXIT Figure 6 38 AFU Test Results Page Note If the system is equipped with an HP 4280A CMU the CMS C G Test is next Go to next step If the system is equipped with an HP 4284A CMU84 the CMU8...

Страница 149: ...aaaaaa EXIT Figure 6 39 CMS C G Test Results Page for HP 4280A 13 CMS Bias Test Select NNNNNNNNNNNNNN NEXT softkey to start CMS Bias Test When test nishes results are displayed as shown in Figure 6 21 Go to step 16 d a c b CMS BIAS TEST RESULTS CMS BIAS OK RELAY OK SHORT CAP PRESENT SMU OK VS OK VM OK AFU OK CMS C G OK CMS BIAS OK DC LEAK CMS BIAS TEST FINISHED DC Leakage Test is next Mount the 16...

Страница 150: ...aaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa EXIT Figure 6 41 CMU84 C G Test Results Page for HP 4284A 15 CMU84 Bias Test Select NNNNNNNNNNNNNN NEXT softkey to start CMU84 Bias Test When test nishes results are displayed d a c b CMU84 BIAS TEST RESULTS CMU84 BIAS OK RELAY OK SMU OK VS OK VM OK AFU OK CMU84 C G OK CMU84 BIAS OK DC LEAK CMU84 BIAS TEST FINISHED DC Leakage Test is n...

Страница 151: ... test attach the proper adapter to the SWM Relay Test 16075F 04085 60006 SMU VS VM AFU CMU C G CMU BIAS Tests 16346A B CMU84 C G CMU84 BIAS Tests 16346C DC LEAK Test 16066A HP 4062F PERFORMANCE VERIFICATION FINISHED Select the desired softkey User 1 Caps Running aaaaaaaaaaaaaaa RELAY aaaaaaaaaaaaaaa SMU aaaaaaaaaaaaaaa VS aaaaaaaaaaaaaaa VM aaaaaaaaaaaaaaa AFU aaaaaaaaaaaaaaa CMU84 C G aaaaaaaaaaa...

Страница 152: ... 8 12 16 20 24 28 32 36 40 44 48 Required Equipment Pulse test module HP 16354F Digitizing oscilloscope HP 54121T HP IB cable 20 dB attenuator SMA m to BNC f adapter BNC m to BNC m cable less than 1 5 m Note The HP 54121T oscilloscope must be warmed up for at least one hour Warning When you execute the PV4062F AC Test be sure that the HP 16354F is removed from the HP 4085F SWM Then mount the HP 16...

Страница 153: ...orting cap from the INPUT 3 terminal of the HP 54121A b Attach a 20 dB attenuator to the INPUT 3 terminal c Attach a SMA m to BNC f adapter to the 20 dB attenuator d Attach a BNC m to BNC m cable less than 1 5 m to the SMA to BNC adapter 4 Remove 50 terminator from the PG1 TRIG OUT cable remove shorting cap from the TRIG terminal of the HP 54121A then connect the cable to the TRIG terminal 5 Con r...

Страница 154: ... least at Pin4 8 12 16 20 24 28 32 36 40 44 and 48 in the SWM 2 Connect the Probe to HP54121A INPUT 3 as follows HP 54121A INPUT3 20dB ATT SMA BNC Adapter BNC Cable 3 Remove 50 Ohm terminator from PG1 TRIG OUT cable then connect the cable to HP 54121A TRIG terminal 4 Set the HP IB address of HP 54120B to 2707 To change address select HP IB ADDRESS softkey 5 Mount the HP 16354F atop the SWM Read th...

Страница 155: ...F port edit the FLCONFIG then run the PV4062 again Read the above message then press NEXT to continue User 1 Caps Running aaaaaaaaaaaaaaa NEXT aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa Figure 6 45 HF Port Configuration Page 4 Select the NNNNNNNNNNNNNN NEXT softkey The start up page of the 4062F AC test appears d a c b HP 4062F P...

Страница 156: ... NEXT xxxxxxxxxxxxxxxxxxx SKIP xxxxxxxxxxxxxxxxxxx xxxxxxxxxxxxxxxxxxx xxxxxxxxxxxxxxxxxxx xxxxxxxxxxxxxxxxxxx xxxxxxxxxxxxxxxxxxx xxxxxxxxxxxxxxxxxxx EXIT 7 Calibration a Select NNNNNNNNNNNNNN NEXT softkey to execute the CALIBRATION test c b CALIBRATION is next Press NEXT to continue User 1 Running xxxxxxxxxxxxxxxxxxx NEXT xxxxxxxxxxxxxxxxxxx SKIP xxxxxxxxxxxxxxxxxxx xxxxxxxxxxxxxxxxxxx xxxxxxxxx...

Страница 157: ...062F DC W O DVM test type data PVWO0294 4Return5 4 Select the NNNNNNNNNNN CRT softkey to display test results A page similar to Figure 6 25 is displayed Select the NNNNNNNNNNNNNN MORE softkey to display the next page of test results d a c b P E R F O R M A N C E T E S T R E C O R D Test Facility Hewlett Packard Report No ______________________ _________________________________ Date _______________...

Страница 158: ...he printer con guration page is displayed as shown in Figure 6 26 d a c b CONFIGURATION PRINTER TYPE HP UX SPOOL PRINTER ADDR lp PAGE LENGTH 66 MARGIN TOP 2 BOTTOM 2 LEFT 0 PAGE NUMBERING ON Select the desired softkey User 1 Running aaaaaaaaaaaaaaa PRINT aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa RECONFIG aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa EXIT Figure 6 48 Example...

Страница 159: ...Figure 6 49 An Example Page of View Result Printer System Verification 6 47 ...

Страница 160: ......

Страница 161: ... system software then update all the software together as described in the next procedure The correspondence of the HP 4062UX F system software and operating system software is described in Read Me Before Installing the HP 4062UX F Revision xx xx System Software Updating for HP 4062UX F Below are guidelines to update the HP 4062UX F system software 1 Before updating your system software check the ...

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Страница 163: ...e VIEW RESULT function Figure B 1 shows the PV4062 PV4062 F printer con guration page To display this page load and run the PV4062 PV4062 F program select the NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN VIEW RESULT softkey select the NNNNNNNNNNNNNNNNNNNNNNNNNNNNN READ FILE softkey enter the name of the le that contains the test results then select the NNNNNNNNNNNNNNNNNNNNNNN PRINTER softkey d a c b CONFIG...

Страница 164: ...uration Settings Item Default PRINTER TYPE HP UX SPOOL PRINTER ADDRESS 701 PRINTER I F HP IB SPOOL DIRECTORY spool REMOTE SPOOL COMMAND j lp BAUD RATE RS 232C 9600 baud PAGE LENGTH 66 line page MARGIN Top 2 lines Bottom 2 lines Left 0 spaces PAGE NUMBERING ON Figure B 2 shows a softkey map for con guring printer settings Select the desired softkeys and enter the required values and names to change...

Страница 165: ...NNNNNNNNNNNNNNNNNNNNNNNNNNNNNN PRINTER TYPE Displays the NNNNNNNNNNNNNNNNN LOCAL NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN FILE SPOOL and NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN HP UX SPOOL softkeys for selecting or changing the presently set printer Configuring the System Printer for PV4062 PV4062 F B 3 ...

Страница 166: ...4 150 200 300 600 1800 2400 3200 4800 9600 19200 NNNNNNNNNNNNNNNNNNNNNNN COMMAND Displayed only when PRINTER TYPE is set to HP UX SPOOL This softkey is for changing the HP UX spooling command After selecting this softkey the present spooling command is displayed at the keyboard input line and the following message appears Enter new spooling command with leading in double quotations Enter the new s...

Страница 167: ...the following conditions top margin 0 bottom margin 0 if page numbering is ON then top margin bottom margin page length 0 6 if page numbering is OFF then top margin bottom margin page length 0 8 NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN PAGE NUMBER Turns page numbering ON OFF toggles between ON and OFF NNNNNNNNNNNNNNNNNNNNNNNNNNNNN SAVE DATA Saves con guration data into the le VIEW DATA NNNNNNNNNNNNNNNN...

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Страница 169: ...P 4062UX F System START ERROR 0 Not authorized to use the software Possible Cause Solution The HP 46084A ID Module is not connected or not connected properly Check and connect the ID module properly The codeword is incorrect in the CODEWORD le Check the contents of the CODEWORD le If it is incorrect call the nearest HP Sales O ce The CODEWORD le does not exist Check that the CODEWORD le is located...

Страница 170: ...on le must have following lines PCS_SESSION_ID pcs_ export PCS_SESSION_ID START ERROR 310 Group pcs not registered Possible Cause Solution The customization of etc group le is incorrect Check the contents of etc group le The le must include the following line pcs 13 START ERROR 330 Device file dev pcs hpibxx not found Possible Cause Solution The select code of HP IB interface card is incorrect Che...

Страница 171: ... error message is displayed at a diskless cnode Location Open_hpib Function open Parameter dev rmb hpib27 No such device or Location Open_hpib Function open Parameter dev rmb hpib27 File table overflow Possible Cause Solution The kernel for the diskless cnode is not su cient The device drivers hpib and 98624 are not in the kernel or ndilbuffer is set to 1 Check the kernel con guration using usr li...

Страница 172: ...the PV results For a new le you enter test information which will be the header information for the le If an error occurs while this information is being stored the program aborts and cannot be continued Possible errors and their probable causes are listed as follows where xxxxx is the le name that you speci ed and yyyyy is a temporary le name If an error occurs program aborts list the les that ar...

Страница 173: ...Error when reading from or writing to a le Installation Problems You May Encounter C 5 ...

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