No
Indications and names
Contents and status
How to release
01
Power failure alarm
Power Failure
When a power failure occurs
during operation, the unit will stop
at the operation complete status
when power recovers.
The Power Failure alarm will not
be activated when power is turned
off using the power key during
operation.
Use the [Clr] key to clear errors.
The display will return to the
ordinary screen.
The buzzer, if it is sounding, will
stop.
02
Vapor sensor alarm
Vapor Sensor
When measurement of a vapor
temperature becomes no more
possible during control that
requires the vapor temperature
sensor, the unit will stop at the
operation end status.
The same situation occurs when the
vapor sensor connector is removed
during operation or operation is
started without setting the vapor
sensor.
Use the [Clr] key to clear errors.
The display will return to the
ordinary screen.
The buzzer, if it is sounding, will
stop.
03
Pressure sensor alarm
Pressure Sensor
When measurement of pressure
becomes no more possible during
operation, the unit will stop at the
operation end status.
Use the [Clr] key to clear errors.
The display will return to the
ordinary screen.
The buzzer, if it is sounding, will
stop.
If there is a malfunction in the
vapor sensor,
the same alarm will occur when
operation is attempted.
04
Leak alarm
Leak
The leak alarm valve will open
when the pressure is below 900hPa
measured after cleaning has
finished.
Control output to the connecting
cord (diaphragm vacuum pump
output) is stopped and the
control solenoid valve is closed.
Use the [Clr] key to clear errors.
The display will return to the
ordinary screen.
The buzzer, if it is sounding, will
stop.
05
High pressure alarm
High Pressure
The unit will stop at the operation
complete status when a measure
pressure exceeds 1100hPa during
operation.
Use the [Clr] key to clear errors.
The display will return to the
ordinary screen.
The buzzer, if it is sounding, will
stop.
(Control solenoid valve and leak
valve: close, pump: stop)
-9-
ALARM
(01) Power Failure
Clr
ALARM
(02) Vapor Sensor
Clr
ALARM
(03) Puressure Sensor
Clr
ALARM
(04) Leak
Clr
3-2
Safety function
This product has the following safety functions. When an abnormal situation occurs, take
appropriate measures referring to the “Causes and countermeasures of troubles” on P.46.
Safety unit
Operations
Causes of activation
Over current flew to the PBX type pump output outlet
(vacuum pump output).
※
Dedicated for diaphragm vacuum pump
（
6A or less
）
Fuse
Fuse will blow to shut off power.
Alarm
3-3
Alarm and warning functions
When alarm occurs, the buzzer will sound (automatically stops after five seconds) and the display shows the
description of the alarm as follows.
ALARM
(05) High Pressure
Clr
