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STP-iXA3306 Series Turbomolecular Pump

MT-82E-001-H

Page 21

ST
A

ION

INSTALLATION OF THE STP PUMP

3.1

Precautions before installation

Installation, operation and maintenance must only be executed by personnel who read through this

Manual carefully and have the specific skills to perform installation, operation and maintenance of the

STP pump.

3.1.1

Operating environment

WARNING

To prevent an accident, confirm the characteristics of gases to be used, referring to

the Material Safety Data Sheet (MSDS) you obtain from the gas supplier, and, keep

MSDS and a safety advice of gas supplier.

WARNING

Take measures according to MSDS to prevent an accident when using toxic,

reactive or combustible gases. Dilute the gas to be used with the inert gas controlled
if necessary. And, take measures according to MSDS to prevent an accident caused

by exhaust gas.

CAUTION

Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the

following gases, contact Edwards:

•  Gases including alkaline metals except Li gas.
•  Gases including Ga, Hg, In, or Sn.
•  HBr gas.

Non-corrosion resistant pump cannot use the above gases including chlorine and fluorine system

gases.

Содержание STP-iXA3306B

Страница 1: ...nstruction Manual Copyright 2016 Edwards Japan Limited All rights reserved Printed in Japan Read through the Safety Precautions and each section of this Manual carefully before using the STP pump Keep this Manual in a place where you can quickly access it at any time ...

Страница 2: ...ions Emission Class A EN61000 6 2 2005 Electromagnetic compatibility EMC Generic standards Immunity for industrial environments EN55011 2009 A1 2010 Industrial scientific and medical equipment Radio frequency disturbance characteristics Group1 Class A EN50581 2012 Technical Documentation for the Assessment of Electrical and Electronic Products with respect to the Restriction of Hazardous Substance...

Страница 3: ...15 2 3 Water cooling use condition 16 2 4 Control unit 17 2 5 External appearance of the STP pump 19 2 6 Label affixing positions 20 3 INSTALLATION OF THE STP PUMP 21 3 1 Precautions before installation 21 3 1 1 Operating environment 21 3 1 2 Installation area 23 3 1 3 Bench 24 3 1 4 Insulation test 24 3 2 Unpacking 25 3 2 1 Unpacking the STP pump 25 3 3 Name and function of each part 29 3 3 1 Nam...

Страница 4: ...purge gas 56 4 2 Cooling the STP pump 56 4 2 1 Water cooling method 56 4 3 Baking the STP pump 57 4 4 Before starting the STP pump 58 4 4 1 Confirmation before starting 58 4 4 2 Confirmation of vacuum system 58 4 5 Powering ON 59 4 6 Pump operation 59 4 6 1 Input operation port setting 59 4 6 2 Starting stopping the STP pump 60 4 7 How to start stop the STP pump 62 4 7 1 Starting the STP pump afte...

Страница 5: ...me control checksum 94 5 3 7 Error control 94 5 3 8 Transmission frame in the RS485 multi point connection 94 5 3 9 Control command in the RS485 multi point connection 96 5 3 10 Query command in the RS485 multi point connection 97 5 3 11 Broadcasting command in the RS485 multi point connection 98 5 3 12 Application note 99 5 4 Command specifications 103 5 4 1 Command list 103 5 4 2 ReadMeas 104 5 ...

Страница 6: ...r in the TMS unit for use with the TMS unit 144 7 2 WARNING function 145 7 2 1 WARNING function 145 7 3 Contents of WARNING function 147 7 3 1 First Damage limit 147 7 3 2 Second Damage Limit 147 7 3 3 Pump run time over 147 7 3 4 Pump Overload 148 7 3 5 Imbalance 148 7 4 WARNING function setting 149 7 5 Troubleshooting immediately after failure occurs 150 7 5 1 After power failure 150 7 5 2 After...

Страница 7: ...001 H Page v PAGE v CONTENTS CONTINUED Section Title Page 9 STORAGE AND DISPOSAL 165 9 1 Storage of the STP pump 165 9 2 Disposal 166 10 SERVICE SPARES AND ACCESSORIES 167 10 1 Introduction 167 10 2 Service 167 10 3 Spares 167 10 4 Accessories 168 ...

Страница 8: ...reduced diameter shank bolts 39 22 Methods of securing the STP pump 39 23 Screw holes for securing the base 40 24 Power cable 41 25 Connecting method of the power cable 42 26 Connecting the purge port 46 27 Positions of the cooling water port 47 28 Baking heater installation position 48 29 Configuration of the TMS 50 30 TMS valve connection 52 31 Pump operation method 1 contact input 60 32 Pump op...

Страница 9: ...ing process 100 51 Example of response when the command is sent continuously100 52 Example of command sending during answer data reply 100 53 Example of communication cycle process 101 54 Example of command sending process 102 55 Example of answer receiving process 102 56 Display unit iDT 001 140 57 WARNING output 146 58 Failure output 151 ...

Страница 10: ...put signal pins 65 19 X2 REMOTE input signal pins continued 66 20 X2 REMOTE input signal pins voltage input 68 21 X2 REMOTE input signal pins voltage input continued 69 22 Input operation port setting 71 23 Rotation INHIBIT signal input 72 24 Second speed function 73 25 X2 REMOTE output signal pins 75 26 X2 REMOTE output signal pins continued 76 27 Rated contacts for relays CR1 to CR8 77 28 X3 X4 ...

Страница 11: ...g of WARNING function 149 48 Factory Setting and Variable Range 149 49 Priority of failure signal 151 50 Error List 152 51 Error List continued 153 52 Error List continued 154 53 Error List continued 155 54 Error List continued 156 55 Error List continued 157 56 Troubleshooting with no indication of the FAILURE LED 158 ...

Страница 12: ...STP iXA3306 Series Turbomolecular Pump MT 82E 001 H Page x PAGE x This page intentionally blank ...

Страница 13: ...N Cautions are given where failure to observe the instruction could result minor personal injury in damage to the equipment associated equipment and or process Note Items you must follow during operation and maintenance Throughout this manual page figure and table numbers are sequential The units used throughout this manual conform to the SI international system of units of measurement US equivale...

Страница 14: ... 6 2 EN55011 UL61010 1 2nd Edition Electrical Equipment for Measurement Control Laboratory Use SEMI S2 0310 3 Electromagnetic compatibility This product is a class A product according to EN61326 and a group 1 class A product according to EN 55011 This means that this product does not generate and or use intentionally radio frequency energy in the form of electromagnetic radiation inductive and or ...

Страница 15: ...pecified herein 2 Failure to follow any of the warnings or cautions enumerated in this manual 3 Installation operation or maintenance using parts which are not specified by Edwards 4 Maintenance personnel other than those authorized by Edwards or Service office have disassembled reconditioned or tampered the product 5 Defect resulting from the not specified use of the product 6 When the product is...

Страница 16: ...ct 15 When continuously operated without overhaul after the WARNING indication on the Failure LED of the control unit or the LCD WARNING message of the display unit iDT 001 16 Overhaul and replacement of maintenance parts 1 3 4 Spare parts Touch down bearing Air cooling fan Touch down bearing and air cooling fan should be replaced at Edwards contact Edwards ...

Страница 17: ...rom the gas supplier and keep MSDS and a safety advice of gas supplier WARNING Warn of the danger of the gas with the warning label when the use gas is hazardous chemical material WARNING Secure safety by wearing personal protective equipment when using the gas which might influence damage health In addition take appropriate measure for depending upon the properties of the gas to be used CAUTION N...

Страница 18: ...s of the labels before operation 1 STP pump installation warning label This label describes installation of the STP pump Install the STP pump according to the precautions Install the STP pump according to the precautions of Section 3 INSTALLATION OF THE STP PUMP Figure 1 STP pump installation warning label 2 Hot surface warning label This label instructs operators so as not to touch the hot surfac...

Страница 19: ...ng Figure 3 Heavy product caution label 4 High voltage device caution label The pump and control unit are equipped with a high voltage device This label warns operators to pay attention to the high voltage device at the maintenance and inspection Figure 4 High voltage device caution label 5 Rotational direction instruction label This label describes the rotational direction of the STP pump The STP...

Страница 20: ...ely in the axial direction Gas molecules are pumped from the inlet port to the outlet port by the high speed rotation of the rotor The STP iXA3306 series pump is a series of a magnetically levitated turbomolecular pumps each with the following features 1 Oil free 2 Low vibration 3 High reliability 4 Compact size Integrated control unit 5 Temperature management system 6 Dust and water protection ST...

Страница 21: ...erature If an abnormality error occurs the rotor will stop 4 Compact size Integrated control unit To save space for installation the STP pump mounts the control unit 8 that includes the power supply which converts the alternating input to direct current output In addition the following circuits are integrated the magnetic bearing control circuit the motor drive circuit which drives rotor blade the...

Страница 22: ...n resistant 1 type e g STP iXA3306C B following a pump model name indicates corrosion resistant 1 and high emissivity 2 coating type e g STP iXA3306B V indicates a TMS 3 unit e g STP iXA3306CV 1 Corrosion resistant STP pump with anti corrosive treatment 2 High emissivity coating STP pump with rotor covered with high emissivity coating 3 Temperature Management System TMS maintains the temperature o...

Страница 23: ...The display unit iDT 001 is available as an optional accessory with the STP iXA3306 series The display unit operates the STP pump confirms the pump status or sets various settings refer to Section 6 2 and the Instruction Manual of the Display Unit iDT 001 Display unit iDT 001 ...

Страница 24: ...STP iXA3306 Series Turbomolecular Pump MT 82E 001 H Page 12 INTRODUCTION 1 This page intentionally blank ...

Страница 25: ...cooling TMS unit used Flow rate of purge gas N2 Pa m3 s SCCM 8 4 10 2 1 7 10 2 50 10 Rated speed rpm 27 700 Backup rotational speed 1 rpm Approximately 5 000 Starting time min 10 Stopping time min 16 Noise dB 55 at 27 700 rpm Temperature Management System TMS Available Baking temperature C 120 Lubricating oil Not necessary Installation position Free Cooling method Water cooling Recommended backing...

Страница 26: ...low rate STP iXA3306C Cooling water backing pump Gas Maximum gas flow rate TMS setting value Pa m3 s SCCM 15 to 25ºC 1 300 L min Ar 2 03 1200 70 ºC N2 3 55 2100 10 000 L min Ar 2 03 1200 N2 5 07 3000 Table 2 Maximum gas flow rate STP iXA3306CV 1The maximum gas flow rate is applicable under conditions that N2 or Ar gas is vacuumed continuously and the purge gas flow rate N2 8 4 10 2 1 7 10 2 Pa m3 ...

Страница 27: ...306B Cooling water backing pump Gas Maximum gas flow rate TMS setting value Pa m3 s SCCM 15 to 25ºC 1 300 L min Ar 3 55 2100 70 ºC N2 3 89 2300 10 000 L min Ar 4 23 2500 N2 6 42 3800 Table 4 Maximum gas flow rate STP iXA3306BV 1The maximum gas flow rate is applicable under conditions that N2 or Ar gas is vacuumed continuously and the purge gas flow rate N2 8 4 10 2 1 7 10 2 Pa m3 s 50 10 SCCM is u...

Страница 28: ...fulfills the following conditions Item Specification Port type Rc 1 4 Female Flow rate L min 3 Water temperature C 15 to 35 1 Water pressure MPa kgf cm2 0 3 3 Maximum grain size mm2 0 03 pH 6 5 to 8 0 Water hardness mg L 100 Resistivity kΩ cm 4 to 1000 Turbidity FNU 30 1 Maximum gas flow rate differs according to the cooling water temperature ...

Страница 29: ... 10 Current Ampere Interrupting Capacity AIC A 100 240V AC 50 60 Hz Pollution degree 2 Installation category Ⅱ Motor driving system 3 phase d c brushless motor driver Output frequency under normal operation Hz 462 maximum Battery for clock function Specification Lithium battery 3 V 130 mAhr Model DS9034PCX Maker MAXIM Panel indication LED POWER Green LED FAILURE Red Orange LED ROTATION Green Orang...

Страница 30: ...AL DATA PAG E 18 2 Item STP iXA3306 series Safety function Electromagnetic bearing failure detection STP pump overheat detection Motor driver overload detection Power failure detection STP pump overspeed detection Control unit overheat detection Other failure detection ...

Страница 31: ...242 286 308 281 E 435 435 396 396 396 440 396 435 F 363 363 325 325 325 368 325 364 G 320 320 282 281 282 325 281 321 H 319 319 281 281 281 324 281 320 I 251 251 212 212 212 256 212 251 Figure 7 External appearance of STP iXA3306C V iXA3306B V No Item Description 1 Height of water cooling port IN Rc1 4 2 Control unit 3 Height of the purge port 4 Outlet port flange KF40 5 Screw hole for securing th...

Страница 32: ...bels for the details of the labels 1 to 5 1 STP pump installation warning label 2 Hot surface warning label 3 Heavy product caution label 4 High voltage device caution label 5 Rotational direction instruction label 6 Name plate 7 Company logo 8 WATER IN label 9 WATER OUT label Figure 8 Label affixing positions 1 7 3 5 2 2 6 6 2 4 8 9 2 7 ...

Страница 33: ... Safety Data Sheet MSDS you obtain from the gas supplier and keep MSDS and a safety advice of gas supplier WARNING Take measures according to MSDS to prevent an accident when using toxic reactive or combustible gases Dilute the gas to be used with the inert gas controlled if necessary And take measures according to MSDS to prevent an accident caused by exhaust gas CAUTION Chlorine or fluorine syst...

Страница 34: ...wards Others An area free of exposure to direct sunlight high humidity dust salty air dripping water explosive or flammable gas corrosive gas excessive vibration and sources of electric noise STP pump installation equipment conditions Install the STP pump securely so that foreign materials cannot fall into the STP pump Ex Si wafers or samples are positioned above the STP pump To prevent foreign ma...

Страница 35: ...ion to that for the STP pump see Figure 9 Space for maintenance and inspection Space for connecting cables CAUTION DO NOT bend the cables excessively and beware of any obstacles when installing the STP pump In addition leave enough space to install other cables without bending them excessively Front side Figure 9 Space around the STP pump 1 5 0 ...

Страница 36: ...the customer prepared bench and the vacuum equipment on the floor or peripheral equipment and other equipment in accordance with the customer application NEVER move them while the STP pump is in operation Confirm the dimensions by the external appearance of the STP pump when designing the bench The bolt may not be able to be inserted from the lower side of the inlet port according to the shape of ...

Страница 37: ... the STP pump Use a crane or other appropriate means sufficient enough to withstand the load when lifting the STP pump of 18 kg or more Lift the STP pump with an eyebolt or a similar tool that uses the fitting hole attached to the inlet port flange When lifting the pump use 2 or more ropes see Figure 10 A crane and eyebolts due to lifting operations should withstand the load of five times or more ...

Страница 38: ...igure 11 DO NOT apply face on convex parts such as the outlet port or connectors by ropes Doing so may the pump to fall or deform and damage the parts A crane due to lifting operations should withstand the load of five times or more the weight of the STP pump and rope should be seven time or more When lifting the pump use 2 or more ropes Figure 11 Example of lifting the STP pump horizontal positio...

Страница 39: ...12 Jack up the STP pump When jacking up the bottom of the control unit place the STP pump on the table which is larger than base size Figure 13 A Jacking up the bottom plate Figure 13 B may deform the plate and cause the breakage of internal parts A device due to jacking up the STP pump should withstand the load of five times or more the weight of the STP pump A Base size B Prohibition part of Jac...

Страница 40: ...t in upside down position the STP iXA3306 series can be loft with the eyebolts attached to the screw holes for securing the base see Figure 15 A crane and eyebolts due to lifting operations should withstand the load of five times or more the weight of the STP pump and rope should be seven time or more Use an eyebolt which confirms to ISO03266 When lifting the pump use 2 or more ropes Figure 15 STP...

Страница 41: ...ted to the vacuum equipment at the high vacuum side 2 Outlet port flange Connected to the inlet port side of the backing pump 3 Purge port Introduces a purge gas In order to protect the inside of the STP pump when pumping reactive or corrosive gas gas including hydrogen 4 Cooling water port water cooling unit Connected to the STP pump cooling water pipe 5 Control unit Contains the electronics that...

Страница 42: ... connecter always power off the primary power switch the MAIN POWER to OFF and isolate Lockout Tagout the electrical energy source water and gas and other energy sources on the vacuum equipment 1 MAIN POWER switch 8 OPTION connector X6 2 AC POWER connector X11 9 POWER LED 3 HEATER connector X12 10 FAILURE LED 4 REMOTE connector X2 11 ROTATION LED 5 COM1 connector X3 12 Data LED 6 COM2 connector X4...

Страница 43: ...bus 7 STP LINK connector X5 For the communication cable of the STP Link optional accessory or the display unit iDT 001 optional accessory X5 STP LINK These optional accessories can operate the STP pump confirm the operation state or change various settings 8 OPTION connector X6 For an optional unit optional accessory X6 12 pin TMS valve can be connected 9 POWER LED Green LED Illuminates when 200 t...

Страница 44: ... optional accessory is equipped Slave STP pump is not in data exchange as defined by the Profibus standard 14 Error LED Red LED Functions only when the Profibus optional accessory is equipped ON at the same time as Offline LED Configuration or parameterization error Flashing at 1 Hz Invalid address selected Table 9 Control unit front panel functions continued ...

Страница 45: ...sult in the inadvertent rotation of the STP pump which may result in an accident an electric shock or damage to equipment Moreover an accident caused by water leaks or gas leak may occur CAUTION Use a lifter or the like when installing the STP pump to the vacuum equipment Failure to do so might hurt your back or cause injuries due to occurrence of an accident such as fall A supportive device such ...

Страница 46: ...gn materials falling into the STP pump through the splinter shield may result in product damage Inspect the seals of inlet and outlet port flanges for dirt or oil spots before installing the STP pump to the vacuum equipment Take the following measures for cleaning the seals Clean off with a pure gas Wipe with proper solvent such as alcohol The splinter shield cannot perfectly prevent foreign mater...

Страница 47: ...e 19 STP pump installation positions When installing the STP pump in a horizontal or slanted position it is recommended to install it so that the direction of the outlet port is on a vertical or horizontal plane in the direction of the gravity This makes it possible to reduce the load on the magnetic bearing and the heat generated by the STP pump Figure 20 Positions of the outlet port on the horiz...

Страница 48: ...ecified in this manual The STP pump is a component system when installing to the semiconductor equipment Consider the following when installing to the semiconductor equipment Confirm that electric resistance value between the STP pump and vacuum equipment is set to 0 1 Ω or less after securing the STP pump to the vacuum equipment The generated torque during a pump failure is called Destructive tor...

Страница 49: ...cessary Pump model STP iXA3306C V STP iXA3306B V Flange type ISO320F VG300 VG350 Torque reduction mechanism Equipped optional Not Equipped standard Equipped optional Not Equipped standard Equipped optional Not Equipped standard Destructive Torque kNm 48 1 71 2 48 1 71 2 48 1 71 2 Base 6 positions securing No Yes No Yes No Yes No Yes No Yes No Yes Recommended bolt Shape Standard Standard Standard S...

Страница 50: ...he pump with the recommended bolts as described in Figure 22 according to the installation method used Note that special washers will be required if the pump includes the inlet torque reduction mechanism The washer shape is shown in Figure 21 CAUTION Install the flange securing bolts in the proper position with the special square washer shown in Figure 21 Failure to do so may cause abnormal operat...

Страница 51: ...8 mm 3 Washer B 2 mm 2 5 mm 2 5 mm 2 5 mm 4 Torque reduction mechanism C 35 mm 50 mm 50 mm 50 mm 5 Bolt insert position D 22 mm 24 mm 24 mm 24 mm Figure 21 Bolt position for securing the flange i When the base is not secured ii When the base is secured 1 Recommended fitting bolt for flange 2 Secure the base legs Figure 22 Methods of securing the STP pump 1 2 1 2 5 4 3 ...

Страница 52: ...ng the base use stainless steel securing bolts with a tensile strength class is 70 or more Figure 23 shows the position of the six screw holes for securing the base of the STP pump A Screw holes for securing the base B Position of the screw holes for securing the base Figure 23 Screw holes for securing the base M16 depth 30 mm ...

Страница 53: ... cable to the X11 AC POWER on the control unit front panel as shown in Table 12 Connect the power cable to the main power of the vacuum equipment via a circuit breaker Rated current 10 A Connect the primary power to the UL recognized terminal block of the vacuum equipment Secure the terminals with M4 bolts as the other side of the terminals and cover the terminal block with an appropriate cover re...

Страница 54: ...pe terminal M4 3 Yellow Green 7 Cover 1 4 Clearance min 1 5 mm 8 Terminal block 2 1 Use material flammability UL 94V 0 2 Use the UL recognized terminal block satisfying with the following conditions a Clearance between each terminal 1 5 mm or more b Material flammability UL 94V 0 c The installation category Ⅱ Figure 25 Connecting method of the power cable 3 2 1 4 5 6 7 8 ...

Страница 55: ... Connect the power cable securely to prevent incorrect wiring CAUTION Connect each cable securely with caution avoiding any obstacles DO NOT place heavy objects on the cables or bend them excessively If any problem occurs in cables connectors or terminals the STP pump may not function normally DO NOT apply voltage to each connector pin and DO NOT cause any short circuiting between pins Install cab...

Страница 56: ...direct force to the connectors or terminals If any problem occurs in cables connectors or terminals the STP pump may not function normally DO NOT apply voltage to each connector pin and DO NOT cause any short circuiting between pins Install cables so that personnel are not exposed to risk of tripping or falling Connect the power cable to the X11 AC POWER on the control unit front panel ...

Страница 57: ...urface 2 Use steel or aluminum tubes with a low gas loss to connect the vacuum equipment to the STP pump 3 Take measures for minimizing leakage It is also necessary to degrease the tubes as regularly as possible to keep the gas loss as low as possible 4 There is a recommended backing pump of pumping speed Refer to Section 2 1 STP pump specifications However the pressure at the inlet and outlet por...

Страница 58: ...N2 gas or other gas into the STP pump in order to protect the inside of the STP pump To isolate Lockout Tagout the purge gas N2 introduce a dry N2 gas through the electromagnetic vent valve needle valve or similar valve must be prepared by the customer from the purge port For instructions on how to introduce the purge gas see Section 4 1 2 Note When not introducing the purge gas close the purge po...

Страница 59: ...use condition It is recommended to connect the water cooling pipes according to the direction IN side OUT side in Figure 27 Install a secondly containment for liquids or a water leak detector in the place ex cooling water ports where cooling water may leak Figure 27 shows the position of the cooling water ports Install the valve to isolate Lockout Tagout cooling water Lockout Tagout at your compan...

Страница 60: ...g heater CAUTION Wind the baking heater around the surface of the STP pump tightly If the baking heater is not wound tightly the loose parts will overheat The baking heater is not included in the scope of supply When preparing the baking heater at your company refer to the external appearance on each Instruction Manual of the STP pump before purchasing it Install the baking heater near the inlet p...

Страница 61: ...erforming the TMS valve and TMS heater ON OFF control in order to maintain a constant temperature of the STP pump The control unit is always water cooled Connect the pump and TMS valve according to Figure 30 CAUTION DO NOT install the TMS unit in places with high temperature humidity noise vibration or other unstable environment CAUTION DO NOT apply force to the cables during installation and DO N...

Страница 62: ... STP pump with the TMS Figure 29 shows wiring and piping of two way valve type Refer to Figure 30 for wiring and piping of three way valve type 1 STP pump 5 TMS heater cable 2 TMS heater Built in 6 TMS valve cable 3 TMS valve 7 Power cable 4 Control unit Figure 29 Configuration of the TMS 5 4 7 1 3 2 6 ...

Страница 63: ...cable of the STP iXA3306 series 3 9 4 Connecting the TMS heater cable Insert the TMS heater cable into the connector X12 HEATER connector of the control unit see Figure 17 Control unit Front panel for the position of the connector X12 3 9 5 TMS valve The TMS valve controls the cooling water in order to maintain a constant temperature inside the STP pump The shape of the TMS valve varies according ...

Страница 64: ...e C Three way valve type Figure 30 TMS valve connection Use cooling water which fulfils the conditions in Section 2 3 Water cooling use condition Note When the two way vale is closed cooling water circulating whole device will stop Note Procure and connect the cooling water pipe and affix the electromagnetic cooling water valve at your site The diameter of the valve is Rc1 4 Equipment STP pump STP...

Страница 65: ...ump When the power is shut off the STP pump performs the same as a power failure After backup operation of a power failure the rotor lands on the touch down bearing Consider the following when establishing the EMO circuit CAUTION Unite the exhaust gas system to prevent atmosphere from being introduced into the STP pump when the EMO circuit operates example shut the valve When atmosphere is introdu...

Страница 66: ...STP iXA3306 Series Turbomolecular Pump MT 82E 001 H Page 54 INSTALLATION 3 This page intentionally blank ...

Страница 67: ...keep MSDS and a safety advice of gas supplier WARNING When pumping gases they may remain in the STP pump Introduce a purge gas and then exhaust all gases Residual gases can cause an accident if when the pump is removed Take measures according to MSDS to prevent an accident when using toxic reactive or combustible gases CAUTION Chlorine or fluorine system gases can be used in corrosion resistant pu...

Страница 68: ...edures will need to be addressed Connect the connecting hoses correctly to prevent from water leak Refer to Section 2 TECHNICAL DATA for the TMS unit condition Use clean water as much as possible Cooling water containing foreign materials may corrode or clog the cooling water pipe When the cooling system is clogged with foreign materials clogs may possibly be removed by feeding cooling water rever...

Страница 69: ...ether at the same time To attain a less pressure in a shorter time and reduce the exhaust time bake the vacuum equipment and STP pump When baking the STP pump always cool it to prevent overheating Start baking after cooling is started Set the temperature of the baking heater to 120 C or less DO NOT introduce gases during baking or this will prevent overheating To exhaust the gas discharged from th...

Страница 70: ...sly with the start of the STP pump Open the vacuum valve located at the outlet port flange side after starting the backing pump Note DO NOT open the vacuum valve without operating the backing pump Depending upon the type of the backing pump doing so may cause a reverse flow of oil which could contaminate the inside of the STP pump Note Avoid frequent start stop operations as this may cause the STP...

Страница 71: ...nal accessory or the display unit iDT 001 optional accessory can operate the STP pump via the serial port COM3 X5 STP Link connector When setting the input operation port to the parallel port refer to Section 4 9 Parallel port input output signal When setting to a serial port refer to Section 5 Serial Communication Protocol for information and methods The method of operation with the parallel port...

Страница 72: ...wever when inputting this signal simultaneously with switching ON the STP pump short the circuit between 3 21 for 10 seconds or more Open the circuit between 1 21 2 Short the circuit between 1 3 In this case 21 is not used Open the circuit between 1 3 Table 14 Starting stopping the STP pump using contact input X2 REMOTE 0 3 sec or more Stop Rotation Stop 停止 CLOSE OPEN 1 21 3 21 X2 REMOTE connector...

Страница 73: ... the circuit between 3 1 for 10 seconds or more Connect the 1 pin to 0 V of 12 to 24 VDC Shutoff the circuit between 21 1 2 Supply 12 to 24 VDC to the circuit between 3 1 In this case 21 is not used Shutoff the circuit between 3 1 Table 15 Starting stopping the STP pump using voltage input X2 REMOTE voltage input 0 3 sec or more Stop Rotation Stop 12 to 24VDC 0V 21 1 3 1 X2 REMOTE connector 0V 12 ...

Страница 74: ...f the abnormality error after the ROTATION LED extinguishes and perform the operation shown in Table 16 The FAILURE LED extinguishes and the safety function is released RESET operation Then restart the STP pump For the safety functions and troubleshooting see Section 7 Safety Functions Method Reset operation 1 Short the circuit between 1 22 for 0 3 seconds or more When using voltage input supply 1...

Страница 75: ...00 to 27 700 rpm or under normal operation Steady see Figure 35 FAILURE orange red Warning state Flashing orange The flashing pattern of the LED indicates the type of warning See Section 7 WARNING Function Failure state Flashing or steady red The flashing pattern of the LED indicates the type of failure See Section 7 WARNING Function Table 17 LED Indications for each state ON OFF 2 000 to 10 000 r...

Страница 76: ...trol equipment at your company Note It is recommended to use a remote cable with shield type and connect both terminals to the ground Figure 36 X2 REMOTE connector 4 9 1 Input signal pins Choose contact input signal or voltage input signal When using contact input refer to Table 18 Table 19 and Figure 37 When using voltage input refer to Table 20 Table 21 and Figure 38 The input signal pins functi...

Страница 77: ...ircuits between 1 3 to stop the STP pump Pins for inputting the RESET signal When a safety function operates remove the cause of the abnormality error after confirming the STP pump has stopped When the cause of the abnormality error is removed short the circuits between 1 22 for 0 3 seconds or more to reset the failure signal The FAILURE LED extinguishes Pins for inputting the rotation INHIBIT sig...

Страница 78: ...putting the rotation INHIBIT enable signal The input pins are valid even when input operation port is set to serial port When the pins between 1 2 are short circuited the rotation INHIBIT signal input is enabled Pins for option signal input When pins 1 23 are set from open state to close rotational speed will be second speed in the normal state When pins 1 23 are set from close state to open rotat...

Страница 79: ...B In case of Start 2 Figure 37 X2 REMOTE input signal pins contact input Note COM pins 1 37 pin are isolated from the frame ground Note The input current of remote input signal is approx 5 mA Make sure the minimum applicable load of the relay contact when the remote operation with the relay A B ...

Страница 80: ...s for inputting the STOP signal 1 When 1 above is used to start the STP pump shutoff voltage to the circuits between 21 1 to stop the STP pump 2 When 2 above is used to start the STP pump shutoff voltage the circuits between 3 1 to stop the STP pump Pins for inputting the RESET signal When a safety function operates remove the cause of the abnormality error after confirming the STP pump has stoppe...

Страница 81: ... the pins between 4 1 a parallel port or any of three serial ports from COM1 to COM4 can be selected in the input operation port see Section 5 Pins for inputting the rotation INHIBIT enable signal The input pins are valid even when input operation port is set to serial port When 12 to 24 VDC is supplied to the pins between 2 1 the rotation INHIBIT signal input is enabled Pins for option signal inp...

Страница 82: ...STP iXA3306 Series Turbomolecular Pump MT 82E 001 H Page 70 4 OPERATION A In case of Start 1 B In case of Start 2 Figure 38 X2 REMOTE input signal pins voltage input A B ...

Страница 83: ...ess of the Remote Operation Mode setting When the PORT SELECT IN signal is opened any input operation ports are selectable in the Remote Operation Mode see Table 22 The default setting of the Remote Operation Mode is I O Remote parallel port It can be set via serial communication the STP Link optional accessory X2 REMOTE PORT SELECT IN 4 1 Input operation port Remote Operation Mode setting is I O ...

Страница 84: ...TART operation A the rotation INHIBIT input signal is short circuited B INHIBIT IN Close Open START operation The pump does not accelerate when the START operation is performed A The pump accelerates when the rotation INHIBIT input signal is short circuited B The rotation INHIBIT input signal is opened A during acceleration or normal operation INHIBIT IN Close Open START operation The pump deceler...

Страница 85: ... speed becomes low the STP pump enters BRAKE mode and then decelerates When the rotational speed becomes high the STP pump enters ACCEL mode and then accelerates The STP pump will enter the normal mode when the rotational speed attains within 10 of speed setting NORMAL BRAKE ACCEL NORMAL NORMAL Pump status Speed Set Point Second Speed Set Point Second Speed Set Point 10 Second Speed Set Point 10 S...

Страница 86: ... 4 9 5 Output signal pins Table 25 and Figure 39 The pins function when the input operation port is either in parallel port setting or serial port setting Three abbreviations are used in Table 25 N O OUT Normal Open Output Pin N C OUT Normal Close Output Pin COM Common Pin ...

Страница 87: ...mality error is detected the pins between 14 33 are closed and the pins between 15 33 are opened Pins for outputting the WARNING signal These pins are closed when the STP pump is WARNING state Refer to Section 7 2 Safety Functions for the warning Pins for outputting the parallel port select state signal When the input operation port is set to the parallel port I O REMOTE the pins are closed Pins f...

Страница 88: ...tion Pins for optional signal output In state of the second speed option is ENABLE and second speed is selected the pins between 7 26 are closed and the pins between 7 26 are opened Table 26 X2 REMOTE output signal pins continued Figure 39 X2 REMOTE output signal pins 7 26 OPT N O OUT ...

Страница 89: ...hows the rated contacts for relays CR1 to CR8 in Figure 39 Resistance Load COS Ø 1 Rated Load 30 V DC 0 5 A Rated Current 0 5 A Maximum Contact Point Current 0 5 A Maximum Open Close Capacity DC 15 W Minimum Applicable Load 10 mV DC 10 μA Table 27 Rated contacts for relays CR1 to CR8 ...

Страница 90: ...p to automatically start the TMS unit Power off the STP pump to automatically stop the TMS unit When STP pump is in the power ON state the TMS unit operates regardless of the status of the STP pump When the STP pump is the cause of the malfunction the TMS unit is stopped 4 10 3 Setting the TMS unit function When the temperature of the STP pump base is lower than the setting value the TMS heater is...

Страница 91: ... connecting the user application STP Link optional accessory or the display unit iDT 001 optional accessory see Figure 40 The STP pump is equipped with 3 serial ports COM1 COM2 and STP Link as a standard A serial port located the STP pump is called a serial interface module hereafter referred to as SIM The equipment which can communicate with the STP pump via RS232 RS485 is called a PC Figure 40 S...

Страница 92: ... 2 Serial Port COM2 X4 COM2 connector The serial port COM2 is available for the serial communication via RS485 When using a user application connect it to this port Connect the connector X4 D Sub9 pin socket type to the PC according to Table 28 DO NOT connect other pins which are reserved as optional use However when using the Profibus optional accessory serial communication function is not availa...

Страница 93: ...and X4 are fitted using M2 6 screws The RS232 and RS485 share the X3 COM1 port When connecting RS232 the length of the communication cable should be 15 m or less When connecting RS485 refer to Section 5 2 2 3 Serial Port COM3 X5 STP Link connector The STP Link optional accessory or the display unit iDT 001 optional accessory can be connected to the serial port COM3 ...

Страница 94: ... the shortest Connect the PC of which transmit receive switch time is 5 msec or less Use twisted pair wire in communication cable The extended communication cables should be 1 2 km or less Connect the terminator to the communication devises at both ends of the transmission line The terminator 120 Ω 0 25 W is required for connection STP iXA3306 series does not have terminator setting function PC 7 ...

Страница 95: ...Link optional accessory or the display unit iDT 001 optional accessory Communication parameter Factory setting PC setting example Baud rate 9 600 bps 1 200 to 56 000 bps Bit length 8 bit 7 8bit Stop bit 1 bit 1 2bit Parity None None Even Odd Driver type COM1 RS232 RS485 single RS232 RS485 single RS485 multi COM2 RS485 single RS485 single RS485 multi RS485ID 1 1 1 to 127 1 It is used in RS485 Multi...

Страница 96: ...to Section 4 9 Parallel port input output signal for the details of the X2 REMOTE connector 2 Set the parameter of the Input operation port to the serial port which operates STP pump following Section 5 4 16 The parameter value of the factory setting is I O REMOTE parallel port The Input Operation Port can also be changed via the STP Link optional accessory Input operation port Remark Parallel por...

Страница 97: ...optional accessory see 5 4 17 Design the user application so that the PC can communicate with the STP pump at fixed regular intervals within the setting time except when the function is disabled the value is 0 Default Setting Range Remark Serial communication time out setting 1 minute 0 to 500 minutes 1 minute step The function is disabled when the value is set to 0 Table 31 Serial communication t...

Страница 98: ...ld emitted from a power supply line Shield both ends are grounded by all the cables of connected communication device Clamp the STP pump side shield on a connector hood A ground loop will be made up through both ends grounding Connect between GND of a STP pump and PC with low impedance to prevent ground potential difference SIM Signal line GND PC Signal line GND Low impedance connection to prevent...

Страница 99: ...tion attaching ring ferrite cores to the cable is effective to reduce communication failure Figure 45 Example of ring ferrite core installation Locate and secure the cables It may be difficult to measure the reproducibility of the communication failure without securing the cables Avoid installing a power line and a communication line in the same metallic duct When unavoidable separate a line with ...

Страница 100: ...difference of communication interfaces or static electricity is applied to communication line Communication failure occurs frequently by broken communication interface circuit RS485 is available with communication interface circuit according to the environment but it gets failure easily Check the waveform of the differential signal is normal with measuring instruments such as an oscilloscope D D D...

Страница 101: ...on command transmitted from the PC and sends a response following the communication command Figure 48 1 Each communication command from the PC transmits a text message ASCII text assigned to each function Figure 48 2 Communication commands include control commands STP pump operation commands etc and query commands read out of STP pump operation mode etc 1 Communication command 2 Response Figure 48...

Страница 102: ...cation layer 23 Acknowledgment response 21 Non acknowledgment response Table 32 Transmission control characters 5 3 2 Standard transmission frame The transmission frame has a single block or multiple transmission blocks The transmission block consists of a start control character data block No 3 digits a message up to 255 characters an end control character and a checksum LRC The following table s...

Страница 103: ...character HEX code 20 and succeeding characters are ASCII characters corresponding to the respective function code and parameter Sp CHR C1 C2 Cn CHR Function code character C1 to Cn Parameter Parameter from C1 to Cn serves as 16 bits signed hexadecimal value coded ASCII text When a message a space character a function code and parameter exceeds 255 characters input Sp and CHR to the top transmissi...

Страница 104: ... the control command the 2nd block PC SIM Stx 0 0 2 C254 Cn Etx LRC SIM PC Ack or Nak Always assign less than 510 characters n 510 to the parameter so that the message is less than 512 characters Then the preceding SIM PC character is Ack the instructed control command is executed and the SIM returns the following response PC SIM Ack or Nak SIM PC Stx 0 0 1 or Etx LRC The PC transmits Ack or Nak t...

Страница 105: ...s transmitted at one block and returned at two blocks Designate a query command on the PC Less than 256 chr PC SIM Stx 0 0 1 CHR C1 Cn Etx LRC SIM PC Ack or Nak Always assign less than 254 characters n 254 to the parameter so that the message is less than 256 characters Next the preceding SIM PC character is Ack the instructed query command is executed and the SIM returns the following response 1s...

Страница 106: ... control Transmit the transmission frame repeatedly from the PC when the SIM transmits Nak parity check error When the SIM receives Nak from the PC the transmission frame is transmitted again This operation is repeated up to 5 times The SIM transmits Ack or Nak to the PC after the completion of communication command reception When the PC cannot receive Ack or NaK after 2 second retransmit the tran...

Страница 107: ...nsmission frame when a message is below 255 characters n 255 1 2 3 4 5 6 7 8 8 n 8 n 1 8 n 2 ASCII F1 F2 Stx 0 0 1 C1 Cn Etx LRC is used as a network frame ID character Stx and Etx are used as a start and an end character of the transmission frame respectively Transmission frame when a message exceeds 255 characters n 255 m 255 k the number of transmission blocks First 1 2 3 4 5 6 7 8 8 n 8 n 1 8 ...

Страница 108: ...cks The SIM returns the acknowledgment response character when the control command is processed normally If not the SIM returns the non acknowledgment response character and 3 characters of the non acknowledgment code are added to Transmission frame when data is transmitted to one block a message is less than 256 characters Designate the control command on the PC Less than 256 chr PC SIM F1 F2 Stx...

Страница 109: ... SIM and is arranged in the order specified below The top is HEX code 3F and ASCII characters corresponding to the respective function code and parameter follow CHR C1 C2 Cn CHR Function code character C1 to Cn Parameter Parameter from C1 to Cn serves as 16 bits signed hexadecimal value coded ASCII text When a message a space character a function code and parameter exceeds 255 characters input and...

Страница 110: ...returns the following response 2nd block PC SIM Ack or Nak F1 F2 SIM PC F1 F2 Stx 0 0 2 C254 Cn Etx LRC The PC transmits Ack or Nak then transmits the next command if necessary 5 3 11 Broadcasting command in the RS485 multi point connection The START or STOP of STP pump operation command can be concurrently instructed to all the multi connected SIMs Always assign 0 HEX code 30 30 to network frame ...

Страница 111: ...ication process example The SIM will reply ACK or NAK within approximately 2 seconds after receiving command When there is no reply the SIM may not have received the command In this case resend the command from the tool application before recognizing the process of the communication failure If the problem cannot solve after resending several times make the process of the communication failure on t...

Страница 112: ...y NAK sent when LRC is incorrect value Figure 50 Example of answer resending process When sending the following command before receiving the answer data from the SIM the contents of the answer data and sent command from the SIM will not match In this case stop the communication about approximately 5 seconds to clear all the receiving buffer of the tool application and then start the communication ...

Страница 113: ...Address selection First TMP RS485 multipoint connection Address selection Next TMP Communication cycle end Command sending process Succeeded Answer receiving process Yes This procedure is not necessary if TMP connection number 1 No Yes Yes Yes Yes No No No No RS485 multipoint connection Address check Last TMP Figure 53 Example of communication cycle process ...

Страница 114: ... sending failure No 2 Yes No Yes No Yes Block check k N 1 Acknowledge received ACK received Figure 54 Example of command sending process This procedure is not necessary if N 1 1 When using RS485 multipoint connection also an address is incorrect 2 When using RS485 to communicate send after 1 msec or more progress from block data received 3 When using RS485 multipoint connection send with address d...

Страница 115: ...nd emergency vent valve g ReadEvents Reads the error record Sp h SetSpeedSetPoint Changes the speed set point 1 h ReadSpeedSetPoint Reads the speed set point m ReadModFonctWithWarning Reads the pump operation mode the errors and the warnings being detected ReadMeasValue Reads the TMS temperature motor temperature motor current measured rotational speed and control unit temperature ReadOptionFunc R...

Страница 116: ...d Unit Hz 16 bits hexadecimal coded ASCII Example Measured rotational speed 01C2hex 450 Hz 27 000 rpm Parameter 1 2 ASCII 1 1 1 1 1 1 1 1 1 1 1 1 1 1 0 1 C 2 HEX 30 31 43 32 1 System reservation 5 4 3 Command Function Sends the pump operation commands START STOP and RESET These commands are valid only when being sent to the serial port which is set as the input operation port Refer to Section Sect...

Страница 117: ...ration command Value START 1 STOP 2 RESET 4 Table 35 Pump operation commands Example Pump operation command RESET operation 4 04hex Parameter 1 ASCII 0 4 HEX 30 34 5 4 4 ReadFailMess Function Reads the errors being detected This data is the same data as that of ReadModFonct parameter 2 to 82 Transmission frame PC SIM Stx 0 0 1 F Etx LRC SIM PC Ack PC SIM Ack SIM PC Stx 0 0 1 Sp F Parameter 1 to 81...

Страница 118: ...nsmitted refer to Table 36 and Table 37 The most recent error has the largest parameter number When the number of errors being detected is under the maximum number the value of parameter that is larger than the number of errors being detected is set to 0 Example The number of error 02hex 2 errors Error 1 0Dhex 13 Disturbance Xh Error 2 0Fhex 15 Disturbance Xb Error 3 to 80 00hex No error detected ...

Страница 119: ...45 1 Disturbance X_H 13 System reservation 46 Disturbance Y_H 14 System reservation 47 Disturbance X_B 15 System reservation 48 Disturbance Y_B 16 System reservation 49 Disturbance Z 17 Driver Failure 50 MOTOR Overheat 18 System reservation 51 System reservation 19 System reservation 52 CNT Overheat 2 20 System reservation 53 System reservation 21 System reservation 54 System reservation 22 System...

Страница 120: ...d 4 88 System reservation 74 System reservation 89 System reservation 75 CNT Overheat 3 90 Inordint Current 76 System reservation 91 FAN Trouble 77 System reservation 92 Serial Com Fail 78 2 System reservation 93 System reservation 79 WARNING C U Restart 94 System reservation 80 Table 37 Error message values continued 1 CAUTION or WARNING message It is not a state of failure Refer to Section 7 for...

Страница 121: ...bits hexadecimal coded ASCII Up to 80 errors 1 3 to 82 1 Error 1 8 bits hexadecimal coded ASCII 2 Error 80 1 8 bits hexadecimal coded ASCII 1 The maximum number of errors may differ depending upon the software version of the STP pump It is recommended that an application be designed as variable length data In Revision C the case of the error detection is less than or equal 32 and Parameter length ...

Страница 122: ...f error 02hex 2 errors Error 1 0Dhex 13 Disturbance Xh Error 2 0Fhex 15 Disturbance Xb Error 3 to 80 00hex No error detected Parameter 1 2 3 4 5 6 7 8 9 10 11 ASCII 0 1 0 2 0 D 0 F 0 0 0 0 0 0 0 0 0 0 0 0 0 0 HEX 30 31 30 32 30 44 30 46 30 30 30 30 30 30 30 30 30 30 30 30 30 30 Parameter 12 13 Omitted 68 69 70 71 72 73 74 75 ASCII 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 HEX 30 30 30 30 30 30 30 30...

Страница 123: ...oftware version 4 bits ASCII character Ver 1 2 0120 21 to 24 AMB software version 4 bits ASCII character Ver 3 4 0340 Example Control unit software version 36335F4120312E302020202020202020hex 63_A 1 0 Motor driver software version 0120hex 1 2 DSP software version 0340hex 3 4 Parameter 1 2 3 4 5 6 7 8 9 10 6 3 _ A 1 0 ASCII 3 6 3 3 5 F 4 1 2 0 3 1 2 E 3 0 2 0 2 0 HEX 33 36 33 33 35 46 34 31 32 30 3...

Страница 124: ...ts hexadecimal coded ASCII 22 Control unit running time Unit minute 32 bits hexadecimal coded ASCII 23 Start counter 32 bits hexadecimal coded ASCII Example Control unit serial number 12345 Pump serial number 6789A Pump running time 0000003Chex 60 minutes 1 hour Control unit running time 0000028Chex 652 minutes 10 hours and 52 minutes Start counter 00000064hex 100 times Parameter 1 2 3 4 5 6 7 8 9...

Страница 125: ...M PC Stx 0 0 1 Sp d Parameter 1 to 2 Etx LRC Parameter Item Data format Remarks 1 Speed Set Point Unit Hz 16 bits hexadecimal coded ASCII 2 TMS temperature setting Unit ºC 16 bits hexadecimal coded ASCII Example Speed Set Point 01F4hex 500 Hz 30 000 rpm TMS temperature setting 0046hex 70 ºC Parameter 1 2 ASCII 0 1 F 4 0 0 4 6 HEX 30 31 46 34 30 30 34 36 5 4 9 ReadMotorTemp Function Reads the measu...

Страница 126: ...settings Remote mode TMS function Emergency vent valve Transmission frame PC SIM Stx 0 0 1 f Etx LRC SIM PC Ack PC SIM Ack SIM PC Stx 0 0 1 Sp f Parameter 1 to 4 Etx LRC Parameter Item Data format Remarks 1 Remote mode setting 8 bits hexadecimal coded ASCII Refer to Table 39 2 TMS function setting 8 bits hexadecimal coded ASCII 00hex ENABLE Excluding 00hex DISABLE 3 System reservation 8 bits hexad...

Страница 127: ...Remote mode setting 01hex I O Remote TMS function setting 00hex ENABLE Emergency vent valve setting FFhex DISABLE Parameter 1 2 3 4 ASCII 0 1 0 0 1 1 F F HEX 30 31 30 30 46 46 1 System reservation 5 4 11 ReadEvents Function Reads the Error Record It has the most recent 10 errors that have been detected Transmission frame PC SIM Stx 0 0 1 g Etx LRC SIM PC Ack PC SIM Ack SIM PC Stx 0 0 1 Sp g Parame...

Страница 128: ...hex 13 Disturbance Xh Error Record 3 12hex 18 T Cable Disconnected Error Record 4 to 10 00hex No error recorded Parameter 1 2 3 4 5 6 7 8 9 10 11 ASCII 0 3 0 F 0 D 1 2 0 0 0 0 0 0 0 0 0 0 0 0 0 0 HEX 30 33 30 46 30 44 31 32 30 30 30 30 30 30 30 30 30 30 30 30 30 30 5 4 12 SetSpeedSetPoint Function Changes the Speed Set Point value This value can be changed the range from 13 500 to 27 000 rpm The t...

Страница 129: ...mit it is automatically set to the lower limit Example Speed Set Point 0190hex 400 Hz 24 000 rpm Parameter 1 ASCII 0 1 9 0 HEX 30 31 39 30 5 4 13 ReadSpeedSetPoint Function Reads the Speed Set Point value This value is the same as ReadSetPoint parameter 1 Speed Set Point Transmission frame PC SIM Stx 0 0 1 h Etx LRC SIM PC Ack PC SIM Ack SIM PC Stx 0 0 1 Sp h Parameter 1 Etx LRC Parameter Item Dat...

Страница 130: ...detected 8 bits hexadecimal coded ASCII Up to 79 errors 1 4 to 82 1 Error 1 8 bits hexadecimal coded ASCII 2 Error 79 1 8 bits hexadecimal coded ASCII 1 The maximum number of errors may differ depending upon the software version of the STP pump It is recommended that an application be designed as variable length data In Revision C the case of the error detection is less than or equal 32 and Parame...

Страница 131: ...mage Limit 0004 3 WARNING Imbalance X_H 0008 4 WARNING Imbalance X_B 0010 5 WARNING Imbalance Z 0020 6 WARNING Pump Run Time Over 0040 7 WARNING Pump Overload 0080 8 System reservation 0100 9 System reservation 0200 10 System reservation 0400 11 System reservation 0800 12 System reservation 1000 13 System reservation 2000 14 System reservation 4000 15 System reservation 8000 Table 40 Warning value...

Страница 132: ...e Xh Error 2 0Fhex 15 Disturbance Xb Error 3 to 79 00hex No error detected Parameter 1 2 3 4 5 6 7 8 9 10 ASCII 0 1 0 0 0 C 0 2 0 D 0 F 0 0 0 0 0 0 0 0 0 0 HEX 30 31 30 30 30 43 30 32 30 44 30 46 30 30 30 30 30 30 30 30 30 30 Parameter 11 12 13 14 15 Omitted 70 71 72 73 74 ASCII 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 HEX 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 Parameter 75 76 ...

Страница 133: ...Ack PC SIM 1 Ack SIM PC Stx 0 0 1 Sp Parameter 1 to 9 Etx LRC 1 The HEX code of ASCII character is 5B Parameter Item Data format Remark 1 System reservation 120 bits hexadecimal coded ASCII 2 TMS temperature Unit ºC 16 bits hexadecimal coded ASCII 3 Motor temperature Unit ºC 16 bits hexadecimal coded ASCII 4 System reservation 8 bits hexadecimal coded ASCII 5 Motor current Unit 0 1 A 8 bits hexade...

Страница 134: ... Measured rotational speed 01C2hex 450 Hz 27 000 rpm Control unit temperature 0032hex 50 C Parameter 1 ASCII 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 HEX Parameter 1 2 ASCII 1 1 1 1 1 1 1 1 1 1 1 1 0 0 4 6 HEX 30 30 34 36 Parameter 3 4 5 6 7 ASCII 0 0 1 4 1 1 1 9 1 1 1 1 1 1 0 1 C 2 HEX 30 30 31 34 31 39 30 31 43 32 Parameter 8 9 ASCII 1 1 1 1 1 1 1 1 1 1 1 1 0 0 3 2 HEX 30 30 33 32 1 System reservatio...

Страница 135: ...imal coded ASCII 3 System reservation 48 bits hexadecimal coded ASCII 4 Second Damage Limit Option Enable Disable setting 8 bits hexadecimal coded ASCII 5 First Damage Limit Warning Enable Disable setting 8 bits hexadecimal coded ASCII 6 Pump Runtime Over Warning Enable Disable setting 8 bits hexadecimal coded ASCII 7 Pump Runtime Over Warning Hours setting 100 hours 32 bits hexadecimal coded ASCI...

Страница 136: ...FFhex DISABLE 5 First Damage Limit Warning Enable Disable setting 00hex ENABLE FFhex DISABLE 6 Pump Runtime Over Warning Enable Disable setting 00hex ENABLE FFhex DISABLE 7 Pump Runtime Over Warning Hours setting 0 to 1 000 100 hours 00000000hex to 000003E8hex 8 Imbalance Warning Enable Disable setting 00hex ENABLE FFhex DISABLE 9 Pump Overload Warning Enable Disable setting 00hex ENABLE FFhex DIS...

Страница 137: ...ex ENABLE 9 Pump Overload Warning FFhex DISABLE 10 Pump Overload Warning Motor current 03E8hex 1 000 0 1 11 Pump Overload Warning Rotational speed 0000hex 0 0 1 12 Serial communication time out 003Chex 60 sec Parameter 1 2 3 4 5 ASCII 0 1 F F 1 1 1 1 1 1 1 1 1 1 1 1 0 0 0 0 HEX 30 31 46 46 30 30 30 30 Parameter 6 7 8 ASCII F F 0 0 0 0 0 3 E 8 0 0 HEX 46 46 30 30 30 30 30 33 45 38 30 30 Parameter 9...

Страница 138: ...t setting 8 bits hexadecimal coded ASCII Default 01hex I O REMOTE 2 TMS Option Enable Disable setting 8 bits hexadecimal coded ASCII Default FFhex DISABLE 3 System reservation 48 bits hexadecimal coded ASCII 1 4 Second Damage Limit Option Enable Disable setting 8 bits hexadecimal coded ASCII Default 00hex ENABLE 5 First Damage Limit Warning Enable Disable setting 8 bits hexadecimal coded ASCII Def...

Страница 139: ...flected when a parameter is out of a setting range Example 1 Input operation port 01hex I O REMOTE 2 TMS Option FFhex DISABLE 4 Second Damage Limit Option 00hex ENABLE 5 First Damage Limit Warning 00hex ENABLE 6 Pump Runtime Over Warning FFhex DISABLE 7 Pump Runtime Over Warning hours 000003E8hex 1 000 100 hours 8 Imbalance Warning 00hex ENABLE 9 Pump Overload Warning FFhex DISABLE 10 Pump Overloa...

Страница 140: ... ReadOptionFunc or Fhex 5 4 18 ReadCondition Function Reads the pump model and damage point Transmission frame 1 PC SIM Stx 0 0 1 Etx LRC SIM PC Ack PC SIM 1 Ack SIM PC Stx 0 0 1 Sp Parameter 1 to 4 Etx LRC 1 The HEX code of ASCII character is 7B Parameter Item Data format Remarks 1 Pump model 160 bits hexadecimal coded ASCII 2 System reservation 32 bits hexadecimal coded ASCII 3 Damage point 16 b...

Страница 141: ...arameter 1 S T P i X A 3 3 0 ASCII 5 3 5 4 5 0 2 D 6 9 5 8 4 1 3 3 3 3 3 0 HEX 35 33 35 34 35 30 32 44 36 39 35 38 34 31 33 33 33 33 33 30 Parameter 1 6 ASCII 3 6 2 0 2 0 2 0 2 0 2 0 2 0 2 0 2 0 2 0 HEX 33 36 32 30 32 32 32 30 32 30 32 30 32 30 32 30 32 30 32 30 Parameter 2 3 4 ASCII 1 1 1 1 1 1 1 1 0 0 3 2 1 1 1 1 1 1 1 1 HEX 30 30 33 32 Parameter 4 ASCII 1 1 1 1 1 1 1 1 HEX 1 System reservation ...

Страница 142: ... 7D Parameter Item Data format Remarks 1 The number of Error Record 8 bits hexadecimal coded ASCII 2 The maximum number of Error Record 8 bits hexadecimal coded ASCII Up to 20 for STP iXA3306 3 to 22 Error Record 1 to Error Record 20 80 bits hexadecimal coded ASCII See Error Record Format 1 1 The recent error has the smallest parameter number Error record format Time information of error history h...

Страница 143: ... Pump running time 5 000 minutes control unit running time 6 000 minutes Parameter a b c d ASCII 0 D 0 0 0 0 0 0 1 3 8 8 0 0 0 0 1 7 7 0 HEX 30 44 30 30 30 30 30 30 31 33 38 38 30 30 30 30 31 37 37 30 2 In case of time flag 1 Parameter Item Data format Remarks a Error Code 8 bits hexadecimal coded ASCII 1 b Time flag 8 bits hexadecimal coded ASCII c Error detection time Format yymmddhhnn yy The la...

Страница 144: ...31234hex Sep 13 2007 at 12 34 Error Record 2 Error Code 0Dhex 13 Disturbance Xh Time flag 01hex Detection time is built in clock time Error detection time 0704300659hex Apr 30 2007 at 06 59 Error Record 3 Error Code 12hex 18 MOTOR Overheat Time flag 01hex Detection time is built in clock time Error detection time 0612011508hex Dec 1 2006 at 15 08 Error Record 4 to 20 No error recorded Parameter 1 ...

Страница 145: ...6d ASCII F F 0 0 0 0 0 0 0 0 0 0 0 0 1 1 1 1 1 1 HEX 46 46 30 30 30 30 30 30 30 30 30 30 30 30 Parameter 7a 7b Omitted 21d ASCII F F 0 0 0 0 1 1 1 1 1 1 HEX 46 46 30 30 30 30 Parameter 22a 22b 22c 22d ASCII F F 0 0 0 0 0 0 0 0 0 0 0 0 1 1 1 1 1 1 HEX 46 46 30 30 30 30 30 30 30 30 30 30 30 30 1 System reservation ...

Страница 146: ...ing 0014 3 see 5 4 20 1 Second speed selection 0015 2 see 5 4 20 2 Table 42 Option function number and parameter list 5 4 20 1 Second speed option setting Settings for second speed can be changed CAUTION There is an endurance limit of setting changes no more than 24 times per day for about ten years If this limit is exceeded it not only may become impossible to change the setting but can also caus...

Страница 147: ...13500 rpm Second speed option setting 0000hex DISABLE Parameter 1 2 3 ASCII 0 0 1 4 0 0 E 1 0 0 0 0 HEX 30 30 31 34 30 30 45 31 30 30 30 30 5 4 20 2 Second speed selection The normal rating speed setting or second rating speed setting can be selected in the normal state When using this function set the second speed option to the ENABLE Parameter Item Data format Remark 1 Optional function number 1...

Страница 148: ...see Table 43 2 to n Function items return Optional function number Value Total response parameter n Remark Second speed option setting 0014 4 see 5 4 21 1 Second speed selection 0015 2 see 5 4 21 2 Table 43 Option function number and parameter list 5 4 21 1 Second speed function setting Settings for second speed can be changed Parameter Item Data format Remark 1 Optional function number 16 bits he...

Страница 149: ... 2 HEX 30 30 31 34 30 30 45 31 30 30 30 30 30 31 43 32 5 4 21 2 Second speed select The speed setting set as rotational speed in the normal state can be read Parameter Item Data format Remark 1 Option function number 16 bits hexadecimal coded ASCII 0015 hex 2 Second speed selection 16 bits hexadecimal coded ASCII 0000 hex Normal rating speed setting 0001 hex Second rating speed setting Example Sec...

Страница 150: ...STP iXA3306 Series Turbomolecular Pump MT 82E 001 H Page 138 5 SERIAL COMMUNICATION PROTOCOL This page intentionally blank ...

Страница 151: ...e 44 shows the principal functions See the Instruction Manual of the STP Link for the detailed specification and operating method Item Functions Operating function Start stop and failure reset operation of STP pump Confirmation function Operational state of STP pump Software version Serial number STP pump model Operation hours Number of starts Bearing damage integrated value Error history Option s...

Страница 152: ...ms the pump status or sets various settings The display unit iDT 001 is equipped with an LCD and flat panel switches See the Instruction Manual of the Display unit iDT 001 for the detailed specification and operating methods STP Link BRAKE ACCEL STOP START NORMAL FAILURE POWER UP DOWN ENTER SELECT RESET 65 98 4 132 122 5 Figure 56 Display unit iDT 001 ...

Страница 153: ... the magnetic bearing is maintained at the high rotational speed using the regenerative energy of the rotating rotor backup operation during a power failure The lowest rotational speed to which the magnetic bearing can operate at a power failure is called a backup rotational speed 1 When the rotational speed is approx 5 000 rpm or more at a power failure The STP pump detects any power failure of 2...

Страница 154: ...ction is reset automatically At this time the POWER LED illuminates and the FAILURE LED extinguishes Also POWER OUT pins 9 28 is closed and a failure signal is reset between FAILURE OUT pins 14 33 and 15 33 of the X2 REMOTE connector 2 When the START signal is input after a power recovery the STP pump reaccelerates even while it is in BRAKE state When the START signal is input after a power recove...

Страница 155: ...lashes and a failure signal is output from the X2 REMOTE connector Note When the rotor contacts the touch down bearing contact noise and rotational noise of the touch down bearing are generated from the STP pump 7 1 5 Motor driver overload DRV Overload When the STP pump does not attain the rated speed within approx 30 minutes after starting or when the ACCELERATION state remains unchanged during o...

Страница 156: ...OFF and the cooling water unit is operated The STP pump decelerates and stops Continue to operate the cooling water unit until the temperature of the pump base is reduced at the setting value after the pump stops If the temperature of the STP pump base unit is lower than the setting value by 10 ºC 18 ºF or more due to the occurrence of an abnormality error in the TMS heater or other fault the FAIL...

Страница 157: ...ector The serial communication the STP Link optional accessory or the display unit iDT 001 optional accessory can confirm the error message and change the settings Refer to Section 5 Serial Communication Protocol the STP Link or the display unit iDT 001 Instruction Manual of the optional accessories for details No Warning FAILURE LED indication Priority 1 First Damage Limit Second Damage Limit Tou...

Страница 158: ...mit Second Damage Limit 3 flashes in orange Corresponding to warning type OFF OFF ON ON Close 導通 Open WARNING N O OUT between 6 24 WARNING N C OUT 6 25 Open Close Figure 57 WARNING output Note The WARNING detection cannot be reset by the RESET operation See Section 7 4 WARNING function setting for the releasing the WARNING detection The STP pump can operate even when the WARNING is detected Overha...

Страница 159: ...e accumulation of the damage point attains the setting value by further Disturbance and Power Failure Second Damage Limit detects the warning and a failure at the same time Overhaul the STP pump because the STP pump cannot perform the rotational operation when Second Damage Limit is displayed When operating the STP pump is needed after Second Damage Limit is displayed disable the Second Damage Lim...

Страница 160: ...unction to disable after it is detected The setting can be changed via serial communication the STP Link optional accessory or the display unit iDT 001 optional accessory 7 3 5 Imbalance The STP pump continuously monitors its rotor balance The Imbalance is detected when imbalance of the synchronized rotor with the rotational speed exceeds the setting value When the deposit accumulates in the STP p...

Страница 161: ...n Default setting User setting User setting change threshold Second Damage Limit Failure detection Enable Enable Disable Second Damage Limit Warning detection Enable Disable Disable First Damage Limit Enable Enable Disable Pump Run Time Over Disable Enable Enable Pump Overload Disable Enable Enable Imbalance Enable Enable Disable Table 47 Default setting of WARNING function WARNING function Factor...

Страница 162: ...n disconnecting cables from the STP pump and or the cables to perform troubleshooting and take the necessary action confirm that the STP pump has stopped power off the primary power switch the MAIN POWER to OFF and isolate Lockout Tagout the electrical energy source water and gas and other energy sources on the vacuum equipment Failure to do so may result in the inadvertent rotation of the STP pum...

Страница 163: ...ower Failure Overspeed and other Steady red High 2 MOTOR Overheat CNT Overheat 3 flashes in red 3 DRV Overload 2 flashes in red 4 Disturbance 1 flash in red Low Table 49 Priority of failure signal 1 cycle Disturbance 1 flash in red OFF Failure detection FAILURE LED indication X2 REMOTE output ON DRV Overload 2 flashes in red MOTOR Overheat CNT Overheat 3 flashes in red Corresponding to failure typ...

Страница 164: ...ing pump with the recommended capacity or more Probable causes Excessive vibration applied externally to the STP pump 1 External vibration impact 2 Atmospheric air flows into the STP pump 3 Foreign materials fall into the STP pump 4 Sudden pressure change at start of roughing vacuum by backing pump Abnormal magnetic bearing 1 Control circuit error 2 Disconnection of the internal wiring 1 High pres...

Страница 165: ... 40 C or less 2 Set the cooling water flow rate at 3 L min and cooling water temperature between 15 to 35 3 Replace the air cooling fan Contact Service office Check the vacuum piping system for leakage Check the exhaust sequence Turn OFF the switch to stop the pump and then turn ON the switch again to recover Probable causes 1 Overheating during baking 2 Insufficient cooling 3 Leakage of the vacuu...

Страница 166: ...rol unit Failure of the control unit 1 Short circuit or ground fault in the motor winding 2 Failure of the control unit Failure of the control unit 1 Wear out of the cooling water bearing 2 Failure of the control unit 1 Failure of the STP pump 2 Failure of the control unit Occurrence condition The rotation does not stop after 30 min into brake state Accelerate up to 2000 rpm or less Communication ...

Страница 167: ...r sufficient cooling of the control unit isolate input power supply 3 minutes or more 2 Contact Service office Probable causes Disconnection of the motor temperature sensor Failure of the control unit 1 Power failure 2 Incorrect connection of the power cable 3 Failure of the power cable 4 Failure of the power supply vlotage 1 Insufficient cooling of the control unit 2 Failure of the control unit O...

Страница 168: ...or 1 Insufficient user application setting 2 Disconnection or break of the communication cable 3 Failure of the control unit Failure of the control unit 1 Cooling failure of TMS unit 2 Failure of TMS unit Occurrence condition Power supply circuit failure in control unit Failure of RAM check in MPU Damage point excees setting value Communication failure of the input operation port during accelerati...

Страница 169: ...MS heater 2 Failure of the TMS unit 1 Disconnection of the TMS sensor 2 Disconnection of the external TMS connection cable 3 Failure of the external TMS connection cable 4 Incorrect setting of the TMS function Occurrence condition TMS temperature control error when the TMS unit detection temperature becomes lower than the setting value by 10 C 18 ºF or more Error is not detected for a certain time...

Страница 170: ...tion INHIBIT signal input pins X2 REMOTE 1 5 are opened When not using this function short the circuits between 1 5 or open the circuits between 1 2 of the X2 REMOTE connector 3 Rotation INHIBIT signal does not function correctly Rotation INHIBIT enable signal input pins are opened Short the circuits between 1 2 of the X2 REMOTE connector 4 Insufficient ultimate pressure Failure of the backing pum...

Страница 171: ...or inspections on the STP pump confirm that the STP pump has stopped power off the primary power switch the MAIN POWER to OFF and isolate Lockout Tagout the electrical energy source water and gas and other energy sources on the vacuum equipment Failure to do so may result in the inadvertent rotation of the STP pump which may result in an accident an electric shock or damage to equipment Moreover a...

Страница 172: ... type of the vacuum equipment installed in the STP pump An increase in the amount of deposit may lead to a malfunction of the STP pump Therefore perform regular maintenance once every three to six months as a target Inspect the inside of the outlet port for adhesion of deposit while watching the outlet port If deposit has accumulated to some extent an overhaul cleaning is required Contact Service ...

Страница 173: ...ars Other semiconductor process 2 years Clean application 5 years No gases used only vacuum pumping Other use 2 years Dependent on application contact Edwards 1 Etching includes semiconductor etching and LCD etching Note When First Damage Limit warning or Second Damage Limit warning is detected it is essential to have the touch down bearings replaced regardless of the recommended overhaul interval...

Страница 174: ...arts Part name Recommended maintenance intervals 1 Corrosive gas Inert gas or vacuum pumping only Rotor blades 3 years 5 years Rotor shaft 3 years 5 years Motor sensor electromagnet connector 5 years 7 years Air cooling fan 5 years PCBA in the control unit 7 years Accessories TMS valve 3 years TMS heater 3 years Connection cable 5 years 1 Maintenance intervals of any parts may be shortened dependi...

Страница 175: ...s not been satisfied Edwards will not be responsible for any troubles Always contact Service office before returning the STP pump for repairs overhaul or other purposes To avoid any accident by gases or corrosion inside the STP pump and electrical parts particularly when corrosive reactive or flammable gases have been used Vacuum and hermetically seal the STP pump before transport Specify the type...

Страница 176: ...STP iXA3306 Series Turbomolecular Pump MT 82E 001 H Page 164 MAINTENANCE AND INSPECTION 8 This page intentionally blank ...

Страница 177: ...sed air from one side of the cooling water port so that no water remains in the STP pump 6 DO NOT store the STP pump in the following areas Areas of high humidity if it must be stored in a place of high humidity insulate it from the outside and use a dehumidifying agent Areas prone to temperature extremes High temperatures of no more than 55 C 131 F and low temperatures of less than 25 C 13 F Area...

Страница 178: ...If the STP pump has been used with reactive or corrosive gasses always clean thoroughly before disposing of it to avoid any injury Confirm the characteristics of gas to be used referring to the Material Safety Data Sheet MSDS you obtain from the gas supplier Dispose of the STP pump as industrial waste in accordance with all local and national safety and environmental standards Note Edwards will no...

Страница 179: ...fers a wide range of options including equipment decontamination service exchange repair rebuild and testing to factory specifications Equipment which has been serviced repaired or rebuilt is returned with a full warranty Your local Service office can also provide Edwards engineers to support on site maintenance service or repair of your equipment For more information about service options contact...

Страница 180: ...able Primary input power Standard cable length is 5 m 10 m and 20 m versions are available Contact Edwards for further information TMS unit 1 Control the STP pump temperature TMS heater and TMS valve are included STP Link 1 Windows application for operating or monitoring the STP pump or setting various settings Dedicated communication cable is included 3m Display unit iDT 001 1 Unit for operating ...

Страница 181: ...r more information contact the nearest Service Office Manufacturer Edwards Japan Limited 1078 1 Yoshihashi Yachiyo shi Chiba 276 8523 JAPAN Telephone Domestic 047 458 8853 International 81 47 458 8853 Facsimile Domestic 047 458 8048 International 81 47 458 8048 ...

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