STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 129
SER
IA
L
C
OM
M
U
N
IC
A
T
ION
P
R
OT
O
C
O
L
Example:
1.
Pump model:
5354502D6958413333303620202020202020202020
hex
= STP-iXA3306
3.
Damage point:
32
hex
= 50
Parameter
1
"S"
"T"
"P"
"
–"
"i"
"X"
"A"
"3"
"3"
"0"
ASCII
5
3
5
4
5
0
2 D 6
9
5
8
4
1
3
3
3
3
3
0
HEX
35 33 35 34 35 30 32 44 36 39 35 38 34 31 33 33 33 33 33 30
Parameter
1
"6"
" "
" "
" "
" "
" "
" "
" "
" "
" "
ASCII
3
6
2
0
2
0
2
0
2
0
2
0
2
0
2
0
2
0
2
0
HEX
33 36 32 30 32 32 32 30 32 30 32 30 32 30 32 30 32 30 32 30
Parameter
2
3
4
ASCII
*1
*1
*1
*1
*1
*1
*1
*1
0
0
3
2
*1
*1
*1
*1
*1
*1
*1
*1
HEX
30 30 33 32
Parameter
4
ASCII
*1
*1
*1
*1
*1
*1
*1
*1
HEX
*1 System reservation
Содержание STP-iXA3306B
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Страница 24: ...STP iXA3306 Series Turbomolecular Pump MT 82E 001 H Page 12 INTRODUCTION 1 This page intentionally blank ...
Страница 66: ...STP iXA3306 Series Turbomolecular Pump MT 82E 001 H Page 54 INSTALLATION 3 This page intentionally blank ...
Страница 176: ...STP iXA3306 Series Turbomolecular Pump MT 82E 001 H Page 164 MAINTENANCE AND INSPECTION 8 This page intentionally blank ...