Edwards STP-iXA3306B, Руководство пользователя

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STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 158
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7.6.2 Indication of "FAILURE" LED (green)
If an abnormality/error is detected by self test during the power ON operation, "FAILURE" LED flashes
green. This is the indication of STP pump or control unit failure. Contact Service Office.
7.6.3 No Indication of the "FAILURE" LED
No. Symptom Probable cause Countermeasures
Referred
Section
1 The "POWER"
LED does not
illuminate. Incorrect connection of
power cable Connect the power cable correctly.
Abnormal power voltage Set the input voltage to the rated voltage
±10 %.
Power failure Check whether or not a power failure
has occurred.
2 The
"ROTATION"
LED does not
flash after
performing the
start operation. Failure of the "Input
Operation Port" setting. Set the input operation port correctly.
Rotation INHIBIT signal
input pins (X2 REMOTE
(1)-(5)) are opened. When not using this function, short the
circuits between (1)-(5), or open the
circuits between (1)-(2) of the "X2
REMOTE" connector.
3 Rotation
INHIBIT signal
does not
function
correctly. Rotation INHIBIT enable
signal input pins are
opened. Short the circuits between (1)-(2) of the
"X2 REMOTE" connector.
4 Insufficient
ultimate
pressure. Failure of the
backing-pump. Check the capacity and starting state
(use a backing-pump having more
capacity that we specified).
Leakage of the piping
system. Check the piping system for leakage.
Residual molecules. If the main composition is H
2
or H
2
O,
perform baking; if it is other gases, clean
the inside of the vacuum equipment (If
gases remain inside the STP pump,
contact Service office when it is needed
to be cleaned).
5 Abnormal noise
is generated
while the pump
is rotating External vibration or
impact Remove external vibration so as not to
transmit it to the STP pump.
Table 56 - Troubleshooting with no indication of the "FAILURE" LED