Edwards STP-iXA3306B, Руководство пользователя

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STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 53
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3.10 Connecting to semiconductor equipment
The STP pump is a component system when installing to the semiconductor equipment. Consider
the following when designing the semiconductor equipment.
3.10.1 Connecting to power
The STP pump receives its power from the semiconductor equipment electrical distribution system
via a circuit breaker (Rated current 10 A).
Electrical energy isolation (Lockout/Tagout) is achieved by opening the main disconnect device or
circuit breaker of the semiconductor equipment, thereby removing power from the STP pump.
Provide the equipment with the main disconnect or circuit breaker devices for at least 10,000 A
rms
symmetrical amperes interrupting capacity (AIC).
3.10.2 Emergency off circuit (EMO circuit)
Activation of EMO circuit of the equipment will interrupt electrical power from the STP pump.
When the power is shut off, the STP pump performs the same as a power failure. (After backup
operation of a power failure, the rotor lands on the touch down bearing)
Consider the following when establishing the EMO circuit.
CAUTION
Unite the exhaust gas system to prevent atmosphere from being introduced into the STP pump
when the EMO circuit operates (example: shut the valve). When atmosphere is introduced into the
STP pump, the touch down bearing may not operate normally.
CAUTION
The STP pump rotates for a while after the EMO circuit shuts off the power. Perform a recovery
operation after the STP pump has stopped completely.
CAUTION
Before performing the operation check of the EMO circuit with regular maintenance, stop the STP
pump to prevent damage to the touch down bearing.
Note: Procure the main disconnect device and the EMO circuit at your company.
Use the main disconnect device which is lockable only in the de-energised position.
Locate the main disconnect device and the EMO button in the place where personnel are
readily accessible and are not exposed to any hazards during operation.