Edwards STP-iXA3306B, Руководство пользователя

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STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 34
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3.4.1 Cleaning the seal
WARNING
The wipes used to clean the flange of the pump might become hazardous waste
depending upon the solvent (alcohol). Dispose of the contaminated wipes
appropriately according to the regulations of each national and/or local government.
WARNING
Obey the safety instructions given below and take note of appropriate precautions
when disposing of hazardous waste. If you do not, you can cause injury to people
and damage to equipment.
CAUTION
A splinter shield is attached to the inlet port flange to prevent foreign materials from falling into the
STP pump. Always leave the splinter shield attached during operation.
CAUTION
ALWAYS install the STP pump in such a manner that foreign materials cannot easily fall into it.
Foreign materials falling into the STP pump through the splinter shield may result in product
damage.
Inspect the seals of inlet and outlet port flanges for dirt or oil spots before installing the STP pump to
the vacuum equipment.
Take the following measures for cleaning the seals:

Clean off with a pure gas.

Wipe with proper solvent (such as alcohol).
The splinter shield cannot perfectly prevent foreign materials from falling into the STP pump.
ALWAYS install the STP pump in such a manner that foreign materials cannot easily fall into it (for
example, Si wafers or samples are positioned above the STP pump). If this is not possible, always
attach a shield plate with sufficient conductance above the STP pump to prevent foreign materials
from falling into it. Foreign materials falling into the STP pump through the splinter shield may result
in product damage.
Take care not to scratch the flange of the STP pump.
Check whether or not there are scratches on the surface, before installing the STP pump. If
unsatisfactory, contact Edwards.