Edwards iF1800, Инструкция по эксплуатации

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operation
A533-23-880 Issue C
5 operation
5.1 Introduction
The following sections describe the use of the Pump Display Terminal to operate the iF system. For a description of
the use of an Interface Module or Communications Module accessory to operate the iF system, refer to the instruction
manual supplied with the Module. For a description of the operation of the load-lock pump (if you have connected
the iF system to the load-lock pump through an Interface Module), refer to Section 5.15.
The following sections summarise the use of the menus in the Pump Display Terminal. We refer to menus such as 'the
Setup/Service/Configuration menu'. Refer to Figure 7 or 20: this means that you:

Press the Setup button (7) to select the Setup menu.

Use the up and down buttons (5, 3) to show the Service option and press ENTER (6) to select the Service
menu.

Use the up and down buttons (5, 3) to show the Configuration option and press ENTER (6) to select the
Configuration menu.
We recommend that you fully understand the use of the Pump Display Terminal menus and buttons before you
operate the iF system. Refer to Section 4 which fully defines the menus, the use of the buttons and the display
formats.
Note that you must switch on the electrical supply to the iF system before you can use the Pump Display Terminal.
5.2 Configure the system (optional)
The iF1800 can only be used for loadlock applications. Do not reconfigure the iF1800 for any other applications
If you have a Single Pumpset Monitor connected to the iF system, the Monitor contains three configuration sets which
contain preset configuration values (for example setpoints) for the iF system, for high and low nitrogen dilution
levels. Table 16 shows the nominal flow rates associated with each of these configuration stores.
You can use the Single Pumpset Monitor to download one of these configuration sets to the iF system. Ensure that
you use the correct configuration set for your application; contact your supplier or Edwards for advice before you
download a configuration set.
Table 16 - Configuration store nominal gas flow
Purge Gas Flow
Nominal flow rates (slm)
Low Gas
Configuration Store
High Gas
Configuration Store
Shaft-seals purge 2.0 2.0
Cooling Purge 28.0 28.0
Dilution Purge - 22.0
Exhaust purge - 4.0
Total Purge 31.0 56.0