A533-23-880 Issue C
Page 110
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maintenance
Table 22 - Fault parameters
Parameter
*
*
First digit of a three-digit error number, first two digits of a four-digit error
number, or first three digits of a five-digit error number.
Source/cause of error
1
2
3
4
5
6
7
8
9
10
11
12
14
16
18
20
31
35
39
40
51
53
54
55
56
57
70
111
121
151
152
153
174
176
177
iF system status
Electrical supply voltage
FDP pump current consumption
FDP pump power consumption
FDP pump-motor thermistor
Phase imbalance in FDP pump current consumption
HMB pump current consumption
HMB pump power consumption
HMB pump-motor thermistor
Phase imbalance in HMB pump current consumption
FDP pump status
HMB pump status
Total run hours (since last service)
Total run hours (on process, since last service)
Process cycles (since last service)
Switch-on/off cycles (since last service)
Gas Module status
Gas Module flow transducer: total nitrogen purge flow
Exhaust pressure sensor
Shaft-seals purge pressure transducer
Control Module status
Active Gauge (optional accessory)
HMB pump temperature sensor
FDP pump-motor water manifold surface temperature sensor
iF exhaust temperature sensor (optional accessory)
FDP pump-body thermocouple
temperature FDP high vacuum-stage
Network Interface Module status (optional accessory)
Tool Interface Card status (optional accessory)
Auxiliary Interface Card status (optional accessory)
Gate Valve Closed status
Gate Valve Open status
Inverter speed
Inverter status
HMB pump over-temperature monitor
Table 23 - Fault types
Fault type
*
*
Last two digits of the error number.
Meaning
01
09
10
11
12
13
Digital alarm condition
†
Low warning condition
Low alarm condition
High warning condition
High alarm condition
Device error
‡
†
For example, the gas module flow transducer has drifted outside the valid range
allowed for zeroing.
‡
For example, sensor is not fitted, or is disconnected.
