A533-23-880 Issue C
Page 2
© Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
INTRODUCTION
Material Safety Data Sheets for Edwards supplied chemicals can be attained by contacting Edwards.
1.2
The iF System
The iF system operates at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid
in the pumping chamber(s). This ensures a clean pumping system without back-migration of oil into the system being
evacuated.
The iF1800 system has an FDP200 dry pump with an HMB1800 mechanical booster pump fitted to the inlet of the
FDP200 pump. The FDP200 pump is referred to as the FDP pump and the HMB1800 is referred to as the HMB pump
throughout the remainder of this manual.
Warning -Static sensitive devices
Warning - Heavy object
Warning - Moving parts present
Warning - Use protective equipment
Warning - RF earth (ground)
Warning - Protective earth (ground)
WARNING
The iF system is intended for use on load-lock chamber applications only. The pump is not
configured for process use. Any reference to ’process gas’ in the manual refers to clean process
gas.
