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Hardware Reference  

   

PreciseFlex™ DDR Collaborative Robots 

P/N: PFD0-DI-00010, Rev 5.0.0, April 9, 2022  

 

 

 

66  

Copyright © 2022, Brooks Automation, Inc.  

 

To simplify interfacing, most of the electrical interfaces provided by the robot's embedded PreciseFlex™ 

Controller are available on the Facilities Panel.  These include: 

        

 

Digital input signals

 

        

 

Digital output signals

 

        

 

Ethernet port

 

        

 

MCP / E-Stop/ RS232

 

        

 

RS-485, Belt Encoder, OSSD (Output Safety Switching Device)

 

Each of these interfaces is described in detail in the following sections.  In addition, the robot's slave 
controllers, which are mounted near the motors of the robot, may contain additional interfaces (e.g. inputs 
or outputs).  Please refer to the 

PreciseFlex™

 

GSBP Controllers, Hardware Introduction and Reference 

Manual

 for additional information. 

 

DANGER: 

 The 24 VDC and 48 VDC power supplies are all open frame 

electrical devices that contain unshielded high voltage pins, components 
and surfaces.  

The main AC power should always be disconnected 

before the Rear Z column cover is removed.

 

 

If the pneumatic gripper option is ordered two air lines are routed through the interior of the robot.  At the 
Facilities Panel, these air lines are presented in one-touch push-to-release fittings on the facilities 
panel.  The other end of these lines exit in the Outer Link.  When using these lines, clean, dry external air 
should be provided. 

 

CAUTION:

  The maximum air pressure that can be conveyed by the air 

lines through the robot is 

70 PSI

.  Applying a pressure exceeding this level 

may disconnect interior connections or damage fittings or hoses.  If a higher 
pressure is required, an external air line should be utilized. 

 

E-Stop Connector 

For users that wish to have a hardware E-Stop button, Precise offers an E-Stop Box or a portable 
Hardware Manual Control Pendant that includes an E-Stop button. The E-Stop box can be plugged into 
the 9 pin D-Sub connector in the connector panel in the base casting. The E-Stop box completes a circuit 
from Pin 1 (Estop 1) to Pin 6 (FE Out 1) and from Pin 2 (Estop 2) to Pin 7 (FE Out2) in this connector.  If 
this circuit is not completed it is not possible to enable motor power to the robot.  The FE Out signals 
allow each Estop circuit to be toggled during the CAT3 startup sequence to make sure both circuits are 
working.   If no E-Stop box or Manual Control Pendant is connected, jumpers must be connected between 
these four pins to enable robot motor power.  For those applications where an operator must be inside the 
working volume of the robot while teaching, a second teach pendant with a 3-position run hold switch is 

Содержание PreciseFlex PFDD4

Страница 1: ...PreciseFlex DDR Collaborative Robots Hardware Introduction and Reference Manual P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 PFDD6 PFDD4 ...

Страница 2: ...stem D4 D6 PreciseFlex 300 PreciseFlex 400 PreciseFlex 3400 PreciseFlex 1300 PreciseFlex 1400 PreciseFlex DD4 PreciseFlex DD6 PreciseFlex DDR PreciseFlex G5400 PreciseFlex G5600 PreciseFlex G6400 PreciseFlex G6410 PreciseFlex G6420 PreciseFlex G6430 PreciseFlex G6600 PreciseFlex GSBP Slave Amp PreciseFlex PFD0 PrecisePlace 100 PrecisePlace 0130 PrecisePlace 0140 PrecisePlace 1300 PrecisePlace 1400...

Страница 3: ...re CA 94551 U S A For Technical Support Location Contact Number Website North America 1 510 498 1130 Precise 1 800 447 5007 Toll Free 1 978 262 2900 Local http www preciseautomation com Europe 49 800 000 9347 Toll Free Germany 49 364 176 9999 6 Has Toll Japan 81 120 255 390 Toll Free 81 45 330 9005 Local China 86 21 5131 7066 Taiwan 886 080 003 5556 Toll Free 886 3 5525258 Local Korea 1800 5116 To...

Страница 4: ... Changes Rev 1 1 May 20 2020 Working draft Rev 1 2 Sept 8 2020 Working draft gripper detail added Rev 1 3 Jan 4 2021 Working draft 1 CALPP detail updated 2 PAC file and GPL update changed for Windows 10 3 Added unpacking instructions Rev 1 4 Dec 28 2021 Working draft 1 Environmental spec updated 2 Minor edits Rev 5 0 0 TBD April 9 2022 Working draft first version as Brooks ...

Страница 5: ...njury and damage to the equipment There are four levels of special alert notation used in this manual In descending order of importance they are DANGER This indicates an imminently hazardous situation which if not avoided will result in death or serious injury WARNING This indicates a potentially hazardous situation which if not avoided could result in serious injury or major damage to the equipme...

Страница 6: ...rnet Version 17 Machine Vision Software and Cameras 17 Machine Safety 18 Safety and Agency Certifications 18 Standards Compliance and Agency Certifications 18 Moving Machine Safety 18 Mechanical and Software Limit Stops 19 Stopping Time and Distance 19 Releasing a Trapped Operator Brake Release Switch 20 Collaborative Robot Safety ____________________________________________________ 21 General Inf...

Страница 7: ...r 66 MCP E Stop Interface 67 15 Pin D Sub Signals 67 Digital Input and Output Signals 68 25 Pin D Sub Signals 71 Slave Amplifier GSBP Digital Inputs and Outputs 71 Ethernet Interface 72 RS 232 Serial Interface 73 Gripper Serial Interface for Bar Code and other RS232 devices in Gripper 73 Software Reference___________________________________________________________ 75 Accessing the Web Server 75 Lo...

Страница 8: ... Tensioning or Replacing the Belts in the PFDD4 108 Tensioning the Belts in the PFDD4 Outer Link 108 Replacing the Belts in the PFDD4 Outer Link 109 Replacing the Outer Link Motors or Harmonic Drives in the PFDD6 111 Replacing the Robot Main Controller 112 Replacing the Z axis Slave Controller 114 Replacing the J3 axis Slave Controller 116 Replacing the J4 or Gripper Slave Controller in PFDD4 117 ...

Страница 9: ...ironmental Specifications ______________________________________ 137 Appendix C Spare Parts List__________________________________________________ 138 Appendix D Preventative Maintenance _________________________________________ 140 Appendix E Belt Tensions Gates Tension Meter _________________________________ 141 Appendix F Unpacking the Robot _____________________________________________ 143 ...

Страница 10: ...severe injury For vertical motions the Z speed should be limited to 150mm sec when the robot comes within 100mm of a rigid surface as the effective moving mass in Z is much greater than the effective moving mass in the horizontal plane More detail is provided in the Collaborative Robot section of this manual A number of communications and hardware interfaces are provided with the basic robot These...

Страница 11: ...the operator Web Interface see Control Panels Robot Rayload This is very important prior to entering Free Mode as a drastically incorrect payload can cause the Z axis gravity compensation to be incorrect and thus cause the Z axis to start to move up or sag down until the velocity restrict safety limit cuts in to stop any excessive speed For the 6 axis robot 100 equals 6kg for the gripper and paylo...

Страница 12: ...led explanation These robots have 12 inputs and 8 outputs available at the base connector panel in a 25 pin D subminiature connector and have 2 digital outputs and up to 3 digital inputs available in the outer link when the pneumatic version is ordered A belt encoder input is available on the connector panel These robots are nominally quoted and shipped with a standard ISO flange and a single sole...

Страница 13: ...a positive rotation about the World Z axis The J3 rotary axis elbow rotates the outer link about the J3 axis A positive change in the axis angle results in a positive rotation about the J3 axis When the link is centered it is at its 0 degree joint angle however there is a hard stop at 10 degrees so the link cannot reach the center position The outer link can rotate underneath the inner link allowi...

Страница 14: ...the inner link near the Z axis Depressing this button when 24VDC power is on will release the Z axis brake while the button is depressed It is not necessary for the control system to be operating for the brake release to function the only requirement is providing 24VDC to the controller Care should be taken to support the Z axis when the brake release button is pushed as the axis will fall due to ...

Страница 15: ... separate 48VDC motor power supply DANGER The 24 VDC power supply is an open frame electrical device that contains unshielded high voltage pins components and surfaces These products are intended to be mounted in a cabinet or machine chassis that is not accessible when AC line power is turned on The PFDD robots power supplies have an input range of 100 to 240 VAC 10 50 60 Hz Inrush current can be ...

Страница 16: ...enerate a Back EMF voltage that can pump up the motor voltage bus In order to avoid bus pump up an Energy Dump Circuit is included in the base controller board and connected to the 48 VDC bus Remote Front Panel E Stop Box and Manual Control Pendant For users that wish to have a hardware E Stop button Precise offers an E Stop Box or a portable Hardware Manual Control Pendant that includes an E Stop...

Страница 17: ... input signals 32 isolated digital output signals and one RS 232 serial line An enhanced version of the RIO adds 4 analog input signals a second RS 232 port and one RS 422 485 serial port The Enhanced RIO module is pictured below Machine Vision Software and Cameras The PreciseFlex Controllers support the PreciseVision machine vision system This is a vision software package than can run in a PC Cam...

Страница 18: ...omplete piece of equipment on their own They meet the requirements of these standards EN ISO 10218 1 2011 Robots for Industrial Environments Safety Requirements EN 610204 1 Safety of Machinery Electrical Equipment of Machines EN 61000 6 2 EMC Directive Immunity EN 61000 6 4 EMC Directive Emissions To maintain compliance with the above standards the robot must be installed and used in accordance wi...

Страница 19: ...can be used to quickly halt all robot motions in a controlled fashion when an error is detected A soft E stop is typically generated by an application program under conditions determined by the programmer This function is similar to a Hard E Stop except that Soft E Stop leaves High Power enabled to the amplifiers and is therefore used for less severe error conditions Leaving power enabled is benef...

Страница 20: ...ting for Estop Releasing a Trapped Operator Brake Release Switch Should a hard E Stop be triggered the Z brake will engage and motor power will be disconnected from all motors As the J1 J3 and J6 axes on the PFDD6 and the J1 J3 and J4 axes on the PFDD4 do not have brakes they may be freely pushed by the operator To release the Z brake the operator may press the brake release switch under the inner...

Страница 21: ...ith a final motion at a speed as specified above Collision testing has been performed and certified by TUV pending and a table of collision speeds and forces is provided at the end of this section These robots have extensive safety features as listed in Appendix C of this section including full dual Estop circuitry and a circuit to turn off the 48V motor power supply in addition to the standard am...

Страница 22: ...iew the requirements of 10218 2 2011 which addresses robots in workcells Determining a Machine s Required Performance Level PLr ISO 13849 1 2006 Annex A provides tables and a worksheet to identify a machine s Required Performance Level requirements Figure 1 below shows a flow chart for determining Performance Levels Briefly these are Select S1 for slight injuries normally reversible and S2 for ser...

Страница 23: ... 5 seconds are typically two times the allowable crushing force and therefore typically range from 260 300N Note that there are other well established references for force levels that will not cause injury to humans These include Automotive Power Windows 135N 1 Power Operated Pedestrian Doors 180N 2 Elevator Door Maximum Closing Force 135N 3 Note also that recent studies have shown that it is impa...

Страница 24: ...2127 AG36 Federal Motor Vehicle Safety Standards Power Operated Window Partition and Roof Panel Systems 2 ANSI BHMA A156 10 1999 American National Standard for Power Operated Pedestrian Doors 3 Department of Public Safety Division 40 Chapter 5 Elevators 4 Safe Physical Human Robot Interaction Measurements Analysis New Insights 2010 Sami Haddadin Alin Albu Schaffer Gerd Hirzinger Institute of Robot...

Страница 25: ...gh speed and refers to both cases as quasi static even though they are quite different as the high speed impact will include dynamic forces from the moving mass while the low speed clamping forces will be mainly due to motor torques Robot Testing and Safety Circuits While some robots have 6 or even 7 axes and can move in many directions generally testing can be done in the horizontal plane and in ...

Страница 26: ...afety standards such as ISO 10218 1 often specified a Category 3 control system for these machines see ISO 10218 1 2011 5 4 2 and 10218 2 2011 5 2 2 However these standards now recognize that not all robots are large dangerous machines and include clauses that allow less expensive controllers to be used if a risk assessment justifies this 10218 1 2011 5 4 3 states The results of a comprehensive ri...

Страница 27: ...ntained between the controller and the wireless pendant If this heartbeat connection is lost the robot will stop moving but power will remain on Category 2 soft stop For this test the robot is moved under manual control using a wireless pendant and the wireless router is unplugged The robot should stop While the wireless pendant function supports an Estop it is not recommended to use this function...

Страница 28: ...ff This is a CAT 3 compliant function TUV has verified this fail safe operation 9 Motor overheating Precise controllers have a motor duty cycle monitor which computes the average power level in a motor and shuts down the motor power if a maximum permissible power level is exceeded This can be demonstrated by driving an axis back and forth rapidly enough that the maximum duty cycle is exceeded and ...

Страница 29: ...orative Robot Safety Copyright 2022 Brooks Automation Inc 29 simulator For both vertical and horizontal tests the force gage is fixed for rigid surface testing and floating on a linear bearing rail for free space collision testing Verification of PFDD Collision Force ...

Страница 30: ...icated by the table to avoid trapping an operator against a rigid surface at high speed Workcell Design Recommendations for the PFDD robots Workcell designers are referred to EN ISO 10218 2 2011 for information on designing safe workcells Note especially that even a safe robot when equipped with a tool that renders it dangerous should be protected from contact with an operator For example a robot ...

Страница 31: ...tions in workcell by hand guiding or teach pendant Maximum robot forces under manual control from PFDDR Table 1 are 105N Pausing robot and removing racks from workcell with safety interlocks in workspace Robot is stopped Possible Low Frequency rare Interaction with Robot Untrained operator reaches into workcell while robot is moving and robot collides with operator Maximum free space collision for...

Страница 32: ...PFD0 DI 00010 Rev 5 0 0 April 9 2022 32 Copyright 2022 Brooks Automation Inc So PL is a and even a Category B controller is sufficient given the low speeds and small possible collisions forces involved which cannot injure an operator See 5 2 3 under EN ISO 10218 1 2011 ...

Страница 33: ...Brooks Automation P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 Collaborative Robot Safety Copyright 2022 Brooks Automation Inc 33 Appendix B Table A2 from ISO TS 15066 2016 ...

Страница 34: ...Collaborative Robot Safety PreciseFlex DDR Collaborative Robots P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 34 Copyright 2022 Brooks Automation Inc Table A2 Continued ...

Страница 35: ...Brooks Automation P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 Collaborative Robot Safety Copyright 2022 Brooks Automation Inc 35 Appendix C Safety Circuits for PFDD Robots ...

Страница 36: ...Collaborative Robot Safety PreciseFlex DDR Collaborative Robots P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 36 Copyright 2022 Brooks Automation Inc PFDDR Safety Circuits ...

Страница 37: ...ticles or fluid it is recommended a panel cover splash hood be added to protect the connectors With tape seals and a connector hood the robot is rated at IP52 Without these features the robot is rated at IP11 This robot is not intended for use in a washdown or heavy spray environment Please see the Environmental Specifications in Appendix B for specific environmental limits Facilities Connections ...

Страница 38: ...Installation Information PreciseFlex DDR Collaborative Robots P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 38 Copyright 2022 Brooks Automation Inc System Dimensions All dimensions are in millimeters ...

Страница 39: ...Brooks Automation P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 Installation Information Copyright 2022 Brooks Automation Inc 39 Mounting Dimensions for PFDD Robots Base Alignment Notches ...

Страница 40: ...Installation Information PreciseFlex DDR Collaborative Robots P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 40 Copyright 2022 Brooks Automation Inc Gripper Flange Mount Height PFDD4 ...

Страница 41: ...Brooks Automation P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 Installation Information Copyright 2022 Brooks Automation Inc 41 Gripper Flange Mount Height PFDD6 ...

Страница 42: ...Installation Information PreciseFlex DDR Collaborative Robots P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 42 Copyright 2022 Brooks Automation Inc ...

Страница 43: ...Brooks Automation P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 Installation Information Copyright 2022 Brooks Automation Inc 43 ISO Gripper Flange ...

Страница 44: ...ed thru the pulley However it should be noted that all the wires in the 18 conductor slip ring are consumed by the electric gripper although some of these wires can be configured to route serial or Ethernet signals depending on the slip ring model For the 6 axis version wiring must be routed outside the robot wrist For robots without the electric gripper one or two solenoid valves can be driven fr...

Страница 45: ...wer Requirements The PFDD robots power supplies have an input range of 100 to 240 VAC 10 50 60 Hz The robots are equipped with an IEC electrical socket that accepts country specific electrical cords Power requirements vary with the robot duty cycle but do not exceed 700 watts RMS Typical operating power is 150 to 300 watts RMS ...

Страница 46: ... 25pin Dsub on the connector panel in the base The 12 digital output signals can be individually configured as either sourcing or sinking by software settings in the Web Interface The 8 digital input signals can be configured as either sourcing or sinking individually and the 12 digital inputs can be configured as sourcing or sinking in blocks of 4 by software settings in the Web Interface See sec...

Страница 47: ...Brooks Automation P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 Hardware Reference Copyright 2022 Brooks Automation Inc 47 Schematic System Overview ...

Страница 48: ...Hardware Reference PreciseFlex DDR Collaborative Robots P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 48 Copyright 2022 Brooks Automation Inc Schematic PFD0 Base Controller Block Diagram ...

Страница 49: ...Brooks Automation P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 Hardware Reference Copyright 2022 Brooks Automation Inc 49 Schematic Joint Axis Controller Connectors ...

Страница 50: ...Hardware Reference PreciseFlex DDR Collaborative Robots P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 50 Copyright 2022 Brooks Automation Inc Base Controller Connectors ...

Страница 51: ...Brooks Automation P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 Hardware Reference Copyright 2022 Brooks Automation Inc 51 Gripper and Joint Axis Controller Connectors ...

Страница 52: ...Hardware Reference PreciseFlex DDR Collaborative Robots P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 52 Copyright 2022 Brooks Automation Inc Schematic Slip Ring for 23N Gripper ...

Страница 53: ...Brooks Automation P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 Hardware Reference Copyright 2022 Brooks Automation Inc 53 ...

Страница 54: ...Hardware Reference PreciseFlex DDR Collaborative Robots P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 54 Copyright 2022 Brooks Automation Inc ...

Страница 55: ...Brooks Automation P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 Hardware Reference Copyright 2022 Brooks Automation Inc 55 ...

Страница 56: ...Hardware Reference PreciseFlex DDR Collaborative Robots P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 56 Copyright 2022 Brooks Automation Inc ...

Страница 57: ...Brooks Automation P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 Hardware Reference Copyright 2022 Brooks Automation Inc 57 ...

Страница 58: ...Hardware Reference PreciseFlex DDR Collaborative Robots P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 58 Copyright 2022 Brooks Automation Inc ...

Страница 59: ...Brooks Automation P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 Hardware Reference Copyright 2022 Brooks Automation Inc 59 ...

Страница 60: ...Hardware Reference PreciseFlex DDR Collaborative Robots P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 60 Copyright 2022 Brooks Automation Inc ...

Страница 61: ...Brooks Automation P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 Hardware Reference Copyright 2022 Brooks Automation Inc 61 ...

Страница 62: ...Hardware Reference PreciseFlex DDR Collaborative Robots P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 62 Copyright 2022 Brooks Automation Inc J4 Motor PFDD4 J4 Motor PFDD6 ...

Страница 63: ...Brooks Automation P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 Hardware Reference Copyright 2022 Brooks Automation Inc 63 Wiring for J5 J6 motors 6 axis PFD0 Note J6 motor is 50WT no brake ...

Страница 64: ...Hardware Reference PreciseFlex DDR Collaborative Robots P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 64 Copyright 2022 Brooks Automation Inc Motor 23Nm Servo Gripper ...

Страница 65: ...Automation Inc 65 Facilities Panel The Facilities Panel at the base of the robot and optional linear axis end cap includes System AC input power receptacle 90 to 265VAC Lighted AC on off power switch Connectors for controller input and output signals Two air fittings for 1 8in OD air hoses 75 psi max ...

Страница 66: ...e touch push to release fittings on the facilities panel The other end of these lines exit in the Outer Link When using these lines clean dry external air should be provided CAUTION The maximum air pressure that can be conveyed by the air lines through the robot is 70 PSI Applying a pressure exceeding this level may disconnect interior connections or damage fittings or hoses If a higher pressure i...

Страница 67: ...connect a Manual Control Pendant or E Stop box These signals are provided in a DB9 female connector mounted on the robot s Facilities Panel If a Manual Control Pendant is not connected to the secondary RS 232 port provided in this connector this serial interface can be accessed via a GPL procedure as device dev com2 for general communications purposes Please note that unlike the primary serial int...

Страница 68: ...nput signals at the Facilities Panel in addition to those signals that are available at the Gripper Control Board The input signals can be configured as sinking or sourcing in blocks of 4 by means of a software configuration setting Set DataID 531 DIN sink mode 1 4 5 8 9 12 to configure source vs sink for digital input groups 0 means sourcing 1 means sinking Output signals can be configured indivi...

Страница 69: ...tal output signals in the 25 pin D Sub connector on the facilities panel These output signals can be individually configured as sinking or sourcing by means of a software setting See above As shipped from the factory the output signals are configured as sourcing i e the external equipment must pull down an output pin to ground and the controller pulls this pin to 24VDC when the signal is asserted ...

Страница 70: ...ternately the output signals can be configured as sourcing i e the external equipment must pull down an output pin to ground and the controller pulls this pin to 24VDC when the signal is asserted as true The pin out for the PFDD Digital Input and Output Connector and the corresponding GPL signal numbers are described in the following table ...

Страница 71: ...nput 10 20 10012 Digital Input 12 21 24VDC 22 14 Digital Output 2 23 16 Digital Output 4 24 18 Digital Output 6 25 20 Digital Output 8 User Plug Part No Amp 1658657 1 crimp Pins 22 26AWG 745254 6 Slave Amplifier GSBP Digital Inputs and Outputs For each motor other the base motor there is a slave amplifier which includes 3 sinking analog digital inputs and 3 sourcing digital outputs One digital out...

Страница 72: ...ernet switch automatically detects the sense of each connection so either straight thru or cross over cables can be used to connect the controller to any other Ethernet device Due to limited space on the Facilities Panel only one of the two Ethernet ports is available via an external RJ45 connector This external Ethernet port is typically used to interface the robot to a PC The second Ethernet por...

Страница 73: ...pper Serial Interface for Bar Code and other RS232 devices in Gripper It is possible to connect a bar code reader or other RS232 serial device to the slip ring located in the robot gripper In the GSBP gripper two IO pins have optional assignments based on jumpers For J4 connect pins 2 and 3 to connect Digital Input 1 to pin 6 and connect pins 1 and 2 to connect pin 6 to a line that goes back to a ...

Страница 74: ...ting connector is TE Amp Micro Mate N Lok PN 794617 6 with contacts PN 1 794611 2 It is recommended that 24V bar code readers be used as the 5V supply is very limited Several bar code readers that have been successfully implemented with Precise Robots are the following 1 Keyence SR750 1D and 2D 24VDC supply 200ma 60mm distance 2 Cognex DM50 DM60 DM70 24VDC supply 500ma 45 to 110mm distance 3 Omron...

Страница 75: ...terface may be addressed by opening a browser such as Internet Explorer in a PC that is connected to the robot via Ethernet You must know the IP address of the robot controller Two common IP addresses are 192 168 0 1 and 192 168 0 10 The PC LAN interface address must be configured correctly for example 192 168 0 100 with subnet mask 255 255 255 0 The Web Server Interface will come up with the wind...

Страница 76: ...022 Brooks Automation Inc Click on Control Panels then Operator Control Panel The window below will appear If an application is running the System Running panel will display in green In order to run diagnostics you must stop the application from running Click Stop This will stop the application from running You ...

Страница 77: ...controller is set to the default address 192 168 0 1 Otherwise use your controller IP address This should bring up a window with the following files 2 To load a GPL Project such as CALPP Open the Projects folder and paste the Project folder into this area There may be several other projects programs loaded into this folder which is stored in flash ram in the controller A project folder is a softwa...

Страница 78: ... new cogging compensation tables into the comp file wait 15 seconds and then reboot the controller Updating GPL System Software and Firmware GPL the system software and firmware are now a single file in GPL 5 0 and later may be upgraded in the field To perform an upgrade 1 Obtain the appropriate upgrade software from Precise in the form of a gz file 2 Use the Windows 10 File Explorer NOT the Web E...

Страница 79: ...the pop up window 6 In box 4 click on update GPL Wait until you see the Update Complete pop up Then wait 15 seconds for the flash to store the data then reboot the controller for the new version of GPL to take effect Recovering from Corrupted PAC Files PAC files are configuration files that determine the configuration of the robot for the software including the robot factory calibration data These...

Страница 80: ... possible to get a backup copy from Precise The backup copy will contain the factory configuration and calibration data but will not contain any changes including any new calibration data made after the robot has left the factory In order to allow the controller to recover from corrupted PAC files a set of recovery boot up PAC files is loaded in the system area of the Flash To configure the contro...

Страница 81: ...Brooks Automation P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 Software Reference Copyright 2022 Brooks Automation Inc 81 ...

Страница 82: ...d the Precise 23N Micro titer plate handing gripper This is a light duty gripper with 70mm of travel that is optimized to handle micro titer plates for laboratory automation applications It is designed for very light payloads typically 500 grams or less It is controlled by a dedicated slave amplifier the GSBP amp which is connected through a slip ring in the J4 pulley Other commercial grippers can...

Страница 83: ...tecting if a plate is present during a grip Precise makes this routine available to customers upon request This routine is also available in the Precise Command Server Software Gripper Squeeze Simple Method The 23N gripper spring applies a closing force of approximately 7 Newtons at a finger opening of 103mm which is halfway between a portrait titer plate grip at 83mm and a landscape titer plate g...

Страница 84: ... treated as a feedforward torque these parameters do not affect the spring compensation torque For this case it is more exact to know the exact number of tcnts to oppose the spring at various openings For the portrait mode opening of 83mm it takes 1600 tcnts to oppose the spring For the landscape mode opening of 123mm it takes 2200 tcnts to oppose the spring If the rated torque of the 23N gripper ...

Страница 85: ...tive squeeze torque subtract 1600 tcnts from this value which results in zero tcnts of squeeze force If the value in 12304 is 2700 then the gripper motor is squeezing with 2700 tcnts and the spring is adding 1600 tcnts and the effective squeeze is 4300 tncts or about 18N The exact spring compensation value is stored in field 5 of Parameter 12331 For the best accuracy in determining effective squee...

Страница 86: ...ddresses start with a 5 instead of a 4 For the PFDD6 if a pneumatic or simple DIO controlled electrical gripper is installed and connected to the J6 GDBP the addresses below start with a 6 Pin GPL Signal Number Description 1 400013 Digital Output 1 2 400014 Digital Output 2 3 400015 Digital Output 3 LED Output or TXD select with J7 4 24 VDC output 5 GND 6 410001 Digital Input 1 Pushbutton on some ...

Страница 87: ...ed per below to support the IO signals to drive pneumatic or vacuum solenoids The default gripper configuration for the PFDD4 and PFDD6 is tubing installed to support two solenoids with a single solenoid installed For the PFDD4 this solenoid is installed in the outer link and wired to the J4 GSBP local motor controller digital output 1 The address for digital output 1 on this controller is 400013 ...

Страница 88: ...ommodate fingers up to 50mm in length This gripper can be interfaced to the J4 GSBP controller by using the IO connector on the J4 or J6 GSBP for 24VDC Gnd Digital Output 1 and Digital Output 2 to open and close the gripper The EMI MPPM3210 gripper is similar but only requires a single digital output The IO connector can supply a maximum of 2 5A for 24VDC Contact Precise applications for applicati...

Страница 89: ... ISO 9409 flange on the DDR robots Contact Precise Application Engineering for drawings and models for several grippers In particular the Schunk Grippers have a pigtail coming out the side of the gripper When mounting these grippers on a PFDD4 a special flange adapter with a notch to route the gripper cable back inside the J4 output pulley is required in order to route the cable up to the J4 contr...

Страница 90: ...nSignal As Integer 400013 4 axis or 600013 6 axis Const Dim CloseSignal As Integer 400014 4 axis or 600014 6 axis Public Sub SchunkOpen Move WaitForEOM Signal DIO CloseSignal False Thread Sleep 80 Signal DIO OpenSignal True Thread Sleep 500 End Sub Public Sub SchunkClose Move WaitForEOM Signal DIO OpenSignal False Thread Sleep 80 Signal DIO CloseSignal True Thread Sleep 500 End Sub Public Sub Schu...

Страница 91: ... CloseSignal False Thread Sleep 80 End Sub Ethernet Connector in the Outer Links Both the PFDD4 and the PFDD6 have an Ethernet connector available in the outer link This 6 pin connector contains two twisted pairs that bring 100BaseT Ethernet from the main control board in the base of the robot to the outer link Users may wish to connect a standard Ethernet connector to the Ethernet Pigtail Connect...

Страница 92: ...ting Precise robots and controllers have an extensive list of error messages Please refer to the HTML document Precise_Documentation_Library chm to search for a specific error message and cause Listed below are a few errors that may be generated by hardware failures Symptom Recommended Action System error message generated ESTOP not Enabled Check 9 pin Dsub for Estop jumpers Encoder Battery Low Re...

Страница 93: ...ion If Gripper check for free motion if OK replace slip ring Joint Out of Range The joint actual or commanded position may be beyond the software limit stop Move joint back into range while monitoring virtual pendant or check program for commanded position PAC Files Corrupted See recovering from corrupted PAC Files Physical or audible problem Brown streaks on linear bearing Clean with alcohol and ...

Страница 94: ...g procedure 1 Access the Web Operator Interface to the robot with either Maintenance or Administrator privileges 2 In the Setup menu select Hardware Tuning and Diagnostics then select Absolute Encoder You should see a screen similar to that shown below 3 In the pull down menu at the top right of the screen select the robot axis that was associated with the error and check to see if the Overspeed p...

Страница 95: ... The Encoder Batteries are designed to last for several years with robot power turned off With robot power turned on there is no drain on the battery The battery voltage is monitored by the system The nominal battery voltage is 3 6 volts If the battery voltage drops to 3 3 volts an error message Encoder Battery Low is generated At this level the absolute encoder backup function will still work how...

Страница 96: ... Encoder Battery for the Z axis the user must 1 Turn off power to the robot and remove the AC power plug 2 Remove the curved back cover from the Z column 3 Replace the battery 4 Replace the curved back cover on the Z column To replace the Encoder Battery in the 4 axis outer link the user must 1 Remove the outer link foam cover from the sides of the outer link It is attached with Velcro 2 Remove th...

Страница 97: ...available in the Support area of the Precise website To run Cal_PP the controller must be configured to run GPL programs and Cal_PP must be loaded into the controller s memory See Appendix D Tools Required Calibration Kit with M6 X 40mm dowel 2 M5 X 45mm Socket Head Cap Screws and 2 M5 jam nuts The following describes the procedure for defining the zero positions of the PFDD robot axes using Cal_P...

Страница 98: ...xis brake by pushing on the brake release button under the inner link while supporting the robot arm with your hand and lowering the robot arm gently until it rests on the lower hard stop 5 Install an M6 X 40mm Calibration Pin in the base platter as shown 6 Rotate J3 CCW when viewed looking down until its hard stop 7 Start CAL_PP_XX 8 For the PFDD4 Rotate J4 CCW when viewed looking down until its ...

Страница 99: ...Brooks Automation P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 Service Procedures Copyright 2022 Brooks Automation Inc 99 CALPP Position PFDD4 CALPP Position PFDD6 Step One ...

Страница 100: ...Service Procedures PreciseFlex DDR Collaborative Robots P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 100 Copyright 2022 Brooks Automation Inc CALPP Position PFDD6 Step Two CALPP Position PFDD6 Step Three ...

Страница 101: ...April 9 2022 Service Procedures Copyright 2022 Brooks Automation Inc 101 CALPP Position PFDD6 With Gripper 10 With the CALPP application loaded press Start a Application should start and prompt user to confirm correct robot position for calibration ...

Страница 102: ...ill produce an error as the robot is outside of the soft stop limits 12 Make sure the pin is removed from the base rotation plate 13 Enable power and home the robot Calibration does not take effect until the robot is homed Replacing Belts and Motors The timing belts and harmonic drives may need service after 20 000 hours depending on the payload and duty cycle The motors are designed to last the l...

Страница 103: ...s access to the AC power terminals Tools Required 1 Gates Sonic Belt Tension Meter Model 508C 2 2 0mm hex driver or hex L wrench 3 4 0mm hex ball end driver To adjust tension in the 1st Stage Belt the user must 1 Turn off robot power and remove the AC power cord 2 Remove the curved rear cover of the robot 3 Loosen the 4 M5 locking screws on the J1 Motor Mount Bracket to allow the Mount Bracket to ...

Страница 104: ... Inc Tensioning the 2nd Stage Belt DANGER Before tensioning the timing belts or replacing any motors the AC power should be disconnected Removing the rear cover allows access to the AC power terminals Tools Required 1 Gates Sonic Belt Tension Meter Model 508C 2 2 0mm hex driver or hex L wrench 3 3 0mm hex driver 4 4 0mm ball end hex ...

Страница 105: ...the belt tension access hole and the tension screw As an alternative the top cover and front cover may be removed to access the stage 2 timing belt from the front of the robot This is the easier method if tape seals are not installed 5 Adjust the second stage Z belt tension per Appendix E tighten clamping screws and replace parts It may be helpful to move the carriage upwards on the taller robots ...

Страница 106: ...t 1 Turn off the robot power and remove the AC power cord 2 Remove the curved rear cover from the Z column 3 Remove the Z motor heat sink if installed 4 Loosen the M5 Z motor bracket clamping screws and release the tension on belt with the M5 tension screw 4 If present remove the tape seal brackets It may be necessary to release the tension on the tape seals first In this case slide the top plate ...

Страница 107: ...elt tension per above replace parts 7 Recalibrate robot Replacing the Z column Stage Two Timing Belt DANGER Before replacing the power supplies the AC power should be removed Tools Required 1 2 0mm hex driver 2 3 0mm hex L wrench 3 3 0mm hex driver 4 4 0mm ball end hex driver Spare Parts Required 1 J2 Stage One Belt PN PFD0 MC X0003 500mm 1000mm 1420mm stroke The user must 1 Move the Z carriage to...

Страница 108: ... of the Z carriage 6 Support the Z carriage and links with a stick boxes or other means to prevent it from dropping when the belt clamp is removed 7 For the 500mm Z travel robot remove the 48VDC power supply 8 Remove the Z belt clamp which should be accessible through the access cutout in the Z extrusion change the Z belt and replace the clamp 9 Tension the Z belt per above 8 Replace parts 9 Recal...

Страница 109: ... the robot power and remove the AC power cord 3 Remove the foam side cover on the outer link and the foam bottom cover These are attached with Velcro 4 Remove the sheet metal bottom cover 5 For stage 1 loosen the 3 M4 clamping screws and the locknut on the tension set screw adjust tension per Appendix E and tighten screws 6 For stage 2 loosen the M4 clamping screw and locknut on the tension screw ...

Страница 110: ...m covers per above to access the belts 2 For the Stage One Belt loosen the M4 clamping screws release the belt tension with the tension set screw and replace the belt 3 For the Stage Two Belt remove the Stage One Belt per above then release the belt tension 4 Remove the retaining ring that retains the large idler pulley remove the idler pulley 5 Pulley the Stage Two Belt up over the idler pully sh...

Страница 111: ...FDD6 are not items that can be replaced in the field There are two major subassemblies in the DD6 outer link These are the J5 J6 assembly and the J4 assembly These are factory replacement items In order to replace one of these assemblies in the PFDD6 the user must 1 Remove the foam covers from the outer link including J4 and J5 2 Remove the J5 cover plate from the J5 J6 axes 3 Unplug the J4 to J5 ...

Страница 112: ... Robot Controller the AC power should be removed Tools Required 1 2 5mm hex driver or hex L wrench 2 2 0mm hex driver or hex L wrench 3 5 0mm socket driver Spare Parts Required for main robot controller 1 PreciseFlex PFD0 Controller PN P N PFD0 EA 00001 Prior to replacing the controller if the controller will boot up the user may wish to make copies of both the robot PAC files config directory any...

Страница 113: ...at head screws 3 Remove main robot controller PFD0 EA 00001 by removing 3 M3 X 8 SHCS and the D Sub standoffs from the connector side of the panel 4 Replace the controller and connect the wires as shown above 5 Replace the connector panel 6 Reload the robot PAC files config directory any project files projects directory and the Sys files sys directory from a PC These files can be copied using ftp ...

Страница 114: ...x driver 2 2 5mm hex driver Spare Part Required G6X0 EA 00202 with thermal pad To replace the Z axis Slave Controller the user must 1 Turn off the robot power and remove the AC power cord 2 Remove the curved read cover from the Z column 3 Remove the Gripper Controller by removing 4 M3 X 10mm SHCS and unplugging the cables 4 Replace the Slave Controller and re attach the harness 5 Set the jumpers c...

Страница 115: ...Brooks Automation P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 Service Procedures Copyright 2022 Brooks Automation Inc 115 ...

Страница 116: ... To replace the J3 axis Slave Controller the user must 1 Turn off the robot power and remove the AC power cord 2 Remove the LED light tower cover by pulling up on the light section to release magnets 3 Remove the LED light tower body by removing 4 M3 X 40 SHCS Unplug LED pigtail 4 Replace the Slave Controller and re attach the harness 5 Set the jumpers correctly for the address and termination 6 R...

Страница 117: ...e Part Required 1 G6X0 EA 00202 for J4 axis 20A differential encoder 2 G6X0 EA 00101 for Gripper 10A single ended encoder To replace the J4 axis Slave Controller in the PFDD4 the user must 1 Turn off the robot power and remove the AC power cord 2 Remove the foam side cover from the outer link It is attached with Velcro 3 Remove the foam top cover from the outer link It is attached with Velcro 4 Re...

Страница 118: ...DR Collaborative Robots P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 118 Copyright 2022 Brooks Automation Inc 6 Set the jumpers correctly for the address and termination 7 Recalibrate the robot 8 Replace the covers GSBP for J4 Axis PFDD4 ...

Страница 119: ...nd Slip Ring in PFDD4 DANGER Before replacing any Controller the AC power should be removed Tools Required 1 1 5mm hex driver 2 2 0mm hex driver 3 2 5mm hex driver Spare Part Required 1 23N Servo Gripper with Spring Return PF0S MA 00001 2 Slip Ring for 23N Servo Gripper with Spring Return PF04 MA 00010 To replace the 23N Servo Gripper or Slip Ring in the PFDD4 the user must ...

Страница 120: ...e foam top cover from the outer link It is attached with Velcro 4 Remove the sheet metal cover from the outer link 5 Remove cover slip ring and mount slip ring 6 Remove 6 M2 X 10 SHCS to release gripper then unplug slip ring connectors in gripper 7 At this point you may replace the gripper or the slip ring 8 Reassemble parts be careful not to pinch the slip ring cable it fits in notch in flange 9 ...

Страница 121: ... 3mm hex driver 2 2 5mm hex driver 3 7mm open end wrench 4 Loctite 222 Spare Parts Required Spring and Cable Assembly PN XX To replace the spring or cable the user must 1 Remove the Gripper Cover by removing 4 or 6 M2 X 6mm FHCS depends on model 2 Remove the spring cab le assembly by removing the M3 screws shown below 3 Replace the spring cable assembly and replace the cover ...

Страница 122: ... L wrench 2 1 5mm stubby hex L wrench Spare Parts Required none To adjust the gripper backlash the user must 1 Remove the Gripper Cover by removing 6 M2 X 6mm FHCS 2 For grippers with spring return disconnect one end of the spring to remove spring tension 3 Move the racks back and forth to determine which rack has backlash and where it is located on the rack 4 Loosen the 2 M3 X 8 SHCS clamping the...

Страница 123: ...tion Inc 123 5 Adjust the M2 SHCS and M3 set screws to adjust the rack backlash or center the racks as needed if a crash has caused the racks to skip teeth or come loose 6 Remove the 2 M3 X 8 SHCS one at a time apply Loctite 243 screwlock reinstall and tighten Gripper racks centered in fully closed position ...

Страница 124: ...e Main Robot Harness is typically only performed at the factory The Main Robot Harness is intended to last for the life of the robot Replacing the J3 Clock Spring Harness to the J4 Motor Tools Required 1 2 0mm hex driver 2 2 5mm hex driver Spare Parts Required J3 Clock Spring Harness PN PFD0H MA 00021 To replace the harness the user must 1 Remove the LED light tower and J3 Slave Controller per ins...

Страница 125: ...e PFDD4 unplug the end of the clockspring harness from the J4 slave controller in the outer link then remove the outer link from the J3 spacer by removing 6 M5 X 12 SHCS 4 For the PFDD4 remove the harness clamp from the J3 output flange to release the outer link end of the harness 5 For the PFDD6 simply remove the J4 foam end cover and unplug the J4 end of the clockspring harness from the J4 slave...

Страница 126: ...Service Procedures PreciseFlex DDR Collaborative Robots P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 126 Copyright 2022 Brooks Automation Inc ...

Страница 127: ...tor will interfere with the harness 8 Replace parts 9 For the PFDD4 it will be necessary to recalibrate the robot as the J4 encoder was disconnected from the battery backup when the outer link was removed 10 For the PFDD6 it is not necessary to recalibrate the robot as the J3 encoder is a single turn absolute encoder and the J3 slave amp does not require an external battery Replacing the J4 to Gri...

Страница 128: ...not necessary to recalibrate the robot Replacing the J4 slave controller in the PFDD6 Tools Required 1 2 0mm hex driver 2 2 5mm hex driver 3 5 0mm hex socket driver Spare Parts Required 1 Slave controller PN G6X0 EA 00202 for J4 axis 20A differential encoder To replace these items the user must 1 Remove the foam end cover from J4 and the bottom cover from J4 2 Remove the J4 controller mount plate ...

Страница 129: ...6 Controller Harness OR the J5 OR J6 slave controller in the PFDD6 Tools Required 1 2 0mm hex driver 2 2 5mm ball end hex driver Spare Parts Required 1 Harness PN PFD0H MA 00016 2 Slave controller PN G6X0 EA 00202 for J4 axis 20A differential encoder To replace these items the user must 1 Remove the foam side cover from J5 the foam end cover from J4 and the J5 cover plate ...

Страница 130: ...Service Procedures PreciseFlex DDR Collaborative Robots P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 130 Copyright 2022 Brooks Automation Inc ...

Страница 131: ...Brooks Automation P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 Service Procedures Copyright 2022 Brooks Automation Inc 131 ...

Страница 132: ...ervice Procedures PreciseFlex DDR Collaborative Robots P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 132 Copyright 2022 Brooks Automation Inc J5 Slave Controller GSBP Jumpers J6 Slave Controller GSBP Jumpers ...

Страница 133: ...ss for this operation then removed 7 Plug the new harness into the J5 slave controller then re attach the J5 slave controller to the J5 side wall 8 The J5 and J6 slave controllers can be replaced with this same procedure 9 Replace the J5 side cover and other parts Be sure the encoder battery harness is plugged in to the encoder battery pigtail coming J6 controller battery daisy chain connector 10 ...

Страница 134: ...Service Procedures PreciseFlex DDR Collaborative Robots P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 134 Copyright 2022 Brooks Automation Inc ...

Страница 135: ... CONTROLLERS PreciseFlex PFD0 PreciseFlex GSBP Slave Amp Interfaces General Communications RS 232 channel 100Mb Ethernet Digital I O Channels 12 optically isolated inputs and 8 isolated outputs available on facilities panel at base Remote I O also available Pneumatic Lines Two air lines 75 PSI maximum provided at outer link and routed internally to fittings on the Facilities Panel Operator Interfa...

Страница 136: ...LE PRECISEFLEX CONTROLLERS PreciseFlex PFD0 PreciseFlex GSBP Slave Amp Interfaces General Communications RS 232 channel 100Mb Ethernet Digital I O Channels 12 optically isolated inputs and 8 isolated outputs available on facilities panel at base Remote I O also available Pneumatic Lines Two air lines 75 PSI maximum provided at outer link and routed internally to fittings on the Facilities Panel Op...

Страница 137: ...ations General Specification Range Features Indoor use only Ambient temperature 4ºC to 40ºC Storage and shipment temperature 25ºC to 55ºC Humidity range 10 to 90 non condensing Altitude Up to 3000m Voltage 100 240VAC 10 50 60Hz Mains cord rating min 16AWG 3 conductor 10 Amps min Pollution Degree 2 Approved Cleaning Agents IPA 70 Ethanol 30 water H2O2 Vapor up to 1000ppm IP Rating with Tape Seal Op...

Страница 138: ...ntroller GSBP 20A with motor connector pigtail and thermal pad for Z G6X0 EA 01202 Slave Controller GSBP 20A no thermal pad G6X0 EA 00202 Slave Controller GSBP 10A single ended for 23N grip G6X0 EA 00101 J4 400W Motor for PFDD4 with pulley PFD0 MA 00029 Assy J4 HD PFD0 Contact Applications Assy J5 J6 HD PFD0 Contact Applications PF400 23N Servo Gripper with Spring without fingers PF0S MA 00001 J3 ...

Страница 139: ...Brooks Automation P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 Appendix C Spare Parts List Copyright 2022 Brooks Automation Inc 139 ...

Страница 140: ...Procedure If Problem Detected Check all belt tensions Re tension if necessary Check air harness tubing in elbow if present and theta axis for any wear Replace if necessary Check second stage long Z belt for any squeaking If noisy add thick grease to front and rear edge of belt if necessary Shell 222 XP or similar Z timing belt can get stiffer over time 2 3 years and occasionally start squeaking ag...

Страница 141: ... meter 1 Turn on the power 2 Press the Mass button and enter the belt mass from the table below 3 Press the Width button and enter the belt width from the table below 4 Press the Span button and enter the belt free span from the table below 5 Press Select to record the data 6 Press Measure to take a tension reading 7 Place the microphone near the belt typically within 3mm or so Gently pluck the be...

Страница 142: ...Appendix E Belt Tensions Gates Tension Meter PreciseFlex DDR Collaborative Robots P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 142 Copyright 2022 Brooks Automation Inc ...

Страница 143: ...Brooks Automation P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 Appendix F Unpacking the Robot Copyright 2022 Brooks Automation Inc 143 Appendix F Unpacking the Robot ...

Страница 144: ...Appendix F Unpacking the Robot PreciseFlex DDR Collaborative Robots P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 144 Copyright 2022 Brooks Automation Inc ...

Страница 145: ...Brooks Automation P N PFD0 DI 00010 Rev 5 0 0 April 9 2022 Appendix F Unpacking the Robot Copyright 2022 Brooks Automation Inc 145 ...

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