Amtech TEMPRESS, Руководство пользователя

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PROCESS DESCRIPTION
P
ROCESS
M
ANUAL
4.2-7
76
Alarm limit setting for Gas SIH4REAR [3] at 10 % ( ± 30.0 ) Variable Command:
No
77
Branch on gas/pressure SIH4DOOR [2] to step EVACUATE. Sonalert alarm Yes
78
Branch on gas/pressure SIH4REAR [3] to step EVACUATE. Sonalert alarm Yes
79
13 DEPOSITION
80
Message DEPOSITION [13]. Sonalert alarm No
81
Time: [000:30:00] (hr:min:sec) Variable Command: Yes
82
Alarm limit setting for Gas PRESSURE [8] at 5 % ( ± 0.0 ) Variable Command: No
83
Branch on gas/pressure SIH4DOOR [2] to step EVACUATE. Sonalert alarm Yes
84
Branch on gas/pressure SIH4REAR [3] to step EVACUATE. Sonalert alarm Yes
85
Branch on gas/pressure PRESSURE [8] to step EVACUATE. Sonalert alarm Yes
86
14 EVACUATE
87
Message EVACUATE 3 [10]. Sonalert alarm No
88
Time: 000:05:00 (hr:min:sec) Variable Command: No
89
Gas N2 [1] at 0.0 [slm] Variable Command: No
90
Gas SIH4DOOR [2] at 0.0 [sccm] Variable Command: No
91
Gas PRESSURE [8] at 0.0 [mtor] Variable Command: No
92
Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIL1[12] = OFF,EVACSIL2[13] = OFF,EVACSIL3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
93
Alarm limit setting for Gas SIH4DOOR [2] at 0 % ( ± 0.0 ) Variable Command: No
94
Alarm limit setting for Gas SIH4REAR [3] at 0 % ( ± 0.0 ) Variable Command: No
95
Alarm limit setting for Gas PRESSURE [8] at 1 % ( ± 0.0 ) Variable Command: No
96
Wait for gas PRESSURE [8]
97
15 PURGE
98
Message PURGE [12]. Sonalert alarm No
99
Time: 000:05:00 (hr:min:sec) Variable Command: No
100
Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIL1[12] = OFF,EVACSIL2[13] = OFF,EVACSIL3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
101
16 EVACUATE
102
Message EVACUATE 3 [10]. Sonalert alarm No
103
Time: 000:05:00 (hr:min:sec) Variable Command: No
104
Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIL1[12] = OFF,EVACSIL2[13] = OFF,EVACSIL3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
105
17 READY
106
Message STANDBY [1]. Sonalert alarm No
107
Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIL1[12] = OFF,EVACSIL2[13] = OFF,EVACSIL3[14] =
OFF,SOFTSTRT[15] = OFF,MAINVAC[16] = ON Variable Command: No
108
Wait for operator
109
18 BACKFILL 1
110
Message BACKFILL [14]. Sonalert alarm No
111
Time: 000:01:00 (hr:min:sec) Variable Command: No
112
Gas N2 [1] at 0.0 [slm] Variable Command: No
113
Gas SIH4DOOR [2] at 0.0 [sccm] Variable Command: No
114
Gas PRESSURE [8] at 0.0 [mtor] Variable Command: No
115
Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIL1[12] = OFF,EVACSIL2[13] = OFF,EVACSIL3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = OFF Variable Command: No
116
Alarm on digital in PRESS N2[1] = ON,PRESSAIR[2] = ON,doorclsd[3] =
ON,VACFAIL[4] = OFF,,,TEMP SCR[7] = ON,EXCESS[8] = ON
117
Abort recipe 08