OPERATION INSTRUCTIONS
P
ROCESS
M
ANUAL
5.Operation Instructions
This document describes the various procedures required for a process engineer. The
procedures describe all information according to the process engineers.
5.1 Load or Unload process wafers
Loading and unloading process wafers on the paddle is required before and after each process
run.
5.1.1
Load process wafers
•
Place the wafers on the wafer carriers, depending on the situation with (vacuum)
tweezers or a wafer transfer system.
•
Pick-up wafer carriers with a pick-up fork or automated loading tool.
•
Place the wafer carriers around the center of flatzone as indicated on the
loadstation.
5.1.2
Unload wafers
CAUTION
Wafers and paddle are hot.
•
Allow the wafers to cool down.
•
Pick-up wafer carriers with a pick-up fork or automated loading tool. (Amtech
Systems
S300
)
•
Remove the wafers from the wafer carriers, depending on the situation with
(vacuum) tweezers or a wafer transfer system.
5.1-1
