Amtech TEMPRESS, Руководство пользователя

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TABLE OF CONTENTS
P
ROCESS
M
ANUAL
I
Preface ..................................................................................... V
Tempress documentation set................................................................. V
User Definition ...................................................................................... VI
Notes, Cautions and Warnings ............................................................ VII
Contents description ........................................................................... VIII
Revision History .................................................................................. VIII
1. Introduction .......................................................................1-1
1.1 General ..................................................................................... 1-1
1.2 Process engineer area description............................................ 1-2
2. Safety .................................................................................2-2
2.1 Emergency Off (EMO) .............................................................. 2-2
2.2 Alarm Signals............................................................................ 2-2
2.2.1
Buzzer / LED ............................................................. 2-2
2.2.2
Touchscreen .............................................................. 2-2
2.2.3
Light tower ................................................................. 2-3
2.2.4
TSC Alarm menu ....................................................... 2-3
2.3 Light tower signal description.................................................... 2-3
2.4 Toxic Material ........................................................................... 2-5
2.5 Safety measures ....................................................................... 2-5
3. Process setup and acceptance.....................................2.5-1
3.1 Process recipe setup procedure ............................................ 3.1-1
3.1.1
Introduction ............................................................. 3.1-1
3.1.2
6 steps to a process recipe ..................................... 3.1-1
3.1.3
Recommended command sequence ...................... 3.1-2
3.1.4
Modifying the default Tempress recipe ................... 3.1-3
3.2 Process recipe startup and fine-tuning................................... 3.2-1
3.2.1
Introduction ............................................................. 3.2-1
3.2.2
Prerequisites........................................................... 3.2-1
3.2.3
Initial settings .......................................................... 3.2-1