PROCESS DESCRIPTION
P
ROCESS
M
ANUAL
4.1-7
73
12 SET PRESSURE
74
Message PURGE [12]. Sonalert alarm No
75
Time: 000:02:00 (hr:min:sec) Variable Command: No
76
Gas [PRESSURE [8]] at [250] [MTOR] Variable Command: Yes
77
Alarm limit setting for Gas NH3 [4] at 10 % ( ± 50 SCCM) Variable Command: No
78
Branch on gas/pressure NH3 [4] to step NH3 PURGE. Sonalert alarm Yes
79
13 DEPOSITION
80
Message DEPOSITION [13]. Sonalert alarm No
81
Time: [000:30:00] (hr:min:sec) Variable Command: Yes
82
Gas DCS 1 [2] at [60.0] [SCCM] Variable Command: Yes
83
Alarm limit setting for Gas DCS 1 [2] at 10 % ( ± 20.0 SCCM) Variable Command:
No
84
Alarm limit setting for Gas PRESSURE [8] at 5 % ( ± 100 MTOR) Variable
Command: No
85
Branch on gas/pressure DCS 1 [2] to step NH3 PURGE. Sonalert alarm Yes
86
Branch on gas/pressure NH3 [4] to step NH3 PURGE. Sonalert alarm Yes
87
Branch on gas/pressure PRESSURE [8] to step NH3 PURGE. Sonalert alarm Yes
88
14 NH3 PURGE
89
Message PURGE [12]. Sonalert alarm No
90
Time: 000:02:00 (hr:min:sec) Variable Command: No
91
Gas DCS 1 [2] at 0.0 [SCCM] Variable Command: No
92
Gas PRESSURE [8] at 0 [MTOR] Variable Command: No
93
Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
94
Alarm Limit Setting for All Analog Output Channel at 0 %
95
15 EVAC CONTINUED
96
Message EVACUATE 3 [10]. Sonalert alarm No
97
Time: 000:05:00 (hr:min:sec) Variable Command: No
98
Gas NH3 [4] at 0 [SCCM] Variable Command: No
99
Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
100
16 PURGE
101
Message PURGE [12]. Sonalert alarm No
102
Time: 000:05:00 (hr:min:sec) Variable Command: No
103
Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
104
17 EVACUATE
105
Message EVACUATE 3 [10]. Sonalert alarm No
106
Time: 000:05:00 (hr:min:sec) Variable Command: No
107
Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
108
18 LEAKCHECK
109
Message LEAKCHECK [11]. Sonalert alarm No
110
Time: 000:02:00 (hr:min:sec) Variable Command: No
111
Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = OFF,MAINVAC[16] = OFF Variable Command: No
112
Alarm limit setting for Gas PRESSURE [8] at 2 % ( ± 40 MTOR) Variable
Command: No