Amtech TEMPRESS, Руководство пользователя

Страница: 25 / 91

PROCESS SETUP AND ACCEPTANCE
P
ROCESS
M
ANUAL
3.3-4
17 Message ABORTED !!! [16]. Sonalert alarm No
18 Time: 000:15:00 (hr:min:sec) Variable Command: No
19 Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] = ON,EVACDCS1[12]
= OFF,EVACDCS2[13] = OFF,EVACNH3[14] = OFF,SOFTSTRT[15] = ON,MAINVAC[16]
= ON Variable Command: No
20 02 EVACUATE
21
Message ABORTED !!! [16]. Sonalert alarm No
22 Time: 000:05:00 (hr:min:sec) Variable Command: No
23 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] = OFF,SOFTSTRT[15] =
ON,MAINVAC[16] = ON Variable Command: No
24 03 READY
25
Message STANDBY [1]. Sonalert alarm Yes
26 Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] = ON,EVACDCS1[12]
= OFF,EVACDCS2[13] = OFF,EVACNH3[14] = OFF,SOFTSTRT[15] = ON,MAINVAC[16]
= ON Variable Command: No
27 Wait for operator
28 04 BACKFILL 1
29
Message BACKFILL [14]. Sonalert alarm No
30 Time: 000:01:00 (hr:min:sec) Variable Command: No
31 Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] = ON,EVACDCS1[12]
= OFF,EVACDCS2[13] = OFF,EVACNH3[14] = OFF,SOFTSTRT[15] = ON,MAINVAC[16]
= OFF Variable Command: No
32 05 BACKFILL 2
33
Message BACKFILL [14]. Sonalert alarm No
34 Time: 000:10:00 (hr:min:sec) Variable Command: No
35 Gas N2 [1] at 10.00 [SLM ] Variable Command: No
36 Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] = ON,EVACDCS1[12]
= OFF,EVACDCS2[13] = OFF,EVACNH3[14] = OFF,SOFTSTRT[15] = OFF,MAINVAC[16]
= OFF Variable Command: No
37 END