Amtech TEMPRESS, Руководство пользователя

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OPERATION INSTRUCTIONS
P
ROCESS
M
ANUAL
5.9.2
TSC-2
1) return to the main overview
screen
2) select ‘Recipes’ in the
navigation bar to access the
recipe screen
3) double click ‘Normal’ or
‘Abort’ in the mainfield
4) select ‘New’ to create a new
or ‘Edit’ to edit a process
recipe
5) for a new process recipe
confirm the question: ‘Do
you want to add a new recipe’
6) give recipe name
5.9-3