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Maintenance

MPS75SLE Hardware Manual

4. Use (4) M2 socket head cap screws to secure the opposite ends of the bellow support rods.

Figure 4-5:

Secure the Bellows Support Rods

5. Attach the bellows to the ends of the stage and to the carriage using (8) M2 socket head cap screws.
Ensure that the bellows are aligned to the stage travel.

Figure 4-6:

Attach the Bellows

6. Attach the bellows cover using (4) M3 button head cap screws.

Figure 4-7:

Attach the Bellows Cover

30

Chapter 4

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Содержание MPS75SLE-025

Страница 1: ...Revision 1 00 00 MPS75SLE Hardware Manual...

Страница 2: ...ervice aerotech com 101 Zeta Drive Pittsburgh PA 15238 2897 www aerotech com United Kingdom Japan Phone 44 0 1256 855055 Fax 44 0 1256 855649 Email service aerotech co uk Phone 81 0 50 5830 6814 Fax 8...

Страница 3: ...he Stage to the Mounting Surface 10 2 3 1 For XY Assemblies and Special Cases 11 2 4 Attaching the Payload to the Stage 12 Chapter 3 Electrical Specifications and Installation 15 3 1 Motor and Feedbac...

Страница 4: ...Turn Ball Screw in Vertical Orientation 14 Figure 3 1 DC Motor and Feedback Wiring 19 Figure 3 2 Stepper Motor and Feedback Wiring 20 Figure 3 3 Machine Direction 23 Figure 3 4 Analog Encoder Phasing...

Страница 5: ...MPS75SLE Series Mechanical Specifications 3 Table 3 1 Connector Pin Assignments DC Motor 17 Table 3 2 Encoder Connector Pin Assignments DC Motor 18 Table 3 3 Connector Pin Assignments Stepper Motor 18...

Страница 6: ...Table of Contents MPS75SLE Hardware Manual vi www aerotech com This page intentionally left blank...

Страница 7: ...al electrical safety requirements 5 Operator safeguarding requirements must be addressed during final integration of the product W A R N I N G To minimize the possibility of electrical shock bodily in...

Страница 8: ...Electrical Safety MPS75SLE Hardware Manual viii www aerotech com This page intentionally left blank...

Страница 9: ...ore declares that it is not allowed to put the equipment into service until the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in c...

Страница 10: ...Declaration of Conformity MPS75SLE Hardware Manual x www aerotech com This page intentionally left blank...

Страница 11: ...0 100 mm travel stage with ball screw linear encoder and limits Linear Encoder LTAS Amplified sine output 1 Vpp 20 um signal period requires signal multiplier LTX100 0 05 um line driver output Tableto...

Страница 12: ...n Use the system in a low vibration environment Excessive floor or acoustical vibration can affect system performance Contact Aerotech for information regarding your specific application Protection Ra...

Страница 13: ...m 2 0 m 3 0 m 3 0 m Flatness 2 0 m 2 0 m 3 0 m 3 0 m Maximum Speed 1 0 mm rev Ball Screw DC 50 mm s 50 mm s 50 mm s 35 mm s SM 30 mm s 30 mm s 30 mm s 30 mm s Load Capacity 3 Horizontal 15 kg Side 15...

Страница 14: ...1 Do not remove the MPS75SLE from the sealed bag until it is ready for use 2 Always handle the MPS75SLE in a clean environment and use powder free polyethylene gloves to prevent any contaminants from...

Страница 15: ...Use compressed nitrogen or clean dry oil less air to remove any dust or debris that has collected during shipping Set the MPS75SLE on a smooth flat and clean surface Each MPS75SLE has a label listing...

Страница 16: ...TH CABLES 50 6 TYP 8 MOUNTING HOLES 4 5 TYP 8 TYP C 32 75 100 33 50 35 25 77 64 5 4X M4X0 7 HELICOIL 7 MAX THREAD NO DEEPER DAMAGE TO STAGE CAN RESULT 4X M3X0 5 HELICOIL 6 MAX THREAD NO DEEPER DAMAGE...

Страница 17: ...LE 075 320 98 5 125 282 75 79 84 MPS75SLE 100 350 113 5 150 282 100 104 108 123 B A X 2 D A STAGE CABLE EXITS 3M LENGTH CABLES 50 6 TYP 8 MOUNTING HOLES 4 5 TYP 8 TYP C 75 37 33 TYP 8 MOUNTING HOLES 1...

Страница 18: ...0 197 M4x0 7 HELICOIL 8 8 PLACES 11 3 6 8 SLOT 7 1 THRU 4 PLACES MP MPS75SL 075 10 75 50 8 50 33 127 125 138 50 167 M4x0 7 HELICOIL 8 8 PLACES 11 3 6 8 SLOT 7 1 THRU 4 PLACES MP MPS75SL 050 10 75 50 8...

Страница 19: ...tion 253 8 TYP 13 28 75 43 20 5 25 7 5 33 75 M4X0 7 HELICOIL THRU ALL 22 PLACES 14 12 5 17 5 23 5 14 12 5 23 5 33 50 33 50 4 5 THRU ALL 8 TO DEPTH SHOWN 8 PLACES DIMENSIONS MILLIMETERS Figure 2 4 MPS7...

Страница 20: ...5SLE is precision machined and verified for flatness prior to product assembly at the factory If machining is required to achieve the desired flatness it should be performed on the mounting surface ra...

Страница 21: ...er source or includes an integrated brake 1 Manually move the stage to one end of travel revealing two of the hidden mounting holes for the stage 2 Mount the stage to the base with M4 socket head cap...

Страница 22: ...system performance the mounting interface should be flat within 5 m W A R N I N G Refer to the dimensions in Section 2 2 for maximum allowable thread engagement A screw extending through the stage tab...

Страница 23: ...2 8 Stage Orientations The approximate amount of torque required to turn the ball screw of an MPS75SLE series stage can be found from Figure 2 9 or the following equation Torque REQ Axial Load x Leado...

Страница 24: ...ware Manual 0 00 5 00 10 00 15 00 20 00 25 00 30 00 0 0 5 1 1 5 2 2 5 3 3 5 4 Torque Required N mm Applied Axial Load kg Load Torque Plot MPS75SL SM and DC Figure 2 9 Torque Required to Turn Ball Scre...

Страница 25: ...upplied with the system separate from this documentation The electrical wiring from the motor and encoder are integrated at the factory Refer to the following sections for standard motor wiring and co...

Страница 26: ...stage while it is energized The System Integrator or qualified installer is responsible for determining and meeting all safety and compliance requirements necessary for the integration of this stage...

Страница 27: ...nd axis will not be available to drive a motor Table 3 1 Connector Pin Assignments DC Motor Pin Description Connector 1 Connector key to prevent improper connection 13 25 1 14 2 Cosine N 3 Sine N 4 Ma...

Страница 28: ...Party P N Backshell ECK00656 Amphenol 17E 1726 2 Connector ECK00300 FCI DB25S064TLF Table 3 3 Connector Pin Assignments Stepper Motor Pin Description Connector 1 Connector key to prevent improper conn...

Страница 29: ...nd feedback connections 10 11 22 23 5 6 15 17 14 2 3 16 4 STAGE COM CASE CASE CASE CASE COM 5V COSINE COSINE N SINE SINE N MARKER MARKER N Typical Both Encoders DC DC DC DC MOTOR CONNECTIONS THIRD PAR...

Страница 30: ...nual 23 10 11 12 22 5 6 17 STAGE COM CASE CASE CASE CASE CASE COM 5V A B A Return A B B Return MOTOR CONNECTIONS THIRD PARTY CONTROLLER 19 7 24 LIMIT LIMIT 1 5V 10K Pull Up 10K Pull Up 5V Figure 3 2 S...

Страница 31: ...Incremental Encoder RS422 485 compatible Limit Switch Specifications Supply Voltage 5 V Supply Current 25 mA Output Type Open Collector Output Voltage 5 V Output Current 10 mA sinking Output Polarity...

Страница 32: ...8 Phase Resistance 1 9 Ohm Phase Inductance 0 0017 H Maximum Speed 1800 rpm W A R N I N G The motor case temperature may exceed 75 C Table 3 6 Encoder Specifications DC Motor Stepper Motor Feedback Li...

Страница 33: ...o Section 3 5 for Motor and Feedback phasing information Programming direction of a stage is set by the controller that is used to move the stage Programming direction is typically selectable in the c...

Страница 34: ...810 0 90 180 270 360 450 540 630 720 810 0 90 180 270 360 450 540 630 225 585 720 810 Figure 3 4 Analog Encoder Phasing Reference Diagram CCW LIMIT CW LIMIT Clockwise CW Machine Direction MRK MRK N Po...

Страница 35: ...elops for the application Longer or shorter intervals may be required to maintain the film of lubricant on the bearing surfaces If the application process uses only a small portion of travel for most...

Страница 36: ...er seals on the ball screw or damage the cross roller bearing cages If acetone is required avoid the screw and bearing seals Acetone can also damage the black paint on the motor and encoder covers W A...

Страница 37: ...ue 6 Apply a thin continuous film of lubricant to the ball screw threads and precision rail guides A good quality natural bristle artist s brush makes an excellent applicator 7 Move the stage to the o...

Страница 38: ...er from the stage 2 Unbolt the bellows from the stage endplates Figure 4 1 Remove the Bellows Bolts 3 Move the stage carriage to one end of travel and compress the bellows to gain access to the ball s...

Страница 39: ...s from the bottom of the stage that attach the motor cover Remove the motor cover Figure 4 3 Motor Cover Screw Location 3 Slide the two bellow support rods though the holes in the motor adapter plate...

Страница 40: ...re the Bellows Support Rods 5 Attach the bellows to the ends of the stage and to the carriage using 8 M2 socket head cap screws Ensure that the bellows are aligned to the stage travel Figure 4 6 Attac...

Страница 41: ...cap screws Figure 4 8 Attach the Bellows Tabletop 8 Re install the motor cover refer to Figure 4 3 ensuring that no wires are pinched or in the way Do not over tighten the screws that secure the moto...

Страница 42: ...ller documentation for polarity and compatibility requirements Example voltage requirements Controller trap or fault See controller documentation Stage moves uncontrollably Encoder sine and cosine sig...

Страница 43: ...ut such approval A Return Materials Authorization RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate...

Страница 44: ...s and conditions stated in the following On Site Non Warranty Repair section apply On site Non Warranty Repair If any Aerotech product cannot be made functional by telephone assistance or purchased re...

Страница 45: ...MPS75SLE Hardware Manual Revision History Appendix B Revision History Revision Date General Information 1 00 00 April 27 2015 New Manual www aerotech com Appendix B 35...

Страница 46: ...Revision History MPS75SLE Hardware Manual 36 Appendix B www aerotech com This page intentionally left blank...

Страница 47: ...HDZ Angle Bracket Dimensions 9 Humidity 2 I inspect 25 Inspection Schedule 25 isopropyl alcohol 26 L Limit Switch Specifications 21 lubricants vacuum operation 4 Lubrication 26 M Mechanical Specifica...

Страница 48: ...Index MPS75SLE Hardware Manual V Vacuum 4 vacuum guidelines 4 Vacuum Guidelines 4 Vibration 2 W Warranty and Field Service 33 38 Index www aerotech com...

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