Aerotech MPS75SLE-025, Руководство по оборудованию

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Table of Contents MPS75SLE Hardware Manual
List of Figures
Figure 2-1: MPS75SLE Dimensions 6
Figure 2-2: MPS75SLE with Bellows Dimensions 7
Figure 2-3: MPS75SLE Mounting Plate Dimensions 8
Figure 2-4: MPS75SLE HDZ Angle Bracket Dimensions 9
Figure 2-5: Mounting Hole Location 10
Figure 2-6: Access To All Mounting Holes 11
Figure 2-7: Load Capability of MPS75SLE Series Stages 12
Figure 2-8: Stage Orientations 13
Figure 2-9: Torque Required to Turn Ball-Screw in Vertical Orientation 14
Figure 3-1: DC Motor and Feedback Wiring 19
Figure 3-2: Stepper Motor and Feedback Wiring 20
Figure 3-3: Machine Direction 23
Figure 3-4: Analog Encoder Phasing Reference Diagram 24
Figure 3-5: Encoder Phasing Reference Diagram (Standard) 24
Figure 4-1: Remove the Bellows Bolts 28
Figure 4-2: Slide the Stage Carriage and Bellow Compression 28
Figure 4-3: Motor Cover Screw Location 29
Figure 4-4: Bellows Support Rods 29
Figure 4-5: Secure the Bellows Support Rods 30
Figure 4-6: Attach the Bellows 30
Figure 4-7: Attach the Bellows Cover 30
Figure 4-8: Attach the Bellows Tabletop 31
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