Aerotech MPS75SLE-025, Руководство по оборудованию

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MPS75SLE Hardware Manual Overview
1.3. Basic Specifications
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-3: MPS75SLE Series Mechanical Specifications
Mechanical Specifications MPS75SLE-025 MPS75SLE-050 MPS75SLE-75 MPS75SLE-100
Travel 25 mm 50 mm 75 mm 100 mm
Accuracy
Standard ±1.75 µm ±2.25 µm ±2.75 µm ±3.25 µm
HALAR
(1)
±0.75 µm ±0.75 µm ±1.0 µm ±1.0 µm
Resolution (Minimum Incremental
Motion)
(2)
±0.025 µm
Repeatability (Bi-Directional)
(2)
±0.1 µm
Straightness ±2.0 µm ±2.0 µm ±3.0 µm ±3.0 µm
Flatness ±2.0 µm ±2.0 µm ±3.0 µm ±3.0 µm
Maximum Speed
(1.0 mm/rev Ball-
Screw)
-DC 50 mm/s 50 mm/s 50 mm/s 35 mm/s
-SM 30 mm/s 30 mm/s 30 mm/s 30 mm/s
Load Capacity
(3)
Horizontal 15 kg
Side 15 kg
Vertical 4 kg
Stage Mass 2.3 kg 2.4 kg 2.5 kg 2.6 kg
Material Anodized Aluminum Body
(1) With Aerotech controllers.
(2) Resolution and repeatability specifications are for systems running in dual-loop mode with feedback resolutions of 25 nm on both
the rotary and linear encoders.
(3) Payload specifications are single-axis system.
(4) Excessive duty cycle may impact stage accuracy.
(5) Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis system is payload and
workpoint dependent. Consult factory for multi-axis or non-standard applications.
(6) Contact Aerotech for specifications of stages with bellows option.
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