Aerotech MPS75SLE-025, Руководство по оборудованию

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MPS75SLE Hardware Manual Table of Contents
Table of Contents
Table of Contents iii
List of Figures iv
List of Tables v
Safety Procedures and Warnings vii
EC Declaration of Incorporation ix
Chapter 1: Overview 1
1.1. Environmental Specifications 2
1.2. Accuracy and Temperature Effects 2
1.3. Basic Specifications 3
1.4. Vacuum Operation 4
Chapter 2: Mechanical Specifications and Installation 5
2.1. Unpacking and Handling the Stage 5
2.2. Dimensions 6
2.3. Securing the Stage to the Mounting Surface 10
2.3.1. For XY Assemblies and Special Cases 11
2.4. Attaching the Payload to the Stage 12
Chapter 3: Electrical Specifications and Installation 15
3.1. Motor and Feedback Connectors 16
3.2. Motor and Feedback Wiring 19
3.3. Motor and Feedback Specifications 21
3.4. Limits, Marker, and Machine Direction 23
3.5. Motor and Feedback Phasing 24
Chapter 4: Maintenance 25
4.1. Service and Inspection Schedule 25
4.2. Cleaning and Lubrication 26
4.2.1. Bellows Removal for Re-Lubrication 28
4.3. Bellows Installation 29
4.4. Troubleshooting 32
Appendix A: Warranty and Field Service 33
Appendix B: Revision History 35
Index 37
www.aerotech.com iii