Maintenance
MPS75SLE Hardware Manual
4.2.1. Bellows Removal for Re-Lubrication
For stages with the -BELLOWS option, the bellows will need to be removed to gain access to the ball screw
and precision rail guides.
N O T E :
Removing the upper axis on an XY, XZ, or YZ system will alter a precision alignment. Only
remove the bellows on each axis and follow for re-lubrication.
1. Begin by removing power from the stage.
2. Unbolt the bellows from the stage endplates.
Figure 4-1:
Remove the Bellows Bolts
3. Move the stage carriage to one end of travel and compress the bellows to gain access to the ball screw
and precision rail guides.
Figure 4-2:
Slide the Stage Carriage and Bellow Compression
4. Follow the steps outlined in
Section 4.2.
5. Move the stage carriage to the opposite end of travel and repeat the process on the newly exposed
track.
6. After you have completed re-lubrication, reattach the bellows to the stage end plates and restore power
to the stage.
28
Chapter 4
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Содержание MPS75SLE-025
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