Aerotech MPS75SLE-025, Руководство по оборудованию

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Overview MPS75SLE Hardware Manual
1.4. Vacuum Operation
Aerotech can specially prepare the MPS75SLE series stage for operation in vacuum environments. As part
of this preparation, attention to detail during modification, cleaning, and assembly results in stages with
optimal performance in vacuum applications. This section will outline preparation techniques for stages that
will operate in a vacuum:
l
Lubrication with vacuum-compatible lubricants
l
Use of materials, fasteners, and coatings with vacuum outgas performance compatible with the level of
vacuum specified
l
For high vacuum stages, elimination of situations that may allow gases to become temporarily trapped
during pump down
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Extensive cleaning prior to assembly in a clean environment and packaging in a special polyethylene
bag
Vacuum Guidelines
To ensure that the MPS75SLE will continue to perform well in the vacuum environment, follow the guidelines
listed below (in addition to standard handling, installation, and lubrication guidelines outlined in this manual).
1. Do not remove the MPS75SLE from the sealed bag until it is ready for use.
2. Always handle the MPS75SLE in a clean environment and use powder-free polyethylene gloves to
prevent any contaminants from adhering to the surface of the MPS75SLE.
3. During installation, use cleaned, vented, stainless steel fasteners when securing the MPS75SLE.
4. Reduced air pressure eliminates significant convective heat transfer. This, coupled with the viscous
vacuum-compatible lubricants, could result in excessive motor operating temperatures. Because of
this, consider all continuous torque ratings to be 40 to 60% lower than the value specified for operation
in normal atmospheric environment. Reduce motor usage accordingly.
5. For vacuum applications, the recommended lubricant is a small quantity of Braycote® 602EF grease
or a compatible substitute of equal quality.
6. Baking vacuum components between 100 and 125 °C for 24 to 48 hours significantly reduces
outgassing at initial pump-down to vacuum pressure and evaporates water vapor that impregnates
porous surfaces on the aluminum surfaces and Teflon cables. Aerotech recommends that customers
bake out vacuum systems when first installing them in the vacuum chamber.
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