Preparing for Measurement
3-25
IM AQ6380-02EN
1
2
3
4
5
6
App
Index
CAUTION
The instrument warranty will be void if damage is caused by incorrect setting of pressure and
flow rate.
French
ATTENTION
La garantie de l’instrument est nulle si les dommages sont causés par un paramètre incorrect
de pression ou de débit.
Installation and operation
The pressure regulator and the precision flowmeter must be inserted in the system between the
purge gas manifold outlet in your facility and the AQ6380.
Moreover, gas out port of the AQ6380 must not be blocked and be sure there is adequate
ventilation in the room.
Recommended Equipments for Purge QTY.
Comments
Shut off valve for 1/4” tubing
1
Must be free of oil
Adjustable pressure regulator
1
To regulate up to: 1.5 psig (0.01 MPaG)
Flowmeter with needle valve
1
To control up to: 25 SCFH (12 L/min)
1/4” outer diameter nylon tubing
As Required Must not be rubber
Purge gas
As Required 99.9999% pure grade nitrogen gas recommended
AQ6380
Purge gas manifold outlet in your facility
Nylon tubing
PURGE GAS IN port
PURGE GAS OUT port
Air opening
Shut off valve
Pressure
regulator
Precision
flowmeter
1.
Open the purge gas shut off valve then adjust the pressure regulator to provide an appropriate
supply pressure below the maximum rating of the precision flowmeter.
2.
Adjust the needle valve of the precision flowmeter slowly to provide an appropriate purge
gas flow rate. The internal moisture of the AQ6380 can be displaced by the purge gas within
approx. 60 minutes using a flow rate of 20 SCFH (9.5 L/min).
3.
To use the AQ6380 in a purged condition, perform alignment adjustment and wavelength
calibration with the internal air replaced with purge gas. See section 3.4 for details on the
alignment adjustment operation, and 3.5 for wavelength calibration.
3.7 Purge
