Veeco MS40, Operation And Maintenance Manual, Page: 82 / 169

Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
Parts that require cleaning are:
• Mass Spectrometer (including the source, collector and housing)
• Turbo-molecular pump
• Vacuum system valves
To obtain complete and unimpeded access to the internal systems of the MS-
40:
• Front & Rear Panels: With a screwdriver, turn the screw
located on top of each panel 1/4 turn and gently lower the doors
• Side Panels: Each panel lifts off the unit’s housing by grasping
the panel on the lower rear corner and pulling outward.
Cleaning Procedure for Contaminated Parts
Whenever the vacuum system becomes contaminated, it will be necessary to
disassemble and clean all components that are affected. Cleaning procedures
for vacuum apparatus such as electron tube parts, test chambers, etc., are
generally appropriate for cleaning MS-40 vacuum components.
WARNING!
At all times, the inhalation of cleaning fluid vapors must be
avoided. Also, extreme care should be taken with
flammable substances such as acetone.
NOTE:
When handling any components normally exposed to
vacuum, use only lint-free gloves. Touching any object
with bare hands will leave an organic residue on the
component that will out gas and negatively effect the
subsequent leak detection procedure.
The solvents referred to in this section are freon and acetone. Acetone is used
whenever large deposits of grease or oil are to be removed. Remember,
however, to use acetone in a well ventilated area. Since acetone is highly
flammable, all standard safety precautions when dealing with flammable
substances should be taken whenever acetone is used.
Immerse components in a cleaning solvent for five minutes. Thoroughly rinse
in hot water and dry immediately. Heating the components, prior to re-
assembly is the final stage of cleaning.
1109-186-00 Rev. C 4-13