Veeco MS40, Operation And Maintenance Manual, Page: 129 / 169

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5.4.2.10
Note the output reading 10 seconds after closing the isolation valve. As in
5.4.2.8., convert the reading if necessary.
5.4.2.11
Subtract the reading noted in 5.4.2.10 from that noted in 5.4.2.8. If the
difference is negative, it is to be considered equal to zero. The difference
will be called the “spurious-signal correction” and will be applied in Sec.
5.4.3.14.
5.4.2.12
Close the inlet valve.
5.4.2.13
Open the vent valve.
5.4.2.14
Remove only the plug from the inlet line; all connections are to remain in
place.
5.4.2.15
Close the vent valve.
5.4.3 SENSITIVITY
5.4.3.1
Connect the all-metal leak to the leak detector. However, if the procedure
of 5.4.2. was necessary, the small calibrated leak is put in place of the
plug removed in 5.4.2.14 above, the leak being inserted the same distance
into the connection as the plug had been.
5.4.3.2
The output is zeroed with the filament on.
5.4.3.3
The leak isolation valve is opened.
5.4.3.4
The pump valve is opened.
1109-186-00 Rev. C b-vii