VAT 95248-PAGI-0002 Installation, Operating, & Maintenance Instructions Download Page 71

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Installation, Operating & Maintenance Instructions

Series 612 DN 250 (I.D. 10”), EtherCAT

VAT Vakuumventile AG, CH-9469 Haag, Switzerland

Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com

282408EB

2012-04-23

71/81

Description

Required tool

Mou

nt mech

ica

l un

it t

o va

lve

15. Assemble mechanical unit in reverse

order as disassembled (steps 6 to 5).

16. Align pedestal parallel to valve body

and tighten the 2 mounting screws
with 2 Nm.

Allen Wrench

3mm

Asse

mbl

e a

ate

17. Place the plate on shaft and fasten

the screws a little.

Allen Wrench

3mm

Adequate

feeler gauge

18. Center plate

with feeler
gauge as shown

0.1 mm

19. Tighten plate screws with 2 Nm.

Summary of Contents for 95248-PAGI-0002

Page 1: ...11 The fabrication number is indicated on each product as per the label below or similar made in Switzerland Fabrication No 952 A Fabrication number Explanation of symbols Read declaration carefully b...

Page 2: ...ilms or any other reproduction processes nor may it be manipulated with electronic systems duplicated or distributed without written permission from VAT Offenders are liable to pay damages The origina...

Page 3: ...22 2 6 8 Digital output 22 2 6 9 Service port connection 22 2 6 10 Isolation valve control IVC connection 23 3 Operation 24 3 1 Introduction 24 3 1 1 Local operation 24 3 1 2 Remote operation 25 3 1 3...

Page 4: ...2012 04 23 4 81 4 Trouble shooting 64 4 1 Additional EtherCAT warning 66 5 Maintenance repairs 67 5 1 Maintenance procedures 68 5 2 Option board 73 5 2 1 Durability of power fail battery 73 5 2 2 Retr...

Page 5: ...48 30 CH vatvalve com www vatvalve com 282408EB 2012 04 23 5 81 1 Use of product This product is a Butterfly control valve for downstream pressure control in vacuum systems Use product for clean and d...

Page 6: ...E Digital outputs 3 Input voltage Input current Breaking capacity 70 VDC or 70 V peak max 0 5 ADC or 0 5 A peak max 10 W max connector INTERFACE Analog outputs 3 optional 0 10 VDC 1 mA max connector I...

Page 7: ...0 C Mounting position Any Control unit for ISO KF version needs support when mounted on horizontal piping and control unit does not hang Wetted materials Body Aluminium AA6082 3 2315 Plate Aluminium A...

Page 8: ...nstallation 2 1 Unpacking Valves DN63 2 and larger must not be lifted solely by the actuator 2 2 Installation into the system Fingers and objects must be kept out of the valve opening and away from mo...

Page 9: ...s 2 according to the recommendations of the sensor manufacturer and directives given under Requirements to sensor connection 4 Connect pressure sensor cable 3 to sensor s and then to valve connector...

Page 10: ...ficients the torque needs to be adapted Please review design guidelines for Helicoil Screw connections and make sure that screws in use are capable to withstand applied torques are appropriate for the...

Page 11: ...vatvalve com 282408EB 2012 04 23 11 81 2 4 Admissible forces 2 4 1 Admissible forces for valve body Forces from the weight of other components can lead to deformation of the valve body and to malfunct...

Page 12: ...dmissible forces at controller Attention Do not pushing shocking load or stressing the valve controller Do not deposit anything at valve controller The admissible force at valve controller in regards...

Page 13: ...connected to the chamber by a pipe To maintain that the response time is not degraded by this connection it needs to meet the following requirements Inner diameter of connection pipe 10 mm Length of...

Page 14: ...max B1 min B2 min d1 d2 copper tinned 200 mm 25 mm 25 mm 4 5 mm customized Note Connection plates of ground strap must be total plane for a good electrical contact Note The connection point at chassi...

Page 15: ...odule SPS that converts 15 VDC from the 24 VDC Concepts External 24 VDC supplied to POWER connector is feed through to SENSOR connector to supply 24 VDC sensors Refer to chapter Power and sensor conne...

Page 16: ...6 3 1 Sensor power wiring via controller Note Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 24 VDC sensors at DB 15 female sensor conne...

Page 17: ...te Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 24 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above D...

Page 18: ...y 2 6 4 1 Sensor power wiring via controller Note Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 15 VDC sensors at DB 15 female sensor co...

Page 19: ...te Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above D...

Page 20: ...anic isolated from control unit 2 6 5 1 EtherCAT installation example 2 6 5 2 EtherCAT network and cable Connector type RJ45 standard connector Cable CAT5 6 or 7 STP shielded twisted pair not crossove...

Page 21: ...is interface allows for remote operation by means of a command set based on the EtherCAT protocol In addition there is a digital input and a digital output Digital input may only be operated by a swit...

Page 22: ...ignal must be applied for at least 50ms to be effective Refer to 2 6 6 Logic I O connection for details about input circuit 2 Highest priority is 1 Functions with lower priorities will not be effectiv...

Page 23: ...uipped with an interface to control an isolation valve This allows to control a solenoid to close open the isolation valve Pin 2 is low to open the isolation valve and high to close it In addition it...

Page 24: ...urchase our Control Performance Analyzer These software are beneficial especially for setup testing and maintenance How to start Connect service cable start software and push button LOCAL to enable fo...

Page 25: ...Then Display shows INIT for a moment followed by SYNC When safety mode is entered from operation i e pressure control mode the unit will automatically switch to position control mode and remain at cur...

Page 26: ...n There is a 4 digit display located on the panel It displays configuration status and position information For details refer to following tables Power up Description Digit 1 Digit 2 Digit 3 Digit 4 A...

Page 27: ...ONTROL mode P 0 100 valve position 0 closed 100 open POSITION CONTROL mode V Valve closed C Valve open O HOLD position frozen activated H ZERO running Z LEARN running L Safety mode established Refer t...

Page 28: ...ash SAFE OPERATIONAL CoE device in SAFE OPERATIONAL state Red a EXCEPTON state Fatal Event a If RUN and ERR turns red this indicates a fatal event forcing the bus interface to a physically passive sta...

Page 29: ...ly if required Refer to chapter Behavior during power up for details 2 EtherCAT configuration VAT specific configuration 1 Data type of pressure and position values optional 2 Range of pressure and po...

Page 30: ...Universal Hyper Terminal The set command is s 23xxy00000 The xxy value is the data type of a pressure and position signal y 0 signed integer 32 bit 1 floating point 32 bit IEEE 754 standard default 0...

Page 31: ...sible z upper scale value floating point entry with a point and for negative values possible xx signal number in the buffer xx Value Default range Min Max range Default lower scale value Default upper...

Page 32: ...positions 100 000 steps and for all pressures 1 000 000 steps If the range of pressure and position values is rising the accuracy of pressure and position will not rise There is only the gain factor b...

Page 33: ...is to assign each slave an address from the EtherCAT network The station alias address can be configured by Control View Control Performance Analyzer Universal Hyper Terminal or by the EtherCAT maste...

Page 34: ...land Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 282408EB 2012 04 23 34 81 4 2 Configuration via EtherCAT master tool 1 Go to Advanced Settings 2 Enter new station alias a...

Page 35: ...d sensor conofiguration Watchdog runs out o Valve is not any longer in the OPERATIONAL state and the VAT network failure warning is active see chapter 4 1 Additional EtherCAT warning o See Error LED 2...

Page 36: ...om 282408EB 2012 04 23 36 81 2 Set the green check marks and modify the default values of 2498 and 1000 100ms By default the check marks are not set and the values are grey highlighted The means the v...

Page 37: ...vailable at the bit 1 of the ESC register 0x0110 Settings The process data interface watchdog is normally enabled by default The timeout value s 100ms is also a default setting and must just be modifi...

Page 38: ...timeout values optional These timeout values are necessary for the EtherCAT mailbox transfer Parameter data Settings The mailbox timing values are normally set by default These values must just be mo...

Page 39: ...he logic digital input close valve can adjusted See also chapter LOGIC I O connection The logic digital input close valve can be configured by Control View Control Performance Analyzer Universal Hyper...

Page 40: ...rol Performance Analyzer Remote operation 1 Do power up configuration in menu Setup Valve 2 Do power fail configuration in menu Setup Valve 3 Do network failure configuration Go to Tools Terminal menu...

Page 41: ...or Service Box 2 Remote operation Refer to chapter OUTPUT Buffer GENERAL CONTROL SETPOINT for details Go to menu Zero ZERO and follow instructions 1 Wait until process chamber is evacuated and sensor...

Page 42: ...ectly By an OPEN VALVE CLOSE VALVE POSITION CONTROL or PRESSURE CONTROL command the routine will be interrupted Local operation Control View Control Performance Analyzer or Service Box 2 Remote operat...

Page 43: ...nt Pa m 3 s pWP pressure of working point Pa qWP CWP pWP CWP required conductance of working point l s qWP gasflow of working point mbar l s pWP pressure of working point mbar qWP CWP 78 7 pWP CWP req...

Page 44: ...Local operation Control View Control Performance Analyzer or Service Box 2 Remote operation Refer to chapter OUTPUT Buffer CONTROL MODE SETPOINT for details Push CLOSE button 1 In OUTPUT Buffer CONTRO...

Page 45: ...ontrol performance Refer to Tuning of control performance The included PID controller controls the chamber pressure according to the pressure setpoint by means of the valve position The PID controller...

Page 46: ...y below Strictly keep the procedure order Required information for support Go to Tools Create Diagnostic File in Control View resp Control Performance Analyzer and save file Pressure flow gas conditio...

Page 47: ...menu Setup Control Parameter Note It s not possible to do Gain factor adjustment via EtherCAT 3 11 1 2 Sensor delay adjustment Sensor delay adjustment effects Stability Default value is 0 Adjustment r...

Page 48: ...epending on units you are familiar with t Setpoint Ramp Adjustment procedure 1 Start with optimal gain factor and sensor delay time according to preceding tuning steps 2 Control a typical pressure flo...

Page 49: ...e Normally best pressure control response is achieved with max valve speed In particular applications it may be of advantage to have a slower valve response Note OPEN and CLOSE are always done with ma...

Page 50: ...3 EtherCAT interface Process data cyclic communication 3 13 1 OUTPUT Buffer Master PLC The EtherCAT process data mapping is done automatically corresponding to the following list and respectively to t...

Page 51: ...oating point 0 100 000 default adjustable 1 In case of the valve is is position mode CONTROL MODE Position 2 the signal is used as setpoint value min signal value default 0 valve is closed max signal...

Page 52: ...nsor must be adjusted 1 NOT USED reserved 2 PING PONG TX BIT PING PONG TX BIT transmitted from the master PLC is used to check the loop master PLC VAT station See chapter 3 11 9 Communication and timi...

Page 53: ...e sync manager information 3 13 2 1 Overview Buffer Pressure Pressure sensor 1 Pressure sensor 2 optional only in case of 2 sensor version Position Reserved not used Control mode Fatal error Reserved...

Page 54: ...he sensor 10 Volt equals to 1 000 000 Signal PRESSURE SENSOR 2 4 signed integer default or floating point 270000 1 230 000 default 2 7V 12 3V sensor signal adjustable 1 Optional only in case of 2 sens...

Page 55: ...L STATUS bitmap table Bit Description 0 FIELDBUS DATA VALID 0 Valve is not in the EtherCAT state OPERATIONAL or the process data output watchdog SyncManager2 is disabled 1 Valve is in the EtherCAT sta...

Page 56: ...RN DATA SET Learn data not present Learn required for adaptive pressure control 2 NOT USED reserved 3 POWER FAILURE BATTERY Not ready voltage too low 4 SENSOR OVERLAPPING Sensor deviation between sens...

Page 57: ...CONTROL MODE SETPOINT for example control mode is interlock or fatal error 2 ZERO DISABLED Using zero function not possible 3 PFO DEACTIVATED Power Failure Option is deactivated 4 NOT USED reserved 5...

Page 58: ...Name Sub Index Description Type Access Notes 1000h Device Type 00h Device Type U32 RO 0000 0000h No profile 1001h Error register 00h Error register U8 RO Not supported 1003h Pre defined error field 00...

Page 59: ...U32 RO 02h Mapped object 2 U32 RO NNh Mapped object NN U32 RO 1C00h Sync Manager Communication Type 00h Number of entries U8 RO 4 01h Mailbox wr U8 RO 1 02h Mailbox rd U8 RO 2 03h Process Data out U8...

Page 60: ...eter data are available Index Object Name Sub Index Description Type Valid Range Access Notes 2118h MAXIMUM LEARN PRESSURE 00h Max learn pressure in of the internal pressure upper scale value 1 000 00...

Page 61: ...MAXIMUM LEARN PRESSURE Too less or no gas flow 5 PRESSURE DECREASE Pressure decreases during learn Pressure must increase continuously when moving towards the close position within the learn procedur...

Page 62: ...n Master PLC and Slave VAT Valve See chapter OUTPUT Buffer PING PONG TX BIT and INPUT Buffer PING PONG RX BIT For visual overview see the diagram below Fieldbus Fieldbus buffer Microcontroller Ping Po...

Page 63: ...SSURE and SENSOR READING allocation Example of PRESSURE and SENSOR READING allocation Above picture shows a 2 sensor system In this configuration sensor 2 covers low range 100 mTorr and sensor 1 cover...

Page 64: ...fatal error motor driver failure detected Replace control and actuating unit according to Maintenance procedure Display shows D 0 Motor Interlock is open Motor power supplied Provide power to motor t...

Page 65: ...ore before performing ZERO System pumped to base pressure OPEN VALVE and bring chamber to base pressure before performing ZERO Sensor offset voltage exceeds 1 4V Replace pressure gauge PRESSURE CONTRO...

Page 66: ...rk failure No EtherCAT communication is active warning 8 EtherCAT cable ok Connection to master ok Process data output watchdog SyncManager2 disabled or timing settings wrong Check EtherCAT cable Chec...

Page 67: ...formed by the customer or has to be carried out by VAT The fabrication number on the valve made in Switzerland Fabrication No 952 A Fabrication number has always to be specified All supplies e g compr...

Page 68: ...intenance period is the lifetime of the vacuum grease being limited under increased temperature In this case grease will separate to PTFE and oil The oil may flow and contaminate the valve parts VAT c...

Page 69: ...t from valve unit 2 Unfasten clamp coupling Note If you can not access the coupling screw turn plate by hand until you can access the coupling screw with Allen Wrench Allen Wrench 2mm 3 Unfasten and r...

Page 70: ...s 8 Clean shaft feedthrough and valve body Lint and dust free cloth soaked with isopropyl alcohol Lubricate and install seals 9 Lubricate seal contact surface of valve body with a slight film of vacuu...

Page 71: ...on Required tool Mount mechanical unit to valve body 15 Assemble mechanical unit in reverse order as disassembled steps 6 to 5 16 Align pedestal parallel to valve body and tighten the 2 mounting screw...

Page 72: ...com www vatvalve com 282408EB 2012 04 23 72 81 Description Required tool Mount control and actuating unit to valve unit 20 Assemble control and actuating unit to valve unit Tighten mounting screws ad...

Page 73: ...PFO function the option board must be replaced after battery life has expired For ordering number of the modules refer to Spare parts and accessories 5 2 1 Durability of power fail battery The curves...

Page 74: ...on All work on the control and actuating unit has to be done under ESD protected environment to prevent electronic components from damage Top view on control and actuating unit with panel removed Note...

Page 75: ...x 41 81 771 48 30 CH vatvalve com www vatvalve com 282408EB 2012 04 23 75 81 Description Required tool 1 Remove panel screws Pozidriv screw driver size 1 2 Remove female screw locks from SENSOR and PO...

Page 76: ...ster board or replace it if existing master board is defect 7 Remove the interface board or replace it if existing interface board is defect 8 Remove the option board or replace it if existing option...

Page 77: ...0 I D 10 EtherCAT VAT Vakuumventile AG CH 9469 Haag Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 282408EB 2012 04 23 77 81 Description Required tool 12 Tighten...

Page 78: ...ting Maintenance Instructions Series 612 DN 250 I D 10 EtherCAT VAT Vakuumventile AG CH 9469 Haag Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 282408EB 2012 04...

Page 79: ...Product ordering number All sizes 612 Control and actuating unit 536301 Option board with SPS module 15VDC sensor power supply 378000 Option board with PFO module power failure option 378002 Option bo...

Page 80: ...rge Service cable PC to valve connection 230327 free wiring information available for download from www vatvalve com Connector kit consisting of DB 9 female POWER plug DB 15 male SENSOR plug DB 25 mal...

Page 81: ...r expense whether consequential special incidental direct or otherwise caused by arising out of or connected with the manufacture delivery including any delay in or failure to deliver packaging storag...

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