Installation, Operating & Maintenance Instructions
Series 612 DN 250 (I.D. 10”), EtherCAT
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
282408EB
2012-04-23
7/81
1.1.1 Valve unit
Valve unit
Pressure range at 20 C
1 x 10E-8 mbar to 1.2 bar (abs)
Leak rate to outside at 20 C
1 x 10E-9 mbar l/s
Cycles until first service
2’000’000 (unheated and under clean conditions)
Admissible operating temperature
10°C to +150°C
Mounting position
Any.
Control unit for ISO-KF version needs support when mounted on horizontal
piping and control unit does not hang.
Wetted materials
- Body
Aluminium AA6082 (3.2315)
- Plate
Aluminium AA6082 (3.2315)
- Shaft
Stainless steel 316L (1.4404 or 1.4435 )
- Plate screws
- Rotary feedthrough seals atmosphere side
Stainless steel 316L (A4)
Viton
- Rotary feedthrough seals vacuum side
Viton
- Slide bearing for shaft
iglidur
®
X
Max. differential pressure on plate
100mbar
Min. controllable conductance (C
min
)
[N
2
molecular flow]
5 l/s
Conductance in open position [N
2
molecular flow]
15000 l/s
Dimensions
Refer to dimensional drawing of specific valve ordering number
(available on request)
