Installation, Operating & Maintenance Instructions
Series 612 DN 250 (I.D. 10”), EtherCAT
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
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2012-04-23
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3.11 Pressure control
To prepare valve for PRESSURE CONTROL perform complete
«Setup procedure»
.
The valve has parameters that may be modified to tune pressure control performance.
Refer to
«Tuning of control performance»
.
The included PID controller controls the chamber pressure according to the pressure setpoint by means of the valve
position. The PID controller works with an adaptive algorithm to achieve best results under altering conditions (gasflow, gas
type).
Local operation
:
(‘Control View’ resp. ‘Control Performance Analyzer’)
Remote operation
:
(Refer to chapter «OUTPUT Buffer» for details)
Select or enter pressure setpoint
1. In «OUTPUT Buffer» > «PRESSURE
SETPOINT»
2. Select a valid value
3. In «OUTPUT Buffer» > «CONTROL MODE
SETPOINT»
4. Select [Pressure] (value = 5)
