V-TEK Royce DE35-ST, User Manual

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DE35-ST Operating Instructions
D292469I 73
Changing Output Configuration
To change the output configuration of the DE35 ST, press the OUTPUT SELECT key. This
will display two lines of the
Output Select Menu
with the cursor
>
pointing to
Quit
Menu .
1. Arrow down to Output Plate Configuration , press YES .
2. With this line active, use the + / – keys to scroll through the possible selections.
•
4 Trays, 2 in. Plate 3105
• 2 trays, 2 in vacuum release Plate 13784
•
1 Trays, 4 in. Plate 3084
•
2 Trays, 4 in. Plate 5089
• 2 Trays, 4 in. vacuum release Plate 16712
•
2 Vials Plate 9948
• 1 Substrate Plate 13472
•
Wafer Output Type 8 Plate 5528
• Wafer Output Type 7 Plate 12758
•
Wafer Output Type 27 Plate 13679
• Wafer Output Type 7, 29 Plate 14460
Note: Once the Output Plate is changed, any calibrations made for that plate will
be lost. It is recommended to use a separate process recipe for each different
Output Fixture in order to maintain calibrations when changing from one process
to the next.