V-TEK Royce DE35-ST, User Manual, Page: 103 / 146

102 D292469I
Film Frame Holders
Frame Holders are a flat circular frame with notches and flats to polarize the location of
the frame in the holder. This insures the die is loaded into the DE35 ST in the proper
orientation every time. Frame Holders come in a variety of sizes for all wafer sizes.
Operation of Expanding Film Frame Holder
1. Install the desired frame holder.
2. Plug the Wafer Holder Interlock Switch (on right back of Wafer Holder) into the
side of the Y-Stage.
3. Raise and unlatch the red handle, then lift the Top Plate.
4. Insert the Film Frame into the fixture, engaging the Alignment Pins in the
notches of the Film Frame.
5. Lower the Top Plate and press it down until the Clamp Mechanism can be
latched under the Bottom Plate.
6. Push the red handle over until it is horizontal. This will stretch the film by about
0.5 in. across the diameter of the wafer.
Occasionally, due to excessive saw through depth, the film may split during the
expansion process. If this happens, slackening the Knurled Screws holding the
Hinge Bar at the back of the Film Frame Holder can reduce the degree of
expansion. The Clamp Assembly at the front of the wafer holder can also be
slackened off in half revolution increments.
NOTE:
The Locking Set Screw bears onto the screw thread of the Clamp
Mechanism via a Nylon Insert to prevent damage to the Clamp Mechanism screw
thread.
7. Ensure the Activating Lever trips the Frame Holder Interlock Switch on the top of
the Film Frame Holder.
8. The wafer will probably not be oriented exactly with the North/South Axis of the
X-Y stage. While this is not an operational problem, it is easier to use if the wafer
streets are aligned with this axis.
To check North/South orientation, push the Frame Holder backward and forward
quickly. If the orientation is correct, the CCTV image of the saw cuts will scan
accurately along the cross hairs.
9. The Wafer Holder is designed with a Theta correction of about 5 degrees. To
rotate it, adjust the Theta Adjust Knurled Screw which is located at an angle on
the left side of the frame holder.
a. If the frame is too far off for this correction, set the holder back to the
middle and then open the holder and remove the locator pins.