Ulvac EGL-206M, Instruction Manual

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SECTION 3
7
NOTE
If the hearth is to be driven with motor, the revolution of the hearth drive
shaft should be set at below 5 rpm.
(14) Electric current feed-through for hearth position detection
* ULVAC Model PTS-004 (8P) can be used.
However, this feed-through is not required if the hearth drive shaft is turned
by hand and a mechanism for detecting the crucible position mechanically is
provided.
(15) Cooling water equipment
The Model EGL-206M/EGL-406M requires a water flow rate of 10 L/min or
more. Water pressure requirement is 3 to 3.5 kg/cm
2
or more, which slightly
varies with piping arrangement and length.
If water flow rate is not enough, pressurization by installing a pressor pump
near the deposition equipment is needed.
WARNING
1. For thin piping subject to back-pressure or pressure loss, extra pressure
should be taken into account.
2. It is recommended to use water whose specific resistance is 5 k cm or
more (dissolved solid components 100 ppm or less). Water with a
specific resistance of less than 5 k cm can also be used, but the water
path in the hearth will be contaminated over a long time of operation,
resulting in insufficient cooling, which may shorten the service life of the
hearth.