Ulvac EGL-206M, Instruction Manual

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SECTION 4
19
4. OPERATION
4.1 Check before Operation
Be sure to check the following before putting power to work.
(1) Make sure that the electron beam gun power supply is switched OFF.
(2) Check the wiring of the deflection coils.
・ Is the connection correct?
・
Is the wire thick enough and not likely to be heated?
・
Are the nuts on the coil terminals securely fastened?
・ Is the wiring of the deflection coils more then 20 mm away from
the filament cables? Is there a possibility of the wiring getting closer to
the filament cables by any chance?
WARNING
1. Wire the deflection coils 20mm or more away from the filament cables.
If the distance between these wires is not more than 20 mm, arc discharge
of the high voltage will take place and the power supply may fail.
2. Never wire the deflection coils in the wrong way.
(3) Checking the wiring of the filament cables
・ Is the thickness of the copper wire suitable?
・
Are the terminals tight?
・ Are the cables at least 15 mm away from the ground potential
portion?
・ Is there a possibility of the cables coming down and short-circuit
to ground?
(4) Checking the cooling water piping
・
Are all piping joints clamped?
・
Is the water flow direction correct?
・
Is there any water leak?
・
Is the piping thick enough?
DANGER
Never use the EB gun in a humid environment. Even in low-voltage, electric shock
may occur. In case of water leakage, wipe up water and use the EB gun after drying.