Ulvac EGL-206M, Instruction Manual

Page: 9 / 55

EB0007-03e
Table of Contents
Page
FOR DISPOSAL .................................................................................................................................. 8
1. GENERAL ................................................................................................................................... 1
1.1 Features of EGL-206M/EGL-406M ..................................................................................... 1
1.2 Specifications ....................................................................................................................... 2
2. UNPACKING AND RECEIVING CHECK ................................................................................ 4
2.1 Care to be taken in Unpacking ............................................................................................. 4
2.2 Check after Unpacking ......................................................................................................... 4
2.3 Standard Spare Parts List ..................................................................................................... 5
3. MOUNTING THE ELECTRON BEAM GUN ........................................................................... 6
3.1 Necessary Equipment ........................................................................................................... 6
3.2 Installation of Electron Beam Gun ....................................................................................... 8
3.3 Safeguards against X-Rays (See Fig. 3-5.) ...................................................................... 13
4. OPERATION ............................................................................................................................. 19
4.1 Check before Operation...................................................................................................... 19
4.2 Operation of Electron Beam Gun ....................................................................................... 21
5. DISASSEMBLY AND REASSEMBLY OF ELECTRON BEAM GUN ................................. 24
5.1 Changing Filament ............................................................................................................. 24
5.3 Parts List ............................................................................................................................. 29
6. MAINTENANCE....................................................................................................................... 34
6.1 Preventive Maintenance ..................................................................................................... 35
6.2 Scheduled Inspection .......................................................................................................... 37
6.3 Troubleshooting Guide ....................................................................................................... 40
7. TROUBLESHOOTING ................................................................................................................. 41