Ulvac EGL-206M, Instruction Manual, Page: 44 / 55

SECTION 6
34
6. MAINTENANCE
DANGER
1. The voltage applied in the EB gun is enough to give danger to a human
life. If you touch the EB GUN or a surrounding of the EB GUN, turn off
the main breaker of the EB power supply and leave it for 5 minutes or
more.
2. Improper ground cable gives danger to a human life. Check the cable not
to loose the connection, or not to be superfluously long. The regulation of
ground is described in a EB power supply instruction manual.
3. Never use the EB gun in a humid environment. Even in low-voltage,
electric shock may occur. In case of water leakage, wipe up water and use
the EB gun after drying.
DANGER
1. Make functional check of the flow switch in the following way before
starting the coater. Close the cooling water valve temporarily to check
that the GUN WATER indicator goes out. Then slowly open the valve
to feed water and check that the indicator lights when the flow rate
exceeds the necessary minimum value mentioned in the electron beam
gun instruction manual. If the flow switch does not operate properly,
adjust the operating point. The minimum flow rate is 10 L/min.
2. Never operate EB GUN with short-circuiting of interlock
CAUTION
1. After operation of an EB GUN, EB GUN, especially an emitter assembly
periphery, evaporation material, filament cables and high voltage
feed-through terminals become high temperature. Take care not to burn
yourself.
2. If a hearth of EGL-206M/EGL-406M is operated by a motor drive, take
care so that hand is not caught in the device.