Ulvac EGL-206M, Instruction Manual

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SECTION 5
29
5.3 Parts List
EGL-206M/EGL-406M ( 1/3 )
No. Part No. Description Q
’
ty
1 - EGL-206M/EGL-406M One set of E/B gun -
2
200001660700
Shield SUS304 1
3
210004014000
Hearth deck 1
4
C10000000417
O-ring Viton JIS B2401 P9 4
5
200001615100
Vacuum joint (1) Cu 2
6
200001660900
Trimming piece 2
7
200001661000
Holder SUS304 1
8
210004030200
Setscrew SUS304 2
9
200001661200
Y-axis magnet pole (right) 1
10
200001661400
Y-axis magnet pole ( left ) 1
11
200001661600
Y-axis iron core 2
12
210004016100
Y-axis magnet coil 2
13
200001661800
Main magnet pole ( right ) 1
14
200001662000
Main magnet pole ( left ) 1
15
200001662100
Hearth cover (2) SUS304 1
16
200001662200
Hearth cover (1) SUS304 2
17
200001662400
Adaptor ( right ) 1
18
200001662600
Adaptor ( left ) 1
19
210004015500
X-axis magnet coil 1
20
200007218400
Piping Cu 1
21
200001662900
Thrust washer 1
22
200001663000
Centering ring WS2035 1
23
200001663100
Thrust needle bearing NTB2035 1
24
200001663200
Centering ring GS2035 1
25
C10000000001
O-ring Neoprene ISO No. 210 1
26
210004039700
Hearth 1
27
210004030300
Bevel gear (1) SUS304 1
28
200001663400
Bearing #6907 1
29
C10000000002
O-ring Neoprene ISO No. 213 4
30
200001663500
Hearth shaft SUS304 1
31
200001663600
Water outlet port SUS304 1
32
200001663700
Water inlet port SUS304 1