Ulvac EGL-206M, Instruction Manual

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SECTION 1
1
1. GENERAL
The electron beam evaporation source EGL-206M/EGL-406M provides higher
performance and reliability based on ULVAC's years of accumulation of
technologies and actual achievement. EGL-206M/EGL-406M has six crucibles
with a capacity of 20cm
3 (a maximum power supply of 8kW) and EGN-406M
has six crucibles with a capacity of 40cm 3 (a maximum power supply of 8kW),
both of which provide flexible multilayer film vapor deposition.
The general features of electron beam vapor deposition are as follows.
This can input high density energy into a micro area, which enables
evaporation of high melting point metal, such as W, Ta, and Mo, and
oxides, such as SiO
2
and Al
2
O
3
.
With a water-cooled copper crucible, the pollution from the contact part
with evaporation materials is very low and high-purity vapor-deposited
film can be obtained.
A normal heat resistance evaporation source needs frequent
replacement of the filament, the boat, etc. depending on the evaporation
material, whereas an electron beam evaporation source is essentially
low in wear of the component parts.
1.1 Features of EGL-206M/EGL-406M
(1) A 6-point switching hearth with a capacity of 20cm
3
/ 40cm
3
is adopted,
providing vapor deposition of multilayer film.
(2) An electron beam deflects depending on the electromagnetic field, which
has an extremely low effect of secondary electrons on the object subject
to vapor deposition.
(3) Even sublimation substances can be smoothly evaporated by scanning the
beam spot on the X-axis and the Y-axis to eliminate a "hole-digging"
phenomenon.
(4) The electron beam is of 270
ﾟ
deflection and therefore not subject to
evaporation, making the filament lifetime longer.
(5) The easy-to-detach emitter assembly provides easy replacement of the
filaments, isolation insulators, etc.
(6) The mounted hearth position detecting function enables automation of
the hearth rotation.