Ulvac EGL-206M, Instruction Manual, Page: 12 / 55

SECTION 1
2
1.2 Specifications
Acceleration voltage : - 4kV
～ -10 kV DC
Emission current (MAX) : 20cm
３ Crucible ： 0.8 A MAX （ at -10kV ）
40cm ３ Crucible ： 1.0 A MAX （ at -10kV ）
Maximum input power : 20cm
３ Crucible ： 8kW MAX
40cm ３ Crucible ： 10kW MAX
X-axis deflection coil : -0.4 A
～ -3.5A MAX -18 Ｖ DC
2.8 (at 20 C)
Y-axis scan coil : 0 A
～ ±1.2A MAX± 12V DC)
0.9 (at 20 C)
Filament : 0V
～ 12V AC MAX 50A
Crucible: Quantity : 6
Capacity : EGL-206M
： 20cm ３
EGL-406M ： 40cm ３
Size : 20 cm
３ Crucible ： 42φ 32φ 19 H
40 cm ３ Crucible ： 50φ 41φ 25 H
Beam deflection angle : 270
Effective evaporation angle : 100 or more
Vapor deposition rate : 1.6 μm/min or more (Ribbon beam, Al 8 kW, 250H directly above
hearth, Crucible of 40cc)
Amount of cooling water : 10L/min or more 0.7MPa(max)
Water temperature : 15 C
～ 25 C
Hearth position detecting
mechanism
: NO contact; 4 set (Bit type)
Capacity: MAX １ A 50VAC max
External dimension : 214W x 343D x 144H, excluding protrusions. (See Chapter 8:
External Dimension Drawing of this document.)
Weight : Approx. 28 kg
Applied power supply : HPS-510S, HPS-1000S, HPS-1000N,HPS-1600F
CAUTION
1. The crucible capacity limits the maximum input power.
8 kW for a 20-cm
3
crucible and 10 kW for 40-cm
3
crucible.
2. For the cooling water, a water quality with a specific resistance of 5kΩ
･
cm or more is
recommended.
3. This EB gun cannot be baked. Set the temperature of the EB gun to 90
ﾟ
C or less
.