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Table of contents
FIDAMAT 6-G
vi
Operating instructions, 07/2006, A5E00478463
Dimensional drawings and circuit diagrams............................................................................................ 8-1
8.1
Motherboard pin assignments.................................................................................................... 8-1
Dimension diagrams .................................................................................................................. 8-3
Gas flow of the FIDAMAT 6-G ................................................................................................... 8-4
Spare parts and accessories .................................................................................................................. 9-1
9.1
Ordering information .................................................................................................................. 9-1
Spare parts................................................................................................................................. 9-2
Spare parts list ........................................................................................................................... 9-2
Gas flow chart with spare parts.................................................................................................. 9-4
Device views with spare part numbers ...................................................................................... 9-7
Return delivery ......................................................................................................................... 9-11
General information.................................................................................................................. 9-11
Return address / form .............................................................................................................. 9-11
Appendix.................................................................................................................................................A-1
A.1
Declaration of conformity ...........................................................................................................A-1
Response factors .......................................................................................................................A-2
Overview of operating functions.................................................................................................A-2
List of Abbreviations/Acronyms...............................................................................................................B-1
B.1
List of abbreviations ...................................................................................................................B-1
Glossary ..................................................................................................................................... Glossary-1