263-13228I
Read the instruction manual thoroughly before you use the product.
Keep this instruction manual for future reference.
Semiconductor Equipment Division
Power Supply Unit for Turbo Molecular Pump
Model:
EI-D1003M
Model:
EI-D1103M
Model:
EI-D1303M
Model:
EI-D2003M
Model:
EI-D2203M
Model:
EI-D2303M
Model:
EI-D3203M
Model:
EI-D3403M
Model:
EI-D4203M
INSTRUCTION MANUAL
Summary of Contents for EI-D1003M
Page 9: ...viii 263 13228 This page is intentionally left blank...
Page 19: ...SECTION 1 OUTLINE AND DESCRIPTIONS 6 263 13228 1 This page is intentionally left blank...
Page 20: ...2 2IDENTIFICATION AND FUNCTION 2 1 Power Supply Unit...
Page 23: ...SECTION 2 IDENTIFICATION AND FUNCTION 10 263 13228 2 This page is intentionally left blank...
Page 24: ...3 3CONSTRUCTION AND PRINCIPLE 3 1 Power Supply Unit...
Page 26: ...4 4SPECIFICATIONS 4 1 Power Supply Unit 4 2 Standards Fulfilled...
Page 39: ...SECTION 5 INSTALLATION 26 263 13228 5 This page is intentionally left blank...
Page 77: ...SECTION 6 OPERATION 64 263 13228 6 This page is intentionally left blank...
Page 91: ...SECTION 7 TROUBLESHOOTING 78 263 13228 7 This page is intentionally left blank...
Page 119: ...Appendix A COMMUNICATIONS A 28 263 13228 A This page is intentionally left blank...