Data Sheet
3-Axis Subsystems for Laser Beam Deflection AXIALSCAN
03/2013
AXIALSCAN-20-TY [200]
General Specifications
Power Supply
Voltage
±15 to ±18 V
Interface
Signals
Analog
±5 V, ±10 V, 0-10 V
±20 mA, 0-40 mA
Current
7.5 A, RMS, max. 10 A
Digital
XY2-100 Protocol
Ripple/Noise
Max. 200 mVpp, @20MHz
bandwidth
Max. Input Aperture
15 mm
Field Size
200x200 to 1.200x1.200 mm
²
Ambient Temperature
+15 to +35 °C
Lens Positions
Storage Temperature
-10 to +60 °C
Humidity
≤
80 % non-condensing
Weight
approx. 12.0 kg
Specifications for Linear Translator Modules
Field size
200 x 200 mm
²
500 x 500 mm
²
700 x 700 mm
²
1,000 x 1,000 mm
²
1,200 x 1,200 mm
²
Mechanical Data:
Distance D
1)
166.83 mm
121.65 mm
112.18 mm
104.89 mm
102 mm
Working Distance
2)
214 mm
585 mm
832 mm
1,204 mm
1,451 mm
Dynamic Data:
Spot Diameter 1/e
3)
10
µ
m
24
µ
m
33
µ
m
46
µ
m
55
µ
m
Resolution
< 7
µ
m
< 17
µ
m
< 24
µ
m
< 35
µ
m
< 42
µ
m
Acceleration Time
≤
3 ms
≤
3 ms
≤
3 ms
≤
3 ms
≤
3 ms
Focus Range in Z Direction
10 mm
237mm
628 mm
2,002 mm
4,283 mm
1) from the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M
2
= 1,0
Specifications for associated Deflection Units
SUPERSCAN-20
SUPERSCAN-IIE-20L
Mechanical Data:
Beam Displacement
26.0 mm
25.63
3)
/26.28 mm
Dynamic Data:
Typical Deflection
±0.393 rad
±0.393 rad
Repeatability (RMS)
3
µ
rad
2
µ
rad
Max. Gaindrift
1)
50 ppm/K
15 ppm/K
Max. Offsetdrift
1)
30
µ
rad/K
10
µ
rad/K
Long-term Drift
1,2)
< 300
µ
rad
< 150
µ
rad
Long-term Drift with water tempering
[W] [W2]
1,2)
< 100
µ
rad
Mirrors
QU
SI
BE
Acceleration Time (10-90%) (ms)
≤
0.6
≤
0.58
≤
0.61
≤
0.40
1) Drift per axis 2) after warming-up, variations of ambient temperature < 1K , variations of cooling water <1K 3) specification for QU fused Silica mirrors
Specifications for Optics
Nd:YAG tripled
Wavelength
355 nm
Coating
AR Coating
Max. Laser Power, cw
100 W/cm
2
Max. Laser Power, 10ns Pulse Width
20 MW/cm
2