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Data Sheet
3-Axis Subsystems for Laser Beam Deflection AXIALSCAN HP
01/2013
AXIALSCAN-30-C [200HP]
General Specifications
Power Supply
Voltage
±15 to ±18 V
Interface
Signals
Analog
±5 V, ±10 V
Current
7.5 A, RMS, max. 10 A
Digital
XY2-100 Protocol
Ripple/Noise
Max. 200 mVpp, @20MHz
bandwidth
Input Aperture (fbd)
20 mm
Field Size
200x200 bis 600x600 mm
²
beam optimized
Ambient Temperature
+15 to +35 °C
Lens Position
Storage Temperature
-10 to +60 °C
Humidity
≤
80 % non-condensing
Weight
approx 16.5 kg
Specifications for Linear Translator Modules
Field size
200 x 200 mm
²
300 x 300 mm
²
400 x 400 mm
²
500 x 500 mm
²
600 x 600 mm
²
Mechanical Data:
Distance D
1)
112mm
88 mm
76 mm
68 mm
63 mm
Working Distance
2)
199.2 mm
322.9 mm
446.7 mm
570.4 mm
694.2 mm
Dynamic Data:
Spot Diameter 1/e
3)
173.7
µ
m
255.4
µ
m
337.1
µ
m
418.8
µ
m
500.5
µ
m
Resolution
< 7
µ
m
< 10
µ
m
< 14
µ
m
< 17
µ
m
< 20
µ
m
Acceleration Time
≤
2.5 ms
≤
2.5 ms
≤
2.5 ms
≤
2.5 ms
≤
2.5 ms
1) from the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M
2
= 1,0
Specifications for associated Deflection Units
SUPERSCAN-IIE-30
SUPERSCAN-III-30
Mechanical Data:
Beam Displacement
35.38
4)
/35.82 mm
35.4
4)
/36.0 mm
Dynamic Data:
Typical Deflection
±0.393 rad
±0.393 rad
Repeatability (RMS)
2
µ
rad
2
µ
rad
Max. Gaindrift
1)
15 ppm/K
15 ppm/K
Max. Offsetdrift
1)
10
µ
rad/K
10
µ
rad/K
Long-term Drift
1,2)
< 150
µ
rad
Long term Drift with water tempering
[W] [W2]
1,2,3)
< 100
µ
rad
< 60
µ
rad
3)
Mirrors
QU
SI
SC
BE
QU
SI
SC
BE
Tunings
LN
RA
LN
RA
LN
RA
LN
RA
Acceleration Time (10-90%) (ms)
0.90
0.84
0.52
0.50
0.90
0.77
0.85
0.76
0.60
0.52
0.56
0.49
1)
Drift per axis, 2) after warming-up, variations of ambient temperature < 1K, variations of cooling water <1K 3) with water tempering at 4.5 l/min and 22˚C
temperature after 0.5 h warm-up 4) specification for QU fused Silica mirrors
Specifications for Optics
CO
2
Wavelength
10.600 nm
Coating
AR Coating
Max. Laser Power, cw
700 W/cm
2