RAYLASE AXIALSCAN, Manual

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Data Sheet 3-Axis Subsystems for Laser Beam Deflection AXIALSCAN HP
01/2013
AXIALSCAN-30-C [200HP]
General Specifications
Power Supply
Voltage ±15 to ±18 V
Interface
Signals
Analog ±5 V, ±10 V
Current
7.5 A, RMS, max. 10 A
Digital XY2-100 Protocol
Ripple/Noise Max. 200 mVpp, @20MHz
bandwidth Input Aperture (fbd) 20 mm
Field Size 200x200 bis 600x600 mm ²
beam optimized
Ambient Temperature +15 to +35 °C
Lens Position
Storage Temperature -10 to +60 °C
Humidity ≤ 80 % non-condensing
Weight approx 16.5 kg
Specifications for Linear Translator Modules
Field size 200 x 200 mm ² 300 x 300 mm ² 400 x 400 mm ² 500 x 500 mm ² 600 x 600 mm ²
Mechanical Data:
Distance D
1) 112mm 88 mm 76 mm 68 mm 63 mm
Working Distance
2) 199.2 mm 322.9 mm 446.7 mm 570.4 mm 694.2 mm
Dynamic Data:
Spot Diameter 1/e
3) 173.7 µ m 255.4 µ m 337.1 µ m 418.8 µ m 500.5 µ m
Resolution
< 7 µ m < 10 µ m < 14 µ m < 17 µ m < 20 µ m
Acceleration Time
≤ 2.5 ms ≤ 2.5 ms ≤ 2.5 ms ≤ 2.5 ms ≤ 2.5 ms
1) from the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M
2
= 1,0
Specifications for associated Deflection Units
SUPERSCAN-IIE-30 SUPERSCAN-III-30
Mechanical Data:
Beam Displacement 35.38
4)
/35.82 mm 35.4
4)
/36.0 mm
Dynamic Data:
Typical Deflection ±0.393 rad ±0.393 rad
Repeatability (RMS) 2 µ rad 2 µ rad
Max. Gaindrift
1)
15 ppm/K 15 ppm/K
Max. Offsetdrift
1)
10 µ rad/K 10 µ rad/K
Long-term Drift
1,2)
< 150 µ rad
Long term Drift with water tempering
[W] [W2]
1,2,3)
< 100 µ rad < 60 µ rad
3)
Mirrors QU SI SC BE QU SI SC BE
Tunings LN RA LN RA LN RA LN RA
Acceleration Time (10-90%) (ms) 0.90 0.84 0.52 0.50 0.90 0.77 0.85 0.76 0.60 0.52 0.56 0.49
1) Drift per axis, 2) after warming-up, variations of ambient temperature < 1K, variations of cooling water <1K 3) with water tempering at 4.5 l/min and 22˚C
temperature after 0.5 h warm-up 4) specification for QU fused Silica mirrors
Specifications for Optics
CO
2
Wavelength
10.600 nm
Coating
AR Coating
Max. Laser Power, cw
700 W/cm
2